SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP

    公开(公告)号:WO2007061957A3

    公开(公告)日:2007-10-04

    申请号:PCT/US2006044907

    申请日:2006-11-20

    Abstract: Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a singie-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.

    AN IMPROVED SENSOR-LESS CONTROL METHOD FOR LINEAR COMPRESSORS
    183.
    发明申请
    AN IMPROVED SENSOR-LESS CONTROL METHOD FOR LINEAR COMPRESSORS 审中-公开
    线性压缩机改进的无传感器控制方法

    公开(公告)号:WO2007098242A2

    公开(公告)日:2007-08-30

    申请号:PCT/US2007004606

    申请日:2007-02-21

    Inventor: BOCCHIOLA CESARE

    CPC classification number: F04B35/045 F04B49/065 F04B2201/0201 F04B2203/0402

    Abstract: A method of protecting a cylinder of a compressor comprising a piston, a linear permanent magnet (PM) having a coil and a magnet, and a sensor-less control of the PM for moving the piston in and out of the cylinder. The method including the steps of receiving a reference position of the piston from a temperature control loop; deriving a compensation voltage and a load spring effect information from a current through the coil; providing a model input voltage to a model of a mechanical structure of the compressor for predicting position of the piston, the model input voltage comprising a first voltage derived from the reference position; a compressor input voltage comprising the first voltage and the compensation voltage; and using a position control loop to recognize when the maximum compression ratio is desired and controlling the piston to achieve maximum compression ratio without causing damage to the discharge valve.

    Abstract translation: 保护包括活塞的压缩机的气缸的方法,具有线圈和磁体的线性永磁体(PM)和用于将活塞移入和移出气缸的PM的无传感器控制。 该方法包括以下步骤:从温度控制回路接收活塞的参考位置; 从电流通过线圈导出补偿电压和负载弹簧效应信息; 将模型输入电压提供给用于预测活塞位置的压缩机的机械结构的模型,模型输入电压包括从参考位置导出的第一电压; 包括所述第一电压和所述补偿电压的压缩机输入电压; 并且使用位置控制回路来识别何时需要最大压缩比,并且控制活塞以实现最大压缩比而不会对排出阀造成损害。

    SYSTEM AND METHOD FOR POWER PUMP PERFORMANCE MONITORING AND ANALYSIS
    184.
    发明申请
    SYSTEM AND METHOD FOR POWER PUMP PERFORMANCE MONITORING AND ANALYSIS 审中-公开
    电力泵性能监测与分析系统与方法

    公开(公告)号:WO2006124746A3

    公开(公告)日:2007-06-14

    申请号:PCT/US2006018679

    申请日:2006-05-15

    Applicant: MILLER DAVIS J

    Inventor: MILLER DAVIS J

    Abstract: A power pump performance analysis system and methods includes a signal processor connected to certain sensors for sensing pressures and stresses in the cylinder chambers and the inlet and discharge piping of a single or multicylinder pump. Pump speed and pump piston position may be determined by a crankshaft position sensor. Performance analyses for pump work performed, pump cylinder chamber stress, pump fluid end useful cycles to failure, and crosshead loading and shock analysis are provided for estimating pump component life and determining times for component replacement before failure.

    Abstract translation: 动力泵性能分析系统和方法包括连接到某些传感器的信号处理器,用于感测气缸室中的压力和应力以及单缸或多缸泵的入口和排放管道。 泵速度和泵活塞位置可由曲轴位置传感器确定。 提供执行泵功能的性能分析,泵缸室应力,泵流体末端故障有用周期以及十字头负载和冲击分析,用于估计泵组件寿命并确定故障前部件更换的时间。

