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    Method for introducing reaction substance into vacuum chamber
    164.
    发明专利
    Method for introducing reaction substance into vacuum chamber 审中-公开
    将反应物质引入真空室的方法

    公开(公告)号：JP2010123945A

    公开(公告)日：2010-06-03

    申请号：JP2009250408

    申请日：2009-10-30

    Applicant: Honeywell Internatl Inc ,  ハネウェル・インターナショナル・インコーポレーテッド

    Inventor： TOUCHBERRY ALAN BRUCE ,  STARK TERRY DEAN

    IPC: H01S1/06 ,  G04F5/14

    CPC classification number: B01J3/02 ,  G04F5/14

    Abstract: PROBLEM TO BE SOLVED: To provide a method for introducing a reaction substance into a vacuum chamber while the simultaneous introduction of contaminating materials or substances is suppressed to the minimum or eliminated.
    SOLUTION: Consequently, contaminating materials or substances which may be generated and interfere with the measurement or other processes can be suppressed to the minimum or eliminated.
    COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题：提供将反应物质引入真空室的方法，同时将污染物质或物质的引入抑制到最小或消除。 因此，可以将可能产生的干扰测量或其它过程的污染物质或物质抑制到最小或消除。 版权所有（C）2010，JPO＆INPIT

    Horizontally moving mechanism of substrate holder in high vacuum
    168.
    发明专利
    Horizontally moving mechanism of substrate holder in high vacuum 失效
    底座保持架在高真空中的水平移动机理

    公开(公告)号：JPS61117278A

    公开(公告)日：1986-06-04

    申请号：JP23832084

    申请日：1984-11-14

    Applicant: Hitachi Ltd

    Inventor： TAKIMOTO HIROTAKA ,  UMESHIMA TAKAO

    IPC: H01L21/677 ,  B01J3/02 ,  C23C14/50 ,  H01L21/67

    CPC classification number: B01J3/02

    Abstract: PURPOSE:To reduce the size over the entire part of a vacuum device by project ing at least two pieces a pair of revolving shafts to the inside and outside of the device body, turning the revolving shafts to move a substrate holder in the device body and positioning the same by means of a sensor. CONSTITUTION:A pair of the revolving shafts 26, 27 are rotated via a chain 35 by driving a motor 32 in the case of moving horizontally the substrate holder from a vacuum chamber 22 of the device body 21 to a preliminary chamber 23. A conveying base 40 carrying the substrate holder is guided by guide roller trains 42, 43 and is moved by the meshing of a pinion 39 and a rack 41 from the chamber 22 side to the chamber 23 side according to the above-mentioned revolution. The rack 41 meshed with the pinion 38 moves further and is detected by a monitor 51 consisting of a light emitting element 51a and a photodetector 51b which feeds a stop signal to a control part to stop the motor 32 and to stop the substrate holder at the set position in the chamber 23. The motor 32 is driven in reverse direction in the case of moving horizontally the substrate holder from the chamber 23 to the chamber 22.

    Abstract translation: 目的：为了通过在设备主体的内部和外部投射至少两个一对旋转轴来减小真空装置的整个部分的尺寸，转动旋转轴以移动装置主体中的基板支架，并且 通过传感器对其进行定位。 构成：在将衬底保持器从装置主体21的真空室22水平移动到预备室23的情况下，一对旋转轴26,27通过驱动电动机32而经由链条35旋转。输送基座 携带基板保持件的导轨40,44由引导辊列42,43引导，并且通过根据上述旋转的小齿轮39和齿条41从腔室22侧到腔室23侧的啮合而移动。 与小齿轮38啮合的齿条41进一步移动，并且由发光元件51a和光电检测器51b组成的监视器51检测到，该光检测器51b向控制部分提供停止信号以停止马达32并停止基板保持器 在腔室23中设置位置。在将衬底保持器从腔室23水平移动到腔室22的情况下，马达32被反向驱动。

    Device for supplying powder under high pressure
    170.
    发明专利
    Device for supplying powder under high pressure 失效
    在高压下供应粉末的装置

    公开(公告)号：JPS59136128A

    公开(公告)日：1984-08-04

    申请号：JP901183

    申请日：1983-01-21

    Applicant: Hitachi Zosen Corp

    Inventor： TANAKA HIROKAZU ,  FUJITA HIROSHI

    IPC: B65G65/44 ,  B01J3/02 ,  B01J4/00

    CPC classification number: B01J3/02

    Abstract: PURPOSE:To supply powder in a satisfactory state under high pressure by providing a piston which forces upward the powder supplied into an inclined tank and a vane for discharging said powder so that the sticking of the powder on the wall surface and the bridging thereof can be prevented. CONSTITUTION:A device is constituted of a tank 5 whch is provided inclinedly, a piston 17 which is provided freely slidably along the axial center direction of the tank and forces upward powder 9, a powder discharging vane 20 which discharges the powder 9, a powder supplying valve 10, a powder discharging valve 14, an steam lines 23, 24 for pressure equalization. A powder supplying pipe 6 and a powder discharging pipe 7 are connected to said tank 5. The lines 23, 24 are connected to the top and bottom ends of the tank 5 and steam for pressure equalization is introduced behind the vane 20 and the piston 17.

    Abstract translation: 目的：通过提供一种将供给到倾斜罐中的粉末向上推动的活塞和用于排出所述粉末的叶片来提供在高压下处于令人满意的状态的粉末，使得粉末粘附在壁表面上及其桥接可以是 预防。 构成：装置由倾斜设置的罐5构成，活塞17沿着罐的轴向中心方向可自由滑动地设置并迫使向上的粉末9，排出粉末9的粉末排放叶片20，粉末 供给阀10，粉末排出阀14，用于压力平衡的蒸汽管线23,24。 粉末供给管6和粉末排出管7连接到所述罐5.管线23,24连接到罐5的顶端和底端，用于均压的蒸汽引入叶片20和活塞17之后 。

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