METHOD AND APPARATUS FOR FORMING FILM USING ULTRAFINE PARTICLE BEAM

    公开(公告)号:JPS61281866A

    公开(公告)日:1986-12-12

    申请号:JP12271785

    申请日:1985-06-07

    Abstract: PURPOSE:To make the control of film quality such as crystal structure and electric resistance of a film with a simple operation possible by heating the ultrafine particle beam obtd. by blowing out the ultrafine particles of an evaporated film forming material into a vacuum vessel and sticking the same to a substrate. CONSTITUTION:The film forming material 14 is heated and evaporated in a gas. The formed ultrafine particles A are blown out into the vacuum vessel by a pressure difference through a nozzle 15. The ultrafine particle beam B flying in the vacuum vessel is radiation-heated in a heating part 16. The heated beam B is stuck to the substrate 17 for film formation, by which the film is formed.

    METHOD FOR ULTRA-THIN FILM COATING OF SUPERFINE POWDER OR FINE FIBROUS MATERIAL

    公开(公告)号:JPH02236278A

    公开(公告)日:1990-09-19

    申请号:JP8928389

    申请日:1989-04-07

    Inventor: IIJIMA SUMIO

    Abstract: PURPOSE:To uniformly form the ultra-thin film of the resulted produce by reactive gases on the surface of superfine powder or fine fibrous material by heating the powder or the material in an atmosphere contg. the reactive gases. CONSTITUTION:An object 1 which is to be treated and consists of the superfine powder or fine fibrous material of metals, alloys, semimetals, intermetallic compds., inorg. compds., or heat resistant org. polymers, etc., is put into a heat resistant crucible 2 made of alumina, etc., and the crucible is put into a heat resistant vessel 4 having a heater 3. The vessel 4 is further put into an external vessel 5 and the inside thereof is evacuated to a high vacuum by a discharge system 6; thereafter, hydrocarbon, CO, H2S, O2, NH3. and other gases are supplied as the reactive gases together with an inert gas, such as Ar, from a gas supply system 8 are supplied therein. The superfine powdery or fine fibrous material 1 to be treated in the crucible 3 is simultaneously heated to, for example, 400 to 1000 deg.C by the heater 3 and the ultra-thin film of the reaction product by the cracking of the reactive gases is formed on the surface thereof.

    PRODUCTION OF HYPERFINE PARTICLE HAVING FILM

    公开(公告)号:JPS6320032A

    公开(公告)日:1988-01-27

    申请号:JP16542186

    申请日:1986-07-14

    Inventor: IIJIMA SUMIO

    Abstract: PURPOSE:To produce hyperfine particles having reformed surface coatings by evaporating an evaporating material such as metal or metalloid in the presence of a reactive gas such as a gaseous mixture composed of a gaseous hydrocarbon or carbon monoxide and inert gas. CONSTITUTION:A raw material 2 is placed on a supporting base 1 of the evaporating raw material and the inside of a hermetic vessel 3 is evacuated by an evacuation system 4. A reactive gas and inert gas is introduced into the vessel by a gas supply system 5. The raw material 2 serves also as an electrode for an arc discharge and makes a pair with an electrode 6 consisting of a bar- shaped carbon. The arc discharge 7 is generated by such electrode. The raw material supporting base 1 and the electrode supporting base 8 are cooled by water cooling means 9, 10. The evaporating raw material forms the hyperfine particles in the gas and forms the films. The hyperfine particles are sucked together with the gas by a suction pump 11 and are captured by a capturing device 12. The gas is returned to the inside of the hermetic vessel by a circulating means 13.

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