    DISPLACEMENT SENSOR
    185.
    发明申请
    DISPLACEMENT SENSOR 审中-公开
    位移传感器

    公开(公告)号:WO2007011402A2

    公开(公告)日:2007-01-25

    申请号:PCT/US2005038699

    申请日:2005-10-26

    CPC classification number: G01D5/165 F04B2201/0201 F15B15/2815 G01D5/241

    Abstract: Sensors and methods for measuring displacement are disclosed. In one embodiment, among others, a resistive element is configured to receive an alternating voltage between a first electrical terminal and a second electrical terminal, the first and second electrical terminals defining. a length of the resistive element. A signal pickup is capacitively coupled to the resistive element and is configured to be moved along the length of the resistive element at a substantially fixed distance from the resistive element and without contact between the resistive element and the signal pickup. A shielded cable, such as a coaxial cable, electrically connected to the signal pickup carries a signal having an amplitude proportional to the position of the signal pickup with respect to the first and second electrical terminals.

    Abstract translation: 公开了用于测量位移的传感器和方法。 在一个实施例中,其中,电阻元件被配置为在第一电端子和第二电端子之间接收交流电压,第一和第二电端子限定了交流电压。 电阻元件的长度。 信号拾取器电容耦合到电阻元件,并被配置为沿着电阻元件的长度在距电阻元件基本上固定的距离处移动,并且在电阻元件和信号拾取器之间没有接触。 电连接到信号拾取器的诸如同轴电缆的屏蔽电缆携带信号,该信号的振幅与信号拾取相对于第一和第二电端子的位置成比例。

    PIEZOELECTRIC DEVICES AND METHODS AND CIRCUITS FOR DRIVING SAME
    186.
    发明申请
    PIEZOELECTRIC DEVICES AND METHODS AND CIRCUITS FOR DRIVING SAME 审中-公开
    压电元件及其驱动方法及电路

    公开(公告)号:WO2005097508A2

    公开(公告)日:2005-10-20

    申请号:PCT/US2005/011342

    申请日:2005-04-04

    CPC classification number: F04B43/0081 F04B43/046 F04B2201/0201 F04B2205/03

    Abstract: A drive circuit (18) produces a drive signal having a waveform of a predetermined waveform shape for a device (10) having a piezoelectric actuator (14). The drive circuit (14) includes a memory (140) which stores waveform shape data which is utilized by the drive circuit in producing the drive signal. The drive circuit utilizes the waveform shape data so that, for each of plural points comprising a period of the waveform, the drive signal has an appropriate amplitude for the predetermined waveform shape. The waveform shape data has preferably been prepared to optimize one or more operational parameter(s) of the device. Preferably the waveform shape data has been prepared by solving a waveform equation, the waveform equation having coefficients determined to optimize at least one operational parameter of the device. The number of coefficients determined for the waveform equation depends on the number of harmonics of the waveform that are within a bandwidth of the device. Other aspects concerns devices which utilize the drive circuit, methods for operating devices, the memory (212) which is utilized by the drive circuit (e.g., the drive circuit which produces the drive signal for the device having the piezoelectric actuator) to store the waveform shape data, as well as apparatus and method for generating the optimized waveform shape data.

    Abstract translation: 驱动电路(18)产生对于具有压电致动器(14)的装置(10)具有预定波形形状的波形的驱动信号。 驱动电路(14)包括存储器(140),存储由驱动电路用于产生驱动信号的波形形状数据。 驱动电路使用波形形状数据,使得对于包括波形周期的多个点中的每个点,驱动信号对于预定波形形状具有适当的幅度。 优选地,波形形状数据被准备好优化装置的一个或多个操作参数。 优选地,通过求解波形方程式来准备波形形状数据,波形方程式具有被确定为优化装置的至少一个操作参数的系数。 为波形方程确定的系数数取决于设备带宽内波形的谐波数。 其他方面涉及利用驱动电路的装置,用于操作装置的方法,由驱动电路利用的存储器(212)(例如,产生具有压电致动器的装置的驱动信号的驱动电路)来存储波形 形状数据,以及用于生成优化的波形形状数据的装置和方法。

