公开(公告)号：JP2016525214A

公开(公告)日：2016-08-22

申请号：JP2016523896

申请日：2014-06-25

Applicant: ケーエルエー−テンカー コーポレイション ,  ケーエルエー−テンカー コーポレイション

Inventor： ロメイン サペイ ,  ロメイン サペイ

IPC: G01N21/956 ,  H01L21/66

CPC classification number: G01N21/6489 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/6495 ,  G01N2021/8845 ,  G01N2201/06113 ,  G01N2201/0662

Abstract: 試料の一部分上に斜照明波長の光ビームを方向付け、試料の一部分上に、試料の1つ以上の光ルミネセンス欠陥に光ルミネセンス光を出射させるための垂直照明波長の光ビームを方向付け、試料からの欠陥散乱放射線または光ルミネセンス放射線を収集し、試料からの放射線を、可視スペクトル中の第1の放射線部分、垂直照明波長光を含む第2の放射線部分、及び斜照明波長光を含む少なくとも第3の放射線部分に分離し、第1の放射線部分、第2の放射線部分、または第3の放射線部分の1つ以上の特徴を測定し、第1の放射線部分、第2の放射線部分、または第3の放射線部分の測定された1つ以上の特徴に基づき、1つ以上の光ルミネセンス欠陥または1つ以上の散乱欠陥を検出する、試料の欠陥検出及び光ルミネセンス測定。

Abstract translation: 引导在样品的一部分倾斜照明波长的光束，在样品的一部分，引导垂直照射波长的光束对在所述样品的一个或多个光致发光缺陷的发光的光致发光光 以收集来自样品缺陷散射的辐射或光致发光辐射，来自样品的辐射，所述可见光谱的第一辐射部分，其中包括一个垂直照明波长的第二辐射部分，并且所述斜照射波长 至少一个第三分离辐射部，一第一辐射部分，该第二辐射部分或所述第三辐射部分的一个或多个特征被测量，一个第一辐射部分，该第二辐射部分，包括 或者基于第三辐射部分的测量的一个或多个特性，以检测一个或多个光致发光缺陷或一个或样品的多个散射缺陷，缺陷检测和光致发光测量。

公开(公告)号：JP2014163933A

公开(公告)日：2014-09-08

申请号：JP2014030357

申请日：2014-02-20

Applicant: F Hoffmann-La Roche Ag ,  エフ ホフマン−ラ ロッシュ アクチェン ゲゼルシャフト

Inventor： DARKO KLINEC

IPC: G01N21/59 ,  G01N21/27 ,  G01N21/359 ,  G01N35/10

CPC classification number: G01N33/491 ,  G01N15/06 ,  G01N21/13 ,  G01N21/253 ,  G01N21/3151 ,  G01N21/51 ,  G01N35/02 ,  G01N35/1016 ,  G01N2015/045 ,  G01N2015/0693 ,  G01N2035/0406 ,  G01N2035/1018 ,  G01N2201/066 ,  G01N2201/0662 ,  G01N2201/0668

Abstract: PROBLEM TO BE SOLVED: To provide a method and an apparatus capable of reliably detecting clots at low costs when detecting clots in a liquid, and a corresponding laboratory automation system.SOLUTION: Method for detecting clots 1 in a liquid 2 stored in a sample container 3 comprises the steps: a) irradiating the sample container at changeable vertical irradiation position P_0 to P_n by light having a first wavelength by a first light source such that the light emitted from the first light source passes through the sample container along a first measurement path; b) measuring an intensity of light having the first wavelength, which passes along the first measurement path and exits the sample container; and c) detecting the clots 1 in accordance with the measured intensity.

Abstract translation: 要解决的问题：提供一种在液体中检测凝块时可以以低成本可靠地检测凝块的方法和装置，以及相应的实验室自动化系统。解决方案：用于检测储存在样品容器中的液体2中的凝块1的方法 3包括以下步骤：a）通过第一光源使具有第一波长的光以可变的垂直照射位置P_0至P_n照射样品容器，使得从第一光源发射的光沿着第一测量路径穿过样品容器 ; b）测量沿着第一测量路径通过并离开样品容器的具有第一波长的光的强度; 以及c）根据所测量的强度来检测凝块1。

公开(公告)号：WO2018087523A1

公开(公告)日：2018-05-17

申请号：PCT/GB2017/053325

申请日：2017-11-06

Applicant: UCL BUSINESS PLC

Inventor： HEBDEN, Jeremy ,  CHITNIS, Danial

IPC: G01N21/49 ,  G01N21/85

CPC classification number: G01N21/49 ,  G01N21/8507 ,  G01N2201/0221 ,  G01N2201/0662

