公开(公告)号：KR100254796B1

公开(公告)日：2000-05-01

申请号：KR1019980005056

申请日：1998-02-18

Applicant: 한국과학기술원

Inventor： 김호기 ,  박용준

IPC: H01M4/50

Abstract: PURPOSE: A lithium manganese oxide thin film cell is provided for an easier control over properties of the thin film including composition ratio, surface characteristics, and density, thereby improving a product quality and utilizing additives. CONSTITUTION: The method for manufacturing a lithium manganese oxide thin film for a thin film secondary battery comprises preparing a source by dissolving manganese acetylacetonate and lithium acetylacetonate in a solvent, the solvent being the mixture of 1-butanol and acetic acid, and drying the solution for addition as a thin film at 230-500 deg.C for 1 minute to 1 hour using a spin coater. The thin film is then thermally treated in a Rapid Thermal Annealing(RTA) system using a halogen lamp at 650-800 deg.C for 1 minute to 1 hour.

Abstract translation: 目的：提供一种锂锰氧化物薄膜电池，用于更容易地控制薄膜的性能，包括组成比，表面特性和密度，从而提高产品质量并利用添加剂。 构成：用于制造薄膜二次电池用锂锰氧化物薄膜的方法包括通过将乙酰丙酮化锰和乙酰丙酮锂溶解在溶剂中制备源，所述溶剂是1-丁醇和乙酸的混合物，并干燥溶液 在旋转涂布机中在230-500摄氏度下加入薄膜1分钟至1小时。 然后在快速热退火（RTA）系统中使用卤素灯在650-800摄氏度下将薄膜热处理1分钟至1小时。