    ACTUATOR SYSTEM COMPRISING DETECTION MEANS
    187.
    发明申请
    ACTUATOR SYSTEM COMPRISING DETECTION MEANS 审中-公开
    包括检测手段的执行器系统

    公开(公告)号:WO2005094919A1

    公开(公告)日:2005-10-13

    申请号:PCT/DK2005/000184

    申请日:2005-03-18

    Abstract: The invention provides an actuator system comprising an actuator member having first and second positions. The system further comprises actuating means for moving the actuator member between the first and second positions and detection means for detecting the first respectively the second position and supplying time signals indicative thereof. A controller determines on the basis of supplied time signals the time lapsed when the actuator member is moved between the first and second positions in a given direction, the controller comprising information representing at least one defined time range, each time range being associated with movement of the actuator member in a given direction between the first and second positions and a given actuation force, the controller being adapted to compare the determined time lapsed with the defined time range(s) and perform an action corresponding to the time range associated with the determined time lapsed.

    Abstract translation: 本发明提供了一种致动器系统,其包括具有第一和第二位置的致动器构件。 该系统还包括用于在第一和第二位置之间移动致动器构件的致动装置和用于检测第一分别第二位置和提供指示其的时间信号的检测装置。 控制器基于提供的时间信号确定当致动器构件在给定方向上在第一和第二位置之间移动时所经过的时间,控制器包括表示至少一个限定的时间范围的信息,每个时间范围与 所述致动器构件在给定方向上在所述第一和第二位置之间以及给定的致动力之间,所述控制器适于将确定的经过的时间与所述限定的时间范围进行比较,并执行与所确定的时间范围相关联的时间范围 时间过去了

    A CONTROL SYSTEM FOR THE MOVEMENT OF A PISTON
    188.
    发明申请
    A CONTROL SYSTEM FOR THE MOVEMENT OF A PISTON 审中-公开
    用于活塞运动的控制系统

    公开(公告)号:WO2004046550A1

    公开(公告)日:2004-06-03

    申请号:PCT/BR2002/000158

    申请日:2002-11-19

    Abstract: A control system is provided for controlling the movement of the piston (10) of the fluid-pumping device (1), the piston (10) being displaceable in a block (5) of the fluid-pumping device (5) and being driven by a motor (2) fed by a voltage (V), comprising a semiconductor electronic system (T) cyclically applying the voltage (V) to the motor (2) to move the piston (10), a resistive element (Rb), a capacitive element (Cy), a piston-position sensor (S) to indicate the passage of the piston (10) by a point (R) at the block (5), the capacitive element (Cy) being charged by means of the resistive element (Rb), at each cycle of application of voltage (V) to the motor (2), the capacitive element (Cy) being discharged, at least partly, when the piston (10) passes by the point (R) .

    Abstract translation: 提供控制系统以控制流体泵送装置(1)的活塞(10)的运动,活塞(10)可在流体泵送装置(5)的块(5)中移位并被驱动 通过由电压(V)馈送的电动机(2),包括向电动机(2)周期性地施加电压(V)以移动活塞(10)的半导体电子系统(T),电阻元件(Rb), 电容元件(Cy),活塞位置传感器(S),用于指示活塞(10)通过块(5)处的点(R),电容元件(Cy)通过 电阻元件(Rb),在电动机(2)施加电压(V)的每个周期,至少部分地,当活塞(10)通过点(R)时,电容元件(Cy)被排出。

    SCHWINGKOLBENANTRIEB FÜR EINE VAKUUMPUMPE SOWIE BETRIEBSVERFAHREN FÜR DIESEN ANTRIEB
    189.
    发明申请
    SCHWINGKOLBENANTRIEB FÜR EINE VAKUUMPUMPE SOWIE BETRIEBSVERFAHREN FÜR DIESEN ANTRIEB 审中-公开
    摇摆活塞驱动器用于该驱动真空泵和工作程序