Abstract: One example of the present approach provides a handheld, integrated device for determining the scattering and/or absorption properties of a medium by performing optical time- of-flight measurements. The device comprises a probe for inserting into the medium; and at least one solid state source configured to transmit an optical signal from the probe into the medium, and at least one solid state detector configured to receive said transmitted optical signal from the medium after propagation through said medium, subject to scattering and absorption within the medium. The at least one solid state source and the at least one solid state detector are configured to provide two or more propagation paths of different path-length through said medium. The at least one solid state detector is configured to detect timing information for the received optical signal to allow a time-of-flight to be determined for each of the two or more propagation paths.

Abstract translation: 本方法的一个示例提供了一种手持式集成装置，用于通过执行光学飞行时间测量来确定介质的散射和/或吸收特性。 该装置包括用于插入介质的探针; 以及至少一个固态源，其被配置为将来自所述探针的光信号传输到所述介质中，以及至少一个固态检测器，其被配置为在传播通过所述介质之后从所述介质接收所述传输的光信号，经受所述介质中的散射和吸收 中。 所述至少一个固态源和所述至少一个固态检测器被配置为提供穿过所述介质的具有不同路径长度的两个或更多个传播路径。 该至少一个固态检测器被配置为检测接收到的光信号的定时信息，以允许为两个或更多个传播路径中的每一个确定飞行时间。

公开(公告)号：WO2018031820A1

公开(公告)日：2018-02-15

申请号：PCT/US2017/046369

申请日：2017-08-10

Applicant: HARJUNMAA, Hannu ,  HARJUNMAA, Enni

Inventor： HARJUNMAA, Hannu ,  HARJUNMAA, Enni

IPC: G01N21/53

CPC classification number: G01N21/51 ,  G01N21/49 ,  G01N21/59 ,  G01N2201/0221 ,  G01N2201/0662

Abstract: A nephelometer for determining the turbidity of a body of fluid in which a light beam is directed as an angled beam through the body and two light detectors measure the intensity of light scatter at two points in the beam. The two measurements are divided and scaled, and then the result is logarithmically amplified and displayed as the turbidity.

Abstract translation: 用于确定流体的浊度的浊度计，其中光束作为成角度的光束通过主体而被引导，并且两个光检测器测量光束中两个点处的光散射强度。 将两个测量值分开并缩放，然后结果以对数形式放大并显示为浊度。

公开(公告)号：WO2014210195A1

公开(公告)日：2014-12-31

申请号：PCT/US2014/044149

申请日：2014-06-25

Applicant: KLA-TENCOR CORPORATION

Inventor： SAPPEY, Romain

IPC: H01L21/66

CPC classification number: G01N21/6489 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/6495 ,  G01N2021/8845 ,  G01N2201/06113 ,  G01N2201/0662

Abstract: Defect detection and photoluminescence measurement of a sample directing a beam of oblique-illumination wavelength light onto a portion of the sample, directing a beam of normal-illumination wavelength light for causing one or more photoluminescing defects of the sample to emit photoluminescent light onto a portion of the sample, collecting defect scattered radiation or photoluminescence radiation from the sample, separating the radiation from the sample into a first portion of radiation in the visible spectrum, a second portion of radiation including the normal-illumination wavelength light, and at least a third portion of radiation including the oblique-illumination wavelength light, measuring one or more characteristics of the first portion, the second portion or the third portion of radiation; detecting one or more photoluminescence defects or one or more scattering defects based on the measured one or more characteristics of the first portion, the second portion or the third portion of radiation.

Abstract translation: 样品的缺陷检测和光致发光测量将样品的一部分倾斜照明波长的光引导到样品的一部分上，引导正常照明波长的光束，以引起样品的一个或多个光致发光缺陷将光致发光光发射到部分上 收集来自样品的缺陷散射辐射或光致发光辐射，将来自样品的辐射分离成可见光谱中的辐射的第一部分，包括正常照明波长的光的第二部分辐射，以及至少三分之一 测量包括倾斜照明波长光的辐射部分，测量第一部分，第二部分或第三部分辐射的一个或多个特性; 基于所测量的第一部分，第二部分或第三部分辐射的一个或多个特性来检测一个或多个光致发光缺陷或一个或多个散射缺陷。

