公开(公告)号：KR100956165B1

公开(公告)日：2010-05-19

申请号：KR1020080119103

申请日：2008-11-27

Applicant: 한국과학기술원

Inventor： 김성진 ,  김태영 ,  김동권

IPC: G01Q60/24 ,  G01B13/00 ,  G02B21/00

CPC classification number: G01Q60/38 ,  G01Q30/04 ,  G01Q30/14

Abstract: PURPOSE: An atomic microscope using a surface analysis measurement method based on the flow resistance of the fluid is provided to simply obtain a geography of a sample indicating the brightness of a computer screen. CONSTITUTION: A driver(140) is applied to the signal of a pressure sensor. The driver moves a stage with a sample to XYZ directions in order to perform scanning work. An output unit(150) obtains the shape of the surface of sample, the roughness of the part, a cross-sectional view, and a three dimensional diagram. The operation value of the driver is marked on the surface of sample on the screen of the computer as the brightness.

Abstract translation: 目的：提供使用基于流体的流动阻力的表面分析测量方法的原子显微镜，以简单地获得指示计算机屏幕的亮度的样本的地理位置。 构成：将驱动器（140）应用于压力传感器的信号。 驱动程序将样品移动到XYZ方向，以执行扫描工作。 输出单元（150）获得样品表面的形状，部件的粗糙度，横截面图和三维图。 驱动程序的操作值在计算机屏幕上的样品表面上作为亮度标记。