公开(公告)号：US20190148189A1

公开(公告)日：2019-05-16

申请号：US16300595

申请日：2017-04-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Yang-Shan HUANG ,  Alexey Olegovich POLYAKOV ,  Coen Adrianus VERSCHUREN ,  Pieter Willem Herman DE JAGER

IPC: H01L21/67 ,  H01L21/683

Abstract: A pick-and-place tool including a plurality of movable holder structures, and a plurality of pick-and-place structures, each holder structure accommodating two or more of the pick-and-place structures, wherein at least one of the two or more pick-and-place structures of a respective holder structure is able to move along a respective holder structure independently from another at least one of the two or more pick-and-place structures of the respective holder structure, and wherein each pick-and-place structure includes a pick-up element configured to pick up a donor component at a donor structure and place the donor component an acceptor structure.

公开(公告)号：US20180004085A1

公开(公告)日：2018-01-04

申请号：US15538191

申请日：2015-12-01

Applicant: ASML Netherlands B.V.

Inventor： Sander Frederik WUISTER ,  Oktay YILDIRIM ,  Gijsbert RISPENS ,  Alexey Olegovich POLYAKOV

IPC: G03F7/004 ,  G03F7/16 ,  G03F7/00 ,  G03F7/30 ,  G03F7/20

CPC classification number: G03F7/0045 ,  G03F7/0002 ,  G03F7/0043 ,  G03F7/0047 ,  G03F7/039 ,  G03F7/16 ,  G03F7/20 ,  G03F7/2004 ,  G03F7/2041 ,  G03F7/30

Abstract: A resist composition is disclosed which comprises a perovskite material with a structure having a chemical formula selected from ABX3, A2BX4, or ABX4, wherein A is a compound containing an NH3 group, B is a metal and X is a halide constituent. The perovskite material may comprise one or more of the following components: halogen-mixed perovskite material; metal-mixed perovskite material, and organic ligand mixed perovsikte material.