Abstract:
PROBLEM TO BE SOLVED: To provide a coating liquid for forming an insulating film in which shrinkage in a baking step in steam is small and crack of a silica film and detachment thereof from a semiconductor substrate is hard to occur, an insulating film using the same, and a method for producing a compound used for the same. SOLUTION: The coating liquid for forming an insulating film includes: inorganic polysilazane having a ratio of a peak area of 4.5-5.3 ppm derived from an SiH 1 group and an SiH 2 group to a peak area of 4.3-4.5 ppm derived from an SiH 3 group of 4.2-50 in 1 H-NMR spectrum; and an organic solvent. The insulating film is obtained by using the coating liquid for forming an insulating film. The inorganic polysilazane is obtained by reacting a dihalosilane compound, a trihalosilane compound, or a mixture thereof with a base to form adducts, and subsequently by reacting ammonia with a solution or a dispersion of the adducts at -50 to -1°C. COPYRIGHT: (C)2011,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a positive photosensitive composition which is excellent in transparency and provides a permanent resist having such high heat resistance and chemical resistance after high-heat history that it is also used as an insulating film above an active matrix substrate, a permanent resist using the positive photosensitive composition and a method for producing the same. SOLUTION: The positive photosensitive composition includes (A) a silicone resin having at least two groups per molecule represented by general formula (1) (wherein, R 1 denotes a 1-10C alkylene group which may have a substituted hydrocarbon group, R 2 denotes a 1-4C alkyl group, a denotes an integer of 0 or 1-4, b denotes an integer of 1-3, and a+b does not exceed 5), (B) a siloxane compound having a glycidyl group, (C) diazonaphthoquinones and (D) an organic solvent. The permanent resist is produced by applying the positive photosensitive composition on a substrate and subjecting the resulting coating to exposure, alkali development and post-bake at 120-350°C. COPYRIGHT: (C)2010,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a low dielectric thermosetting resin which can be formed at a low temperature, is excellent in heat resistance, and can lighten plasma displays. SOLUTION: Provided is a thermosetting resin prepared by hydrolyzing a compound (1) (wherein, R 1 to R 3 are each identically or differently a straight chain or branched chain 1 to 4C alkyl group; R 4 is H or a straight chain or branched chain 1 to 4C alkyl group) and a compound (2) (wherein, R 5 to R 8 are each identically or differently a straight chain or branched chain 1 to 4C alkyl group) in a (1):(2) molar ratio of 70:30 to 90:10, and having a mol.wt. of ≥10,000. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a resin removing agent which is capable of favorably removing a curable cyclic silicone compound not only before it is baked but also after it is baked. SOLUTION: The resin removing agent is a solution which comprises a block polyether-modified silicone compound comprising a quaternary ammonium compound expressed by the general formula (R 1 ) 3 -N + -R 2 -X - , a quaternary ammonium compound expressed by the general formula (R 3 ) 4 -N + -X - , a silicone moiety and a polyether moiety, and a solvent. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a silicon-containing curable composition which has little out-gas component and is excellent in transparency and whose cured product has high heat resistance, is excellent in base resistance and crack resistance and is useful for electric/electronic materials. SOLUTION: The silicon-containing curable composition comprises a prepolymer (A) having two or more Si-H groups in one molecule obtained by hydrosilylation between one or more selected from a component (α) and one or more selected from a component (β) as described below, as a component (A); a cyclic siloxane compound (B) having in one molecule two or more carbon-carbon double bonds having reactivity with an Si-H group, as a component (B); and a hydrosilylation catalyst (C), as a component (C). The component (α) is a cyclic siloxane compound having two or more Si-H groups in one molecule represent by formula (1). The component (β) is a compound having two or more carbon-carbon double bonds having reactivity with an Si-H group. COPYRIGHT: (C)2006,JPO&NCIPI