公开(公告)号：KR1020110132660A

公开(公告)日：2011-12-09

申请号：KR1020100052109

申请日：2010-06-03

Applicant: 삼성전자주식회사 ,  서울대학교산학협력단

Inventor： 최재혁 ,  김원정 ,  김호영 ,  고형호 ,  오종근 ,  전찬욱 ,  박근환

IPC: H01L21/304

CPC classification number: B08B3/12 ,  G03F1/82 ,  H01L21/02057 ,  H01L21/67057

Abstract: PURPOSE: A megasonic cleaning method and device are provided to improve a surface washing effect by creating micro-cavities with high power which is offered from a bubbling creating part and to prevent the generation of faults in a pattern which is formed in a substrate. CONSTITUTION: A cleaning object is loaded(S10). A micro cavity for washing the cleaning object is created(S12). Micro cavities which have stable vibration by the cleaning object are only transferred to a loaded space(S14). Micro cavities which have unstable vibration are destroyed or eliminated when the cleaning object is transferred to the loaded space. Second power for maintaining the vibration of the micro cavity is provided(S16). The surface of the cleaning object is washed using micro cavities of the stable vibration(S18).

Abstract translation: 目的：提供一种兆声波清洗方法和装置，通过产生从发泡产生部分提供的高功率的微腔，并防止在衬底中形成的图案中产生缺陷，从而提高表面洗涤效果。 构成：加载清洁对象（S10）。 产生用于清洗清洁物体的微腔（S12）。 通过清洁对象具有稳定振动的微腔仅被传送到加载空间（S14）。 当清洁对象被传送到装载的空间时，具有不稳定振动的微腔被破坏或消除。 提供了维持微腔振动的第二功率（S16）。 使用稳定振动的微腔清洗清洁对象的表面（S18）。