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公开(公告)号：JPH025510A
公开(公告)日：1990-01-10
申请号：JP2652589
申请日：1989-02-03
Applicant: HOLTRONIC TECHNOLOGIES LTD
Inventor： NIKORASU JIYON FUIRITSUPUSU
IPC: G03F1/00 , G03F7/20 , G03H1/22 , H01L21/027 , H01L21/30
Abstract: PURPOSE: To enable accurate reproduction of an image, by forming a holographic image of an integrated circuit onto a first recording medium by interference between an input beam passing through an object and a reference beam totally reflected on a glass plate surface, and similarly forming the image onto a second recording medium on a silicon thin piece by reproducing the image. CONSTITUTION: A second reference beam is supplied by a laser light source or mercury lamp 32, then passes through a prism 22, and advances to a glass plate 16 and hence into a first recording medium. The prism has such a structure that a light is internally totally reflected on the boundary surface between the recording medium and the air. The light source 32 continuously moves for scanning a holographic image onto the first recording medium. As a result, an image of an integrated circuit is gradually formed on a second recording medium provided on a silicon plate 30 from the holographic image recorded on the first recording medium, by interference between incident and reflected beams from the reproducing light source 32 for reference. Thus, a uniform holographic image may be provided on the entire surface of the coated silicon.
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公开(公告)号：DE69319005T2
公开(公告)日：1998-10-29
申请号：DE69319005
申请日：1993-03-10
Applicant: HOLTRONIC TECHNOLOGIES LTD
Inventor： CLUBE FRANCIS STACE MURRAY
Abstract: In the manufacture of an array total internal reflection hologram for printing a pattern of high-quality microfeatures over a large area, a mask defining just a part of the pattern is used to record an array of sub-holograms, the holographic recording medium or the mask being moved with respect to each other subsequent to the recordal of each sub-hologram, thereby building up a hologram of the complete pattern to be printed.
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公开(公告)号：DE19620234A1
公开(公告)日：1997-11-27
申请号：DE19620234
申请日：1996-05-20
Applicant: HOLTRONIC TECHNOLOGIES LTD
Inventor： MAYER HERBERT
Abstract: The present invention relates to a method and apparatus for positioning a substrate, e.g. of a glass plate, on a support (11). For the formation of an air cushion the surface of the support is pressurized from below with a gas. The surface has grooves (27) and openings (15) which lie in the grooves (27). At the edge of the support (11) abutments (33), elastic means (39) and sensors (37) are provided. The latter are used for measuring the position of th substrate indirectly by determining the distance between the sensor head and the elastic means (39) which are formed by a leaf spring. The leaf spring (39) in its normal position projects the abutting means by a certain distance so that in the course of the alignment process the substrate pushes the leaf spring backwards.
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公开(公告)号：GB9605235D0
公开(公告)日：1996-05-15
申请号：GB9605235
申请日：1996-03-12
Applicant: HOLTRONIC TECHNOLOGIES LTD
Abstract: The present invention relates to a method and an apparatus for holographically recording periodic or quasi-periodic features of a mask (14) in a holographic recording layer (17). In holographic lithography the object beam (11) is directed to the first substrate (19) bearing a holographic recording layer (17) such that it passes the mask substrate (13) and interferes with a reference beam (15) in the recording layer (17) to form a hologram of the mask pattern (14). According to the new method the object beam (11) is directed to the second substrate (13) at an off-axis angle and the wavelength used and/or the angle of incidence of the object beam (11) are selected according to the period of the features to be recorded such that essentially just the zero and one of the first diffraction orders are present for forming the hologram.
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15.发明专利
公开(公告)号：GB2271648B
公开(公告)日：1996-04-03
申请号：GB9221561
申请日：1992-10-14
Applicant: HOLTRONIC TECHNOLOGIES LTD
Inventor： CLUBE FRANCIS STACE MURRAY
Abstract: A method for the manufacture of TIR holograms includes the division of an input laser beam into an object beam and a reference beam, the direction of the beams to a holographic recording layer so that the object beam is incident on a surface of the holographic recording layer following transmission through an object mask, so that the reference beam is incident on the other surface of the holographic recording layer at an angle such that following passage through the holographic recording layer it is totally internally reflected back into the holographic recording layer and so that the two beams are superposed at the holographic recording layer, and the displacement of the input laser beam causing the object and reference beams to traverse together the holographic recording layer. The method is especially useful for obtaining a high uniformity of exposure of the holographic recording layer.
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Patent Agency Ranking
公开(公告)号：GB2267356A
公开(公告)日：1993-12-01
申请号：GB9205560
申请日：1992-03-13
Applicant: HOLTRONIC TECHNOLOGIES LTD
Inventor： CLUBE FRANCIS STACE MURRAY
Abstract: In the manufacture of an array total internal reflection hologram for printing a pattern of high-quality microfeatures over a large area, a mask defining just a part of the pattern is used to record an array of sub-holograms, the holographic recording medium or the mask being moved with respect to each other subsequent to the recordal of each sub-hologram, thereby building up a hologram of the complete pattern to be printed.
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17.发明专利
公开(公告)号：GB9022154D0
公开(公告)日：1990-11-21
申请号：GB9022154
申请日：1990-10-11
Applicant: HOLTRONIC TECHNOLOGIES LTD
IPC: G03F1/08 , G03F9/00 , G03H1/00 , H01L21/027
Abstract: Apparatus for transverse position measurement in a proximity lithographic system including a prism (10) having a glass plate (14) index matched beneath the prism on which a T.I.R. hologram (13) is pre-recorded. A laser source (12) provides a replay beam. A silicon wafer (16) is situated below the hologram and parallel therewith. A second laser source (17) produces through optics (18) a beam with gaussian intensity profile to generate a collimated strip of light (19) at the hologram plane. Elemental grating structures (20) are provided at different locations over the surface of the wafer. Detectors (22,24) collect parts of the lightfield resulting from the interaction of the laser beam with the grating structures. A piezo device (26) operated from a micro-processor (28) moves the silicon wafer in small increments in a direction substantially parallel to the hologram following measurements made by the two detectors which are processed by the micro-processor to produce an alignment signal for the piezo device.
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公开(公告)号：GB8821644D0
公开(公告)日：1988-10-12
申请号：GB8821644
申请日：1988-09-13
Applicant: HOLTRONIC TECHNOLOGIES LTD
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公开(公告)号：GB8802839D0
公开(公告)日：1988-03-09
申请号：GB8802839
申请日：1988-02-08
Applicant: HOLTRONIC TECHNOLOGIES LTD
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公开(公告)号：GB8802333D0
公开(公告)日：1988-03-02
申请号：GB8802333
申请日：1988-02-03
Applicant: HOLTRONIC TECHNOLOGIES LTD
IPC: G03F1/00 , G03F7/20 , G03H1/22 , H01L21/027 , H01L21/30
Abstract: Apparatus for the manufacture of integrated circuits using holographic techniques in which a holographic image formed on a first recording medium provided on a glass slab is replayed by being scanned in order to reproduce an image of the holographic image on a second recording medium provided on a silicon slice. The replay source provides a a collimated narrow circular beam or elongated beam which passes normally through a face of the prism, through an index matching liquid located between the prism and the glass slab before being totally internally reflected at the other surface of the glass slab. The collimated replay beam provides control over the effective numerical aperture thus preventing wide angle radiation from degrading the quality of the printed image.
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