CONFOCAL IMAGING APPARATUS WITH CURVED FOCAL SURFACE OR TARGET REFERENCE ELEMENT AND FIELD COMPENSATOR
    16.
    发明申请
    CONFOCAL IMAGING APPARATUS WITH CURVED FOCAL SURFACE OR TARGET REFERENCE ELEMENT AND FIELD COMPENSATOR 审中-公开
    具有弯曲焦点表面或目标参考元件和现场补偿器的共焦成像装置

    公开(公告)号:WO2016024158A3

    公开(公告)日:2016-04-14

    申请号:PCT/IB2015001400

    申请日:2015-08-17

    Abstract: A confocal imaging apparatus includes an illumination module to generate an array of light beams. Focusing optics perform confocal focusing of an array of light beams onto a non-flat focal surface and direct the array of light beams toward a three dimensional object to be imaged. A translation mechanism adjusts a location of at least one lens to displace the non-flat focal surface along an imaging axis. A detector measures intensities of an array of returning light beams that are reflected off of the three dimensional object and directed back through the focusing optics. Intensities of the array of returning light beams are measured for locations of the at least one lens for determination of positions on the imaging axis of points of the three dimensional object. Detected positions of one or more points are adjusted to compensate for the non-flat focal surface.

    Abstract translation: 共焦成像装置包括用于产生光束阵列的照明模块。 聚焦光学器件将光束阵列的共聚焦聚焦执行到非平坦焦点表面上,并将光束阵列引向待成像的三维物体。 平移机构调节至少一个透镜的位置以沿着成像轴移动非平坦焦点表面。 检测器测量从三维物体反射并返回通过聚焦光学器件的返回光束阵列的强度。 测量返回光束阵列的强度,用于确定三维物体的点的成像轴上的位置的至少一个透镜的位置。 调整一个或多个点的检测位置以补偿非平坦的焦面。

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