公开(公告)号：JP2003057114A

公开(公告)日：2003-02-26

申请号：JP2001249112

申请日：2001-08-20

Applicant: Bunkoh-Keiki Co Ltd ,  National Institute Of Advanced Industrial & Technology ,  分光計器株式会社 ,  独立行政法人産業技術総合研究所

Inventor： HARA KOJIRO ,  SAYAMA KAZUHIRO ,  ARAKAWA HIRONORI ,  KUSANO SEIICHI ,  ASANO TSUNEO

IPC: G01J3/10 ,  G01N21/01 ,  G01N21/27 ,  H01L31/04 ,  H01M14/00

CPC classification number: Y02E10/542

Abstract: PROBLEM TO BE SOLVED: To provide a spectral sensitivity measuring device for pigment- sensitized solar battery capable of exact measurement of spectral sensitivity for monochromatic light. SOLUTION: The device comprises a monochromatic light irradiator 11 for condensing monochromatic light SB produced by a monochromatic light source 111 with a condensing mirror 112 and irradiating a pigment-sensitized solar battery cell (CUT) to be measured by way of an incidence optical system 113, an incidence slit 114 and an emission optical system 115, a bias irradiator 12 for irradiating with white bias light BB generated by a bias light source 121 overlapping the monochromatic light SB, and a spectral sensitivity measuring device 13 for measuring the output signal of the pigment-sensitized solar battery cell to be measured. The intensity of the monochromatic light SB produced by the monochromatic light source 111 is let 0.5 to 5 mW/c.

Abstract translation: 要解决的问题：提供一种能够精确测量单色光的光谱灵敏度的颜料敏化太阳能电池的光谱灵敏度测量装置。 解决方案：该装置包括用于将由单色光源111产生的单色光SB与聚光镜112聚光并通过入射光学系统113照射待测量的颜料敏化太阳能电池单元（CUT）的单色光照射器11 ，入射狭缝114和发射光学系统115，用于照射由与单色光SB重叠的偏置光源121产生的白色偏置光BB的偏置照射器12以及用于测量该单色光SB的输出信号的光谱灵敏度测量装置13 颜料敏化的太阳能电池单元进行测量。 由单色光源111产生的单色光SB的强度为0.5〜5mW / c。

公开(公告)号：JP2003042846A

公开(公告)日：2003-02-13

申请号：JP2001234118

申请日：2001-08-01

Applicant: Bunkoh-Keiki Co Ltd ,  National Institute Of Advanced Industrial & Technology ,  分光計器株式会社 ,  独立行政法人産業技術総合研究所

Inventor： FUTAMATA MASAYUKI ,  TAKENOUCHI TAKAHIKO ,  KATAKURA KEIICHI

IPC: G01J3/44 ,  G01J3/18 ,  G01J3/36 ,  G02B5/18

Abstract: PROBLEM TO BE SOLVED: To develop a high-resolution aberration correction spectroscope in which a polychromator aberration-corrected for a multichannel spectroscope is optically designed, in which light can be aberration-corrected simultaneously to the center and the peripheral edge of a multichannel detector, and which has a superior aberration characteristic in a wide wavelength range, by a method wherein the aberration correction spectroscope is installed at the rear of a front-end spectroscope, signal light is wavelength-dispersed, and the efficiency of a main spectroscope used to detect a signal is increased by a photodetector installed at the inside.
SOLUTION: In a Raman spectroscope, an incident slit, a collimator mirror, a diffraction grating, a camera mirror and a detector are arranged along the optical path of Raman scattered light. (1) The camera mirror is constituted of an aspherical mirror. (2) The distance between the diffraction grating and the camera mirror is controlled. (3) A plurality of diffraction gratings whose ruled line numbers are different are used.
COPYRIGHT: (C)2003,JPO

Abstract translation: 要解决的问题：为了开发一种高分辨率像差校正分光镜，其中光学设计对多通道光谱仪进行像差校正的多色差分光谱仪，其中光可以同时对多通道检测器的中心和周缘进行像差校正， 并且在宽波长范围内具有优异的像差特性，其中像差校正分光器安装在前端分光器的后部，信号光被波长分散，并且用于检测的主分光器的效率 通过安装在内部的光电检测器增加信号。 解决方案：在拉曼光谱仪中，沿拉曼散射光的光路布置入射狭缝，准直镜，衍射光栅，相机镜和检测器。 （1）摄像镜由非球面镜构成。 （2）控制衍射光栅与摄像镜之间的距离。 （3）使用多个格线数不同的衍射光栅。

公开(公告)号：JP2012156456A

公开(公告)日：2012-08-16

申请号：JP2011016533

申请日：2011-01-28

Applicant: Bunkoh-Keiki Co Ltd ,  分光計器株式会社

Inventor： SATO HIROSHI ,  AMANO TAKASHI

IPC: H01L21/3065 ,  G01B11/06

Abstract: PROBLEM TO BE SOLVED: To provide a method of grasping progress of processing in real time to detect a termination point of time of processing with accuracy, in substrate processing for forming a thin film on a substrate surface.SOLUTION: A substrate processing device 10 forming an insulating film 2 on a substrate 1 has: interference light generation means 12 irradiating the insulating film 2 with wavelength variable monochromatic light s and making respective catoptric light from the insulating film 2 and the substrate 1 interfere with each other; a reference wavelength setting part 28 setting a reference wavelength λof the monochromatic light s so that an interference light intensity I at a desired film thickness is the minimum; a modulator 26 modulating the monochromatic light s with respect to a wavelength, between two wavelengths (λand λ) provided on both sides of the reference wavelength; an interference light detector 18 detecting the interference light intensity I depending on the modulated monochromatic light s; and termination point of time detection means 20 detecting a point of time where a difference ΔI of the interference light intensities at the maximum wavelength (λ) and at the minimum wavelength (λ) becomes zero or a predetermined value as a termination point of substrate processing, based on the change in the interference light intensity I from a time immediately before the insulating film 2 reaches the desired film thickness to a time when the insulating film 2 reaches the desired film thickness.

