公开(公告)号：EP0665306B1

公开(公告)日：2001-10-31

申请号：EP95100710.3

申请日：1995-01-19

Applicant: TOKYO ELECTRON AMERICA Inc.

Inventor： Westendorp, Han ,  Meiling, Hans ,  Vanderpot, John W. ,  Berrian, Donald

IPC: C23C16/50 ,  H01J37/32

CPC classification number: H01J37/32082 ,  C23C16/50 ,  C23C16/5096 ,  C23C16/517 ,  H01J37/32009 ,  H01J37/32165

公开(公告)号：EP0665306A1

公开(公告)日：1995-08-02

申请号：EP95100710.3

申请日：1995-01-19

Applicant: TOKYO ELECTRON AMERICA Inc.

Inventor： Westendorp, Han ,  Meiling, Hans ,  Vanderpot, John W. ,  Berrian, Donald

IPC: C23C16/50 ,  H01J37/32

CPC classification number: H01J37/32082 ,  C23C16/50 ,  C23C16/5096 ,  C23C16/517 ,  H01J37/32009 ,  H01J37/32165

Abstract: The invention provides apparatus and methods for improving systems that expose samples to reactive plasmas, and more particularly for igniting plasma within a process module. The systems are of the type which have an electrode pair (12, 14) and a radiofrequency generator (16) connected to one electrode (14). Gas is injected between the electrodes where it is ionized and transformed into a plasma. The invention includes (i) ignition means (62) for ionizing gas, e.g., silane, between electrodes which are separated by a small gap of less than approximately one centimeter; and (ii) a radiofrequency energy generator (16) that preferably operates at high frequencies, e.g., 60 MHz, to transform molecules into plasma. Several embodiments of ignition means are taught by the invention, including: an electron source, an ultraviolet source, a second radiofrequency energy generator, and radioactive sources, among others. A process module constructed according to the invention, using high frequency energy and small electrode separations, has a high rate of deposition and a high production yield.

Abstract translation: 本发明提供了用于改进将样品暴露于反应性等离子体的系统的装置和方法，更具体地说，用于在过程模块内点燃等离子体。 这些系统是具有连接到一个电极（14）的电极对（12,14）和射频发生器（16）的类型。 在电极之间注入气体，将其电离并转化成等离子体。 本发明包括（i）用于将电极之间的气体（例如硅烷）电离的点火装置（62），所述电极间隔小于大约一厘米的小间隙; 和（ii）优选以高频（例如60MHz）操作以将分子转化成等离子体的射频能量发生器（16）。 点火装置的几个实施例由本发明教导，包括：电子源，紫外线源，第二射频能量发生器和放射源等。 根据本发明构造的使用高频能量和小电极分离的处理模块具有高的沉积速率和高的产量。