公开(公告)号：KR100408507B1

公开(公告)日：2004-01-24

申请号：KR1019960051460

申请日：1996-10-31

Applicant: 삼성전자주식회사

Inventor： 조한기

IPC: G01C19/56

Abstract: PURPOSE: An electrostatic force tuning fork micro gyroscope is provided to prevent a voltage signal of an exciting plate for driving force of a proof mass from acting as noise of an acceleration sensing signal. CONSTITUTION: An electrostatic force tuning fork micro gyroscope is composed of a plurality of proof mass plates(11a,11b) separated from each other at predetermined intervals; sensing electrodes(12a,12b) arranged right under the proof mass plates to form a capacitor varying the charging amount to the distance separated from the proof mass plate; plate members(11a',11b',11a",11b") extended in the opposite directions at both sides of the proof mass plate and formed with comb teeth-shape structures at the sides; exciting plates(15a,15b,15c) for including the comb teeth-shape structure engaged with the comb teeth-shape of the plate member and supplying attraction for exciting the proof mass plates; supporting beams(13) for supporting the plate members, respectively; and an anchor(14) for propping up the supporting beams, respectively.

公开(公告)号：KR100338809B1

公开(公告)日：2002-05-31

申请号：KR1019990044895

申请日：1999-10-16

Applicant: 삼성전자주식회사

Inventor： 조한기 ,  이석한

IPC: G03H1/18

Abstract: 홀로그래픽정보저장장치에관해개시된다. 개시된홀로그래픽정보저장장치는: 광원으로부터의레이저를기준광과오브젝트광으로분할하는빔스프리터와; 상기빔스프리터로부터의오브젝트빔을편향시키는다수의픽셀에의한마이크로미러어레이와; 상기기준빔을반사하는로테이팅미러와; 상기마이크로미러어레이와상기로테이팅미러로부터의광이입사하는미디어와; 상기미디어로부터의광을수광하는 CCD를구비한다. 따라서, 종래의공간광변조기및 반사미러가하나의마이크로미러어레이로대체됨으로써, 부품수가줄어들게된다. 또한, 본발명을특징지우는마이크로미러어레이는일반적인마이크로프로세스공정에의해제작될수 있으므로대량생산이가능하다. 또한마이크로미러어레이에의해종래에비해높은저장용량의메모리장치의제작이가능하게된다.

公开(公告)号：KR1020000009751A

公开(公告)日：2000-02-15

申请号：KR1019980030376

申请日：1998-07-28

Applicant: 삼성전자주식회사

Inventor： 최상언 ,  조한기

IPC: G01R33/00

CPC classification number: G01R33/04

Abstract: PURPOSE: A differential spiral type magnetic field detecting element and a magnetic field detecting module using it are provided to detect any little magnetic field and remove the magnetic flux change within a thin film core. CONSTITUTION: The present invention discloses a differential spiral type magnetic field detecting element comprising: a semiconductor substrate(21); a soft magnetic thin film core(24) formed on said semiconductor substrate in a closed-magnetic circuit; an exciting coil(30) formed of a metal thin film for exciting said soft magnetic thin film core in alternately; a magnetic flux change detecting coil(28) formed of a metal thin film for detecting the magnetic flux change within said soft magnetic thin film core; and a coil(26) for detecting zero magnetic field formed for generating reverse magnetic field to remove said magnetic flux change within said soft magnetic thin film core.

Abstract translation: 目的：提供差分螺旋型磁场检测元件和使用它的磁场检测模块来检测任何小的磁场，并去除薄膜芯内的磁通量变化。 构成：本发明公开了一种差分螺旋型磁场检测元件，包括：半导体衬底（21）; 在闭环磁路中形成在所述半导体衬底上的软磁薄膜芯（24）; 由用于激发所述软磁性薄膜芯的金属薄膜形成的励磁线圈（30）; 由用于检测所述软磁性薄膜芯内的磁通变化的金属薄膜形成的磁通量变化检测线圈（28）; 以及用于检测形成的用于产生反向磁场以消除所述软磁薄膜芯内的所述磁通量变化的零磁场的线圈（26）。