Abstract:
A flow apparatus for a spectrometer system includes a first optics element that is optically coupleable to a spectrometer and a second optics element that is optically coupleable to a light source. The first and second optics element may be arranged at a distance from one another in the region of a measurement gap through which a liquid can flow, in the region of which a light beam emerging from the second optics element and propagating into the first optics element is at least partly absorbable. A through-flow amount of the liquid through the measurement gap is controllable by changing the distance between the two optics elements, such that the spectrometer system can be used with various different samples.
Abstract:
Metrology tools are provided, which comprise both active and passive vibration isolation devices, passive or active isolation systems such as constrained layer dampers, particle impact dampers or liquid impact dampers, and/or noise cancellation transducers, combined in different supporting structures of the metrology tool to dampen and reduce vibrations at a wide range of frequencies and intensities, and to which frequency range spectral analysis and optimization may be applied to determine specific tool configurations according to the provided principles.
Abstract:
Automatically correcting for rotational misalignment of a wafer improperly mounted on a film frame includes capturing an image of portions of the wafer using an image capture device, prior to initiation of a wafer inspection procedure by an inspection system; digitally determining a rotational misalignment angle and a rotational misalignment direction of the wafer relative to the film frame and/or a set of reference axes of a field of view of the image capture device; and correcting for the rotational misalignment of the wafer by way of a film frame handling apparatus separate from the inspection system, which is configured for rotating the film frame across the rotational misalignment angle in a direction opposite to the rotational misalignment direction. Such film frame rotation can occur prior to placement of the film frame on the wafer table, without decreasing film frame handling throughput or inspection process throughput.
Abstract:
A multifunction wafer and film frame handling system includes a wafer table assembly having a wafer table providing an ultra-planar wafer table surface configured for carrying a wafer or a film frame, and at least one of: a flattening apparatus configured for automatically applying a downward force to portions of a warped or non-planar wafer in a direction normal to the wafer table surface; a displacement limitation apparatus configured for automatically constraining or preventing uncontrolled lateral motion of a wafer relative to the wafer table surface after cessation of an applied negative pressure and application of a positive pressure to the underside of the wafer via the wafer table; and a rotational misalignment compensation apparatus configured for automatically compensating for a rotational misalignment of a wafer mounted on a film frame.
Abstract:
The invention relates to optoelectronic systems for detecting one or more target particles. The system includes a reaction chamber, a specimen collector, an optical detector, and a reservoir containing cells, each of the cells having receptors which are present on the surface of each cell and are specific for the target particle to be detected, where binding of the target particle to the receptors directly or indirectly activates a reporter molecule, thereby producing a measurable optical signal.
Abstract:
A reagent card analyzer comprises an optical signal source configured to transmit an optical signal and an optical signal detector spaced a distance from the optical signal source to define an optical signal path into which the optical signal is transmitted, the optical signal detector configured to detect the optical signal and to output an electrical signal indicative of the optical signal. A reader is configured to read a reagent pad of a reagent card. A reagent card moving mechanism is configured to move the reagent card having the reagent pad including a leading and trailing end through the optical signal path. An optical detector interface is electrically coupled with the optical signal detector and configured to receive electrical signals and to output a pad detect signal indicative of at least one of the leading and the trailing end as the reagent card is moved through the optical signal path.
Abstract:
Improved gas leak detection from moving platforms is provided. Automatic horizontal spatial scale analysis can be performed in order to distinguish a leak from background levels of the measured gas. Source identification can be provided by using isotopic ratios and/or chemical tracers to distinguish gas leaks from other sources of the measured gas. Multi-point measurements combined with spatial analysis of the multi-point measurement results can provide leak source distance estimates. These methods can be practiced individually or in any combination.
Abstract:
Improved gas leak detection from moving platforms is provided. Automatic horizontal spatial scale analysis can be performed in order to distinguish a leak from background levels of the measured gas. Source identification can be provided by using isotopic ratios and/or chemical tracers to distinguish gas leaks from other sources of the measured gas. Multi-point measurements combined with spatial analysis of the multi-point measurement results can provide leak source distance estimates. These methods can be practiced individually or in any combination.