Abstract:
A reciprocating pump system is utilized. The system facilitates the prediction of failure modes due to degradation of pump components. A sensor system is used to monitor parameters indicative of abnormal events or wear occurring in specific components, such as pump valves. The indications of wear can be used to predict valve failure or other component failure within the reciprocating pump.
Abstract:
Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a singie-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
Abstract:
A method of protecting a cylinder of a compressor comprising a piston, a linear permanent magnet (PM) having a coil and a magnet, and a sensor-less control of the PM for moving the piston in and out of the cylinder. The method including the steps of receiving a reference position of the piston from a temperature control loop; deriving a compensation voltage and a load spring effect information from a current through the coil; providing a model input voltage to a model of a mechanical structure of the compressor for predicting position of the piston, the model input voltage comprising a first voltage derived from the reference position; a compressor input voltage comprising the first voltage and the compensation voltage; and using a position control loop to recognize when the maximum compression ratio is desired and controlling the piston to achieve maximum compression ratio without causing damage to the discharge valve.
Abstract:
A power pump performance analysis system and methods includes a signal processor connected to certain sensors for sensing pressures and stresses in the cylinder chambers and the inlet and discharge piping of a single or multicylinder pump. Pump speed and pump piston position may be determined by a crankshaft position sensor. Performance analyses for pump work performed, pump cylinder chamber stress, pump fluid end useful cycles to failure, and crosshead loading and shock analysis are provided for estimating pump component life and determining times for component replacement before failure.
Abstract:
Sensors and methods for measuring displacement are disclosed. In one embodiment, among others, a resistive element is configured to receive an alternating voltage between a first electrical terminal and a second electrical terminal, the first and second electrical terminals defining. a length of the resistive element. A signal pickup is capacitively coupled to the resistive element and is configured to be moved along the length of the resistive element at a substantially fixed distance from the resistive element and without contact between the resistive element and the signal pickup. A shielded cable, such as a coaxial cable, electrically connected to the signal pickup carries a signal having an amplitude proportional to the position of the signal pickup with respect to the first and second electrical terminals.
Abstract:
A drive circuit (18) produces a drive signal having a waveform of a predetermined waveform shape for a device (10) having a piezoelectric actuator (14). The drive circuit (14) includes a memory (140) which stores waveform shape data which is utilized by the drive circuit in producing the drive signal. The drive circuit utilizes the waveform shape data so that, for each of plural points comprising a period of the waveform, the drive signal has an appropriate amplitude for the predetermined waveform shape. The waveform shape data has preferably been prepared to optimize one or more operational parameter(s) of the device. Preferably the waveform shape data has been prepared by solving a waveform equation, the waveform equation having coefficients determined to optimize at least one operational parameter of the device. The number of coefficients determined for the waveform equation depends on the number of harmonics of the waveform that are within a bandwidth of the device. Other aspects concerns devices which utilize the drive circuit, methods for operating devices, the memory (212) which is utilized by the drive circuit (e.g., the drive circuit which produces the drive signal for the device having the piezoelectric actuator) to store the waveform shape data, as well as apparatus and method for generating the optimized waveform shape data.
Abstract:
The invention provides an actuator system comprising an actuator member having first and second positions. The system further comprises actuating means for moving the actuator member between the first and second positions and detection means for detecting the first respectively the second position and supplying time signals indicative thereof. A controller determines on the basis of supplied time signals the time lapsed when the actuator member is moved between the first and second positions in a given direction, the controller comprising information representing at least one defined time range, each time range being associated with movement of the actuator member in a given direction between the first and second positions and a given actuation force, the controller being adapted to compare the determined time lapsed with the defined time range(s) and perform an action corresponding to the time range associated with the determined time lapsed.
Abstract:
A control system is provided for controlling the movement of the piston (10) of the fluid-pumping device (1), the piston (10) being displaceable in a block (5) of the fluid-pumping device (5) and being driven by a motor (2) fed by a voltage (V), comprising a semiconductor electronic system (T) cyclically applying the voltage (V) to the motor (2) to move the piston (10), a resistive element (Rb), a capacitive element (Cy), a piston-position sensor (S) to indicate the passage of the piston (10) by a point (R) at the block (5), the capacitive element (Cy) being charged by means of the resistive element (Rb), at each cycle of application of voltage (V) to the motor (2), the capacitive element (Cy) being discharged, at least partly, when the piston (10) passes by the point (R) .
Abstract:
Die Erfindung betrifft einen Schwingkolbenantrieb für eine Vakuumpumpe (1) mit einem Kolben (2), der zwei Kolbenabschnitte (3, 4) und einen mittleren, mit einem Antriebsmagneten (11) ausgerüsteten Bereich aufweist, mit den Kolbenabschnitten (3, 4) zugeordneten Zylinderabschnitten (8, 9), mit einer zwischen den Zylinderabschnitten (8, 9) angeordneten, in Höhe eines Mitteljochs (19) befindlichen, ringförmigen Aussparung (12), die den Bewegungsraum des Antriebsmagneten (11) bildet, und mit einem elektromagnetischen, den Kolben (2) umgebenden Antrieb mit Jochbauteilen (17, 18, 19) und seitlich vom Mitteljoch befindlichen Spulen (15, 16); um Pumpleistungsbeeinträchtigungen zu reduzieren, wird vorgeschlagen, dass ein Spaltrohr (34) die Aussparung (12) peripher begrenzt oder dass die Bestromung der Spulen so gesteuert wird, dass jeweils nur eine Spule Strom führt.
Abstract:
Disclosed is an apparatus and method for controlling a reciprocating compressor capable of inexpensively and exactly controlling a position of a piston in a cylinder, by which a top clearance is minimized according to the information of a phase difference between a square wave of a piston stroke and a square wave of a current supplied to the compressor. The apparatus comprises a driving section for driving the reciprocating compressor by varying an angle of ignition in response to a control signal; a current phase detecting section for outputting a square wave corresponding to the detected current supplied to the compressor; a stroke phase detecting section for outputting a square wave corresponding to a stroke of the compressor; and a control section for controlling the angle of ignition of the driving section according to the phase difference between the square wave produced from the current phase detecting section and the square wave produced from the stroke phase detecting section.