Titanium evaporation type vacuum apparatus for plasma
    189.
    发明专利
    Titanium evaporation type vacuum apparatus for plasma 失效
    用于等离子体的蒸发型真空吸尘装置(TITANIUM EVAPORATION TYPE VACUUM APPARATUS FOR PLASMA)

    公开(公告)号:JPS59209638A

    公开(公告)日:1984-11-28

    申请号:JP8432383

    申请日:1983-05-12

    CPC classification number: B01J3/006

    Abstract: PURPOSE:To minimize the radiation loss of formed plasma, by arranging a shield member between a titanium vapor generating part and the inner wall of a vacuum container. CONSTITUTION:A shield member 4 is arranged between the leading end 3a of a titanium evaporation apparatus 3 and a space for generating plasma P. The titanium vapor generated from the leading end 3a of the titanium evaporation apparatus 3 is adhered to the surface of the shield member 4 in the side of the titanium evaporation apparatus 3 and a part of the inner wall surface of a vacuum container 1 not contacted with plasma P and the vacuum container 1 is evacuated to a high vacuum degree by the adsorbing action of the adhered titanium. At this time, because titanium adhered to the shield member 4 and a part of the inner wall of the container 1 is not contacted with plasma P, no mutual action is generated and the mixing of titanium in plasma P is minimized to minimize the radiation loss of the formed plasma P.

    Abstract translation: 目的:通过在钛蒸汽发生部分和真空容器的内壁之间布置屏蔽部件,以最小化形成的等离子体的辐射损失。 构成:在钛蒸发装置3的前端3a和产生等离子体P的空间之间设置有屏蔽构件4.从钛蒸镀装置3的前端3a产生的钛蒸汽附着在屏蔽层 钛蒸镀装置3侧的部件4和未与等离子体P和真空容器1接触的真空容器1的内壁面的一部分通过附着的钛的吸附作用被抽真空至高真空度。 此时,由于附着在屏蔽部件4上的钛和容器1的内壁的一部分不与等离子体P接触,所以不产生相互作用,并且使等离子体P中的钛的混合最小化以使辐射损失最小化 的形成的血浆P.

    All case type batch operated vacuum heat treating furnace
    190.
    发明专利
    All case type batch operated vacuum heat treating furnace 失效
    所有案例类型批量操作真空热处理炉

    公开(公告)号:JPS59208017A

    公开(公告)日:1984-11-26

    申请号:JP8359883

    申请日:1983-05-13

    CPC classification number: C21D1/773 B01J3/006

    Abstract: PURPOSE:To increase the cooling rate after the heat treatment of a material to be heat-treated and to enable control of cooling rate with a simple device by forming a space in a furnace shell part and a gas circulating system communicating respectively with the upper and lower parts of the space for housing the material to be heat-treated. CONSTITUTION:An all case type batch operated vacuum heat treating furnace consists of a hermetically constructed furnace shell 2 and refractories 7 lined on the inside of the shell 2 by having a space 5 from the shell 2. The respective upper and lower parts of the shell space 5 provided between said shell 2 and the refractories 7 and the space for housing a material 10 to be heat treated enclosed with the refractories 7 are communicated by communicating holes 12 to constitute a gas circulating system by the difference in gas density arising from a temp. difference between the respective space parts.

    Abstract translation: 目的:为了提高待热处理材料的热处理后的冷却速度,通过在炉壳部分和气体循环系统中形成空间,通过简单的装置控制冷却速度, 用于容纳要热处理的材料的空间的下部。 构成:全箱式批量真空热处理炉由外壳2的空间5组成的密封构造的炉壳2和内衬在壳体2的内部的耐火材料7组成。壳体的相应的上部和下部 设置在所述壳体2和耐火材料7之间的空间5,并且用于容纳被耐火材料7包围的热处理材料10的空间通过连通孔12连通,以通过由温度产生的气体密度差构成气体循环系统 。 各空间部分之间的差异。

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