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公开(公告)号:KR1019960012579B1
公开(公告)日:1996-09-23
申请号:KR1019880006395
申请日:1988-05-31
Applicant: 현대반도체 주식회사 , 한국전자통신연구원
Inventor: 김영한
IPC: H01L29/70
Abstract: The method of manufacturing transistor comprises the steps of : taper etching of an oxide silicon layer(3) formed on a base region(2); and diffusing an emitter impurity injected by ion-injection of emitter impurity to the base region(2). The transistor increases the effective area of the emitter for high integrity.
Abstract translation: 制造晶体管的方法包括以下步骤:对形成在基极区域(2)上的氧化硅层(3)进行锥形刻蚀; 以及通过离子注入发射极杂质注入的发射极杂质扩散到基极区域(2)。 该晶体管增加了发射器的高完整性的有效面积。