公开(公告)号：WO2018129435A1

公开(公告)日：2018-07-12

申请号：PCT/US2018/012755

申请日：2018-01-08

Applicant: MKS TECHNOLOGY, INC.

Inventor： CARRON, Keith, T. ,  ZEMTSOP, Celestin, P. ,  BULLER, Shane, A. ,  RUDDER, Scott, L. ,  GUENTHER, Harald, R.

IPC: G01J3/44 ,  H01S3/08 ,  H01S3/042

Abstract: A method of measuring Raman scattering includes exciting Raman scattering of a sample with a first wavelength and a second wavelength of electromagnetic radiation traveling along a common optical path to form a first scattered radiation and a second scattered radiation. The first wavelength reaches the sample polarized in a first direction, and the second wavelength reaches the sample polarized in a second direction perpendicular to the first direction. The method includes collecting a first Raman spectrum from the first scattered radiation, collecting a second Raman spectrum from the second scattered radiation, and forming a decomposed Raman spectrum based on the first Raman spectrum and the second Raman spectrum. The decomposed Raman spectrum may be substantially free of noise, such as fluorescence and background radiation. Related spectrometers and laser devices are disclosed.

公开(公告)号：WO2018148747A1

公开(公告)日：2018-08-16

申请号：PCT/US2018/018049

申请日：2018-02-13

Applicant: MKS TECHNOLOGY, INC. (D/B/A SNOWY RANGE INSTRUMENTS)

Inventor： BARKHURST, Danial, Clark ,  WOODWARD, Sean, Patrick ,  CARRON, Keith, Thompson ,  BULLER, Shane, Alan

IPC: G02B7/182 ,  G01J3/02 ,  G01N21/17 ,  G01J3/06

Abstract: Optical systems have uses, such as in spectrometers, for directing a beam. A spectrometer, for example, utilizes an optical system for directing an incident beam toward a sample and receiving a spectroscopy signal from the sample. In various implementations, for example, an optical system may be further configured to move a beam with respect to a target, such as a sample, and still provide a home position where the beam is directed in a stationary configuration. A self-homing (e.g., self-centering) optical system may provide a "home" position in which the beam is directed in a first stationary mode while still allowing a focused beam to be moved with respect to a target in a second dynamic mode.

公开(公告)号：WO2014191834A3

公开(公告)日：2015-12-17

申请号：PCT/IB2014001434

申请日：2014-07-31

Applicant: MKS TECHNOLOGY INC

Inventor： WATSON MARK ,  BULLER SHANE ,  CARRON KEITH

IPC: G01J3/00

CPC classification number: G01N21/65 ,  G01J3/021 ,  G01J3/0289 ,  G01J2003/4424 ,  G01N21/658 ,  G01N2021/6417 ,  G01N2201/0221 ,  G02B21/002 ,  G02B26/10

Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.

Abstract translation: 提供光谱仪。 在一个实施方案中，例如，光谱仪包括激发源，聚焦透镜，可移动反射镜和致动器组件。 聚焦透镜适于聚焦来自激发源的入射光束。 致动器组件适于控制可移动镜以将聚焦的入射光束移动穿过样品的表面。

公开(公告)号：EP3004819A2

公开(公告)日：2016-04-13

申请号：EP14804678.2

申请日：2014-07-31

Applicant: MKS Technology Inc.

Inventor： WATSON, Mark ,  BULLER, Shane ,  CARRON, Keith

IPC: G01J3/00

CPC classification number: G01N21/65 ,  G01J3/021 ,  G01J3/0289 ,  G01J2003/4424 ,  G01N21/658 ,  G01N2021/6417 ,  G01N2201/0221 ,  G02B21/002 ,  G02B26/101

Abstract: A spectrometer is provided. In one implementation, for example, a spectrometer comprises an excitation source, a focusing lens, a movable mirror, and an actuator assembly. The focusing lens is adapted to focus an incident beam from the excitation source. The actuator assembly is adapted to control the movable mirror to move a focused incident beam across a surface of the sample.

Abstract translation: 提供光谱仪。 在一个实施方案中，例如，光谱仪包括激发源，聚焦透镜，可移动反射镜和致动器组件。 聚焦透镜适于聚焦来自激发源的入射光束。 致动器组件适于控制可移动镜以将聚焦的入射光束移动穿过样品的表面。