公开(公告)号：WO2010030043A1

公开(公告)日：2010-03-18

申请号：PCT/JP2009/066322

申请日：2009-09-11

Applicant: CANON KABUSHIKI KAISHA ,  NAKAJIMA, Takao ,  FUKUTANI, Kazuhiko

Inventor： NAKAJIMA, Takao ,  FUKUTANI, Kazuhiko

IPC: A61B5/00 ,  A61B8/00 ,  A61B8/08 ,  A61B8/13 ,  G01N21/17

CPC classification number: G01N21/1702 ,  A61B5/0059 ,  A61B5/0095 ,  A61B5/02007 ,  G01N2201/0662

Abstract: The biological information imaging apparatus includes an acoustic wave detector 107 that detects an acoustic wave that is generated from a light absorber 105 and converts it to a first electrical signal; a photo-detector 110 that detects intensities of the light corresponding to a plurality of propagation distances of the light which propagates through the specimen 110 and converts it to a second electrical signal; a signal processing apparatus 111 that derives an average effective attenuation coefficient µ eff of the specimen 110 based on the second electrical signal and derives an optical absorption coefficient µ a of the specimen 110 based on the first electrical signal and the average effective attenuation coefficient µ eff ; and an image constructing apparatus 111 that constructs an image of the distribution of the optical absorption coefficient µ a based on the distribution of the optical absorption coefficient µ a .

Abstract translation: 生物信息成像装置包括声波检测器107，其检测从光吸收体105产生的声波并将其转换为第一电信号; 光检测器110，其检测与通过样本110传播的光的多个传播距离相对应的光的强度，并将其转换为第二电信号; 信号处理装置111，其基于第二电信号导出样本110的平均有效衰减系数μeff，并且基于第一电信号和平均有效衰减系数μeff导出样本110的光吸收系数μa; 以及基于光吸收系数μa的分布构建光吸收系数μa的分布的图像的图像构造装置111。

公开(公告)号：WO2008034946A1

公开(公告)日：2008-03-27

申请号：PCT/FI2007/050495

申请日：2007-09-17

Applicant: MOVENTAS OY ,  VANHANEN, Jarmo ,  RINKIÖ, Marcus ,  TÖRMÄ, Päivi ,  KORPPI-TOMMOLA, Jouko ,  LOBERG, Kari ,  ELFSTRÖM, Jukka

Inventor： VANHANEN, Jarmo ,  RINKIÖ, Marcus ,  TÖRMÄ, Päivi ,  KORPPI-TOMMOLA, Jouko ,  LOBERG, Kari ,  ELFSTRÖM, Jukka

IPC: G01N21/85 ,  G01N21/31 ,  G01N33/28

CPC classification number: G01N21/8507 ,  G01N21/15 ,  G01N33/2888 ,  G01N2201/0662

Abstract: The invention relates to a method for monitoring the condition of a medium (50) in a channel (33), based on the transmission/emission of light, in which - a light at a set wavelength is conducted through a medium layer defined by a measuring gap (13.1) in a measuring head (12) pushed in from an opening (31) in the wall (30) of the channel (33), - the intensity of the light passed through medium layer, or a variable proportional to it is measured, and - the condition of the medium is evaluated, using measuring electronics (15), from the change of the intensity, according to established criteria. In the method, the wavelength of light used is such that the resolution of the aging phenomenon of the medium being monitored is optimal and the relationship of the temperature dependence of the medium to the measuring variable is taken into account. In addition, the invention also relates to a corresponding device (10).

Abstract translation: 本发明涉及一种用于基于光的透射/发射来监视通道（33）中的介质（50）的状态的方法，其中 - 设定波长的光通过由 从通道（33）的壁（30）中的开口（31）推入的测量头（12）中的测量间隙（13.1），通过介质层的光强度或与其成比例的变化 被测量，并且 - 根据确定的标准，使用测量电子学（15），从强度的变化来评估介质的状态。 在该方法中，使用的光的波长使得被监测的介质的老化现象的分辨率是最佳的，并且考虑介质与测量变量的温度依赖性的关系。 此外，本发明还涉及相应的装置（10）。

公开(公告)号：WO2005110028A3

公开(公告)日：2006-02-02

申请号：PCT/US2005015769

申请日：2005-05-06

Applicant: OPTISCAN BIOMEDICAL CORP ,  KEENAN RICH ,  LI KEN I

Inventor： KEENAN RICH ,  LI KEN I

IPC: G01N21/03 ,  B01L3/00 ,  G01N21/00 ,  G01N21/27 ,  G01N21/31

CPC classification number: B01L3/502723 ,  B01L2200/0684 ,  B01L2300/0825 ,  B01L2400/0406 ,  G01N21/0303 ,  G01N21/27 ,  G01N21/31 ,  G01N2201/0662

Abstract: Disclosed is a sample element for use in analyzing a concentration of an analyte in a material sample. The sample element comprises a sample chamber having at least one window, and a supply passage extending from the sample chamber. The supply passage defines a supply axis. The sample element further comprises a vent opening in fluid communication with the sample chamber. The vent opening is offset from the supply axis as the sample element is viewed orthogonal to the window.