    公开(公告)号:WO2003031818A1

    公开(公告)日:2003-04-17

    申请号:PCT/EP2002/010921

    申请日:2002-09-28

    CPC classification number: F04B35/045 F04B2201/0201 F04B2203/0401

    Abstract: Die Erfindung betrifft einen Schwingkolbenantrieb für eine Vakuumpumpe (1) mit einem Kolben (2), der zwei Kolbenabschnitte (3, 4) und einen mittleren, mit einem Antriebsmagneten (11) ausgerüsteten Bereich aufweist, mit den Kolbenabschnitten (3, 4) zugeordneten Zylinderabschnitten (8, 9), mit einer zwischen den Zylinderabschnitten (8, 9) angeordneten, in Höhe eines Mitteljochs (19) befindlichen, ringförmigen Aussparung (12), die den Bewegungsraum des Antriebsmagneten (11) bildet, und mit einem elektromagnetischen, den Kolben (2) umgebenden Antrieb mit Jochbauteilen (17, 18, 19) und seitlich vom Mitteljoch befindlichen Spulen (15, 16); um Pumpleistungsbeeinträchtigungen zu reduzieren, wird vorgeschlagen, dass ein Spaltrohr (34) die Aussparung (12) peripher begrenzt oder dass die Bestromung der Spulen so gesteuert wird, dass jeweils nur eine Spule Strom führt.

    Abstract translation: 本发明涉及一种用于真空泵(1),活塞(2),其具有两个活塞段振荡活塞驱动器(3,4)并配备一个平台,具有驱动磁体(11)区域中,与所述活塞部分(3,4)与所述气缸部分相关联 位于(8,9)布置成与所述气缸部分之间(8,9),在一个Mitteljochs的量(19),环形凹槽(12),其形成用于所述驱动磁体(11)的运动的空间,并用一个电磁,活塞 (2)围绕所述驱动轭部构件(17,18,19),并从中央磁轭线圈位于横向(15,16); 减少泵的功率损失,所以建议的间隙管(34),凹部(12)周向地限定或使电流供给到线圈进行控制,使得只有一个线圈传导电流。

    APPARATUS AND METHOD FOR CONTROLLING RECIPROCATING COMPRESSOR
    190.
    发明申请
    APPARATUS AND METHOD FOR CONTROLLING RECIPROCATING COMPRESSOR 审中-公开
    控制压缩机的装置和方法

    公开(公告)号:WO2003001063A1

    公开(公告)日:2003-01-03

    申请号:PCT/KR2001/001057

    申请日:2001-06-21

    Inventor: JEUN, Young-Hwan

    Abstract: Disclosed is an apparatus and method for controlling a reciprocating compressor capable of inexpensively and exactly controlling a position of a piston in a cylinder, by which a top clearance is minimized according to the information of a phase difference between a square wave of a piston stroke and a square wave of a current supplied to the compressor. The apparatus comprises a driving section for driving the reciprocating compressor by varying an angle of ignition in response to a control signal; a current phase detecting section for outputting a square wave corresponding to the detected current supplied to the compressor; a stroke phase detecting section for outputting a square wave corresponding to a stroke of the compressor; and a control section for controlling the angle of ignition of the driving section according to the phase difference between the square wave produced from the current phase detecting section and the square wave produced from the stroke phase detecting section.

    Abstract translation: 公开了一种用于控制往复式压缩机的装置和方法,该往复式压缩机能够廉价且精确地控制气缸中的活塞的位置,根据活塞冲程的方波和方波的相位差的信息,使顶部间隙最小化 提供给压缩机的电流的方波。 该装置包括驱动部分,用于根据控制信号改变点火角来驱动往复式压缩机; 电流相位检测部分,用于输出与提供给压缩机的检测电流相对应的方波; 行程相位检测部,其输出与压缩机的行程对应的方波; 以及控制部分,用于根据从电流相位检测部分产生的方波和从行程相位检测部分产生的方波之间的相位差来控制驱动部分的点火角。

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