Abstract translation: 要解决的问题：提供一种在基板表面上形成薄膜的基板处理中实时掌握处理进度以精确地检测处理的终止时间的方法。 解决方案：在基板1上形成绝缘膜2的基板处理装置10具有：用波长可变单色光照射绝缘膜2的干涉光产生装置12，并且使来自绝缘膜2和基板的各自的反射光 1干扰对方; 设定单色光s的参考波长λ 0 的参考波长设定部分28，使得所需薄膜厚度处的干涉光强度I最小; 调制器26，其调制相对于两个波长（λ 1 和λ 2 ）之间的波长的单色光 参考波长两侧; 干涉光检测器18根据调制的单色光检测干涉光强度I; 以及时间检测装置20的终止点，检测在最大波长（λ 2 ）和最小波长（λ<2）处的干涉光强度的差值ΔI的时间点， 基于从绝缘膜2到达期望膜之前的时刻的干涉光强度I的变化，SB POS =“POST”> 1 ）变为零或预定值作为基板处理的终止点 当绝缘膜2达到所需的膜厚度时的厚度。 版权所有（C）2012，JPO＆INPIT

公开(公告)号：JP2008249945A

公开(公告)日：2008-10-16

申请号：JP2007090610

申请日：2007-03-30

Applicant: Bunkoh-Keiki Co Ltd ,  分光計器株式会社

Inventor： KAMIYAMA KEITA

IPC: G02B21/00 ,  G01J3/18

Abstract: PROBLEM TO BE SOLVED: To provide a spectroscope to be connected to a microscope capable of excellently performing image monitoring of a sample and spectrometry.
SOLUTION: The spectroscope 10 to be connected to a microscope is equipped with; an incidence slit 20 which is provided at an image-formation position by light 14 from a microscope 16 and where the size of a slit 20a is changed between two-dimensional light receiving surface size and one-dimensional size; a front lens 22; a diffraction grating 26; a rear lens 28 having an F value showing that it is brighter than the front lens 22; a two-dimensional detector 30 including a two-dimensional light receiving surface 30a; and an optical path switching mechanism 32 switching an optical path for image monitoring and an optical path for spectrometry, wherein a two-dimensional image that is light passing through the incidence slit 20 of the two-dimensional light receiving surface size is guided to the two-dimensional detector 30 not through the diffraction grating 26 so as to perform imaging, and a one-dimensional image that is light passing through the incidence slit 20 of the one-dimensional size is guided to the two-dimensional detector 30 through the diffraction grating 26 so as to perform the spectrometry.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供一种与能够优异地进行样品和光谱测定的图像监视的显微镜相连的分光镜。

解决方案：连接到显微镜的分光镜10配备有; 入射狭缝20，其通过来自显微镜16的光14在成像位置处设置，狭缝20a的尺寸在二维受光面尺寸和一维尺寸之间变化; 前透镜22; 衍射光栅26; 具有F值的后透镜28表示比前透镜22更亮; 包括二维光接收表面30a的二维检测器30; 以及切换用于图像监视的光路和光谱测定用光路的光路切换机构32，其中通过二维光接收表面尺寸的入射狭缝20的光的二维图像被引导到二维 三维检测器30不通过衍射光栅26进行成像，并且将通过一维尺寸的入射狭缝20的光的一维图像通过衍射光栅被引导到二维检测器30 26进行光谱测定。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2005061831A

公开(公告)日：2005-03-10

申请号：JP2003206824

申请日：2003-08-08

Applicant: Bunkoh-Keiki Co Ltd ,  分光計器株式会社

Inventor： IKEDA TAKESHI

IPC: G01J3/02

Abstract: PROBLEM TO BE SOLVED: To provide a vacuum ultraviolet spectroscope that can be used easily in inert gas substitution.
SOLUTION: In the vacuum ultraviolet spectroscope 10, a spectral optical system 12 for taking out monochromatic light having a wavelength at a vacuum ultraviolet region and a condensation optical system 14 for condensing and introducing light from a light source 16 to the spectral optical system 12 are provided in an enclosure 18. The enclosure 18 comprises an incidence opening 20 for taking in light from the light source 16; a light exit port 22 for emitting the monochromatic light obtained from the spectral optical system 12; a supply port 24 and an outlet 26 of the inert gas; and channel walls (28-1 to 28-6) for forming the channel of the inert gas. The channel of the inert gas is formed on an optical path inside the enclosure 18 reaching the light exit port 22 from the light incidence opening 20 by the channel wall.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供可以容易地用于惰性气体替代的真空紫外分光镜。 解决方案：在真空紫外线分光镜10中，用于取出具有真空紫外区域波长的单色光的光谱系统12和用于将来自光源16的光聚焦并引入光谱光学的冷凝光学系统14 系统12设置在外壳18中。外壳18包括用于从光源16吸收光的入射开口20; 用于发射从光谱系统12获得的单色光的光出射端口22; 惰性气体的供应口24和出口26; 以及用于形成惰性气体通道的通道壁（28-1至28-6）。 惰性气体的通道形成在通过通道壁从光入射口20到达光出口22的外壳18内的光路上。 版权所有（C）2005，JPO＆NCIPI