Abstract translation: 公开了用于分析材料样品中分析物浓度的样品元件。 样品元件包括具有至少一个窗口的样品室和从样品室延伸的供给通道。 供应通道限定供应轴。 样品元件还包括与样品室流体连通的通气口。 当样品元件与窗口垂直时，排气口从供应轴偏移。

公开(公告)号：WO2005026706A1

公开(公告)日：2005-03-24

申请号：PCT/US2004/027910

申请日：2004-08-26

Applicant: APPLIED MATERIALS ISRAEL, LTD. ,  APPLIED MATERIALS, INC. ,  ELYASEF, Emanuel ,  NAFTALI, Ron ,  YALOV, Shimon

Inventor： ELYASEF, Emanuel ,  NAFTALI, Ron ,  YALOV, Shimon

IPC: G01N21/95

CPC classification number: G03F1/84 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/887 ,  G01N2021/95676 ,  G01N2201/0636 ,  G01N2201/0662

Abstract: The present invention relates to a method for inspecting integrated circuits fabricated on semiconductor wafers and/or masks used in the manufacture of such integrated circuits. An objesct of the invention isto reduce the number of false alarms due the misdection of defect, for example due to contamination on the optical surfaces of the inspection system. A mask is inspected by imaging an area thereof at least twice using an imaging beam passing through different optical paths, each including mirrors (M11,M12,M2), to three or more cameras, each of which is used to capture an image of the area.

Abstract translation: 本发明涉及一种用于检查制造在制造这种集成电路的半导体晶片和/或掩模上的集成电路的方法。 本发明的目的是减少由于缺陷的错误引起的假警报的数量，例如由于检查系统的光学表面上的污染。 通过使用通过不同光路的成像光束（M11，M12，M2）将三个或更多个相机用于拍摄图像，来检查掩模至少两次，其中每个照相机包括镜子（M11，M12，M2） 区。

公开(公告)号：WO1994009356A1

公开(公告)日：1994-04-28

申请号：PCT/US1993010055

申请日：1993-10-20

Applicant: QUALIMETRICS, INC.

Inventor： QUALIMETRICS, INC. ,  DeGUNTHER, Richard, N. ,  MARSH, Wilbert, I.

IPC: G01N21/00

CPC classification number: G01N21/538 ,  G01N21/532 ,  G01N2201/0662 ,  G01N2201/127

Abstract: A multiple angle and redundant visibility sensor includes a plurality of transmitter/receiver pairs (10 and 12), each pair cooperatively coupled so as to transmit and receive in conically controlled beams along a common optical axis such that each transmitter faces, and directs optical energy directly into, its receiver pair. The plurality of pairs are staggered in angular orientation with respect to each other, with a common volume of intersection through which the approximate center of each optical axis passes. Each transmitter propagates a substantially conical beam of light which passes through an aerosol media which causes molecular scattering of the light. A single transmitter outputs optical energy at any given time, and the receiver intercept the appropriate scattered energy at different scattering angles depending on the relative axial orientation with respect to the scattering volume and the incident radiation. Automatic calibration is effected by measuring the transmission properties through the forward beam or between cooperating pairs of transmitters and receiver elements. The various scattered energies are then compared to this direct path intensity to obtain the appropriate angular scattering coefficients.

Abstract translation: 多角度和冗余可见度传感器包括多个发射机/接收机对（10和12），每对协作地耦合以沿着公共光轴在锥形受控光束中发射和接收，使得每个发射机面对并引导光能量 直接进入其接收器对。 多个对以相对于彼此的角度定向交错，具有共同体积的交叉点，每个光轴的近似中心通过该交叉点。 每个发射器传播通过气溶胶介质的基本上圆锥形的光束，其导致光的分子散射。 单个发射器在任何给定时间输出光能，并且接收器根据相对于散射体积和入射辐射的相对轴向取向以不同的散射角截取适当的散射能。 通过前向波束或配对的发射机和接收机元件对测量传输特性来实现自动校准。 然后将各种散射能量与该直接路径强度进行比较，以获得适当的角散射系数。