公开(公告)号：EP4394851A1

公开(公告)日：2024-07-03

申请号：EP22217347.8

申请日：2022-12-30

Applicant: ASML Netherlands B.V.

Inventor： PARAYIL VENUGOPALAN, Syam ,  WARNAAR, Patrick ,  DE JAGER, Pieter, Willem, Herman ,  JANSEN, Bas ,  JANSSENS, Stef, Marten, Johan

IPC: H01L21/67 ,  H01L21/677

CPC classification number: H01L21/67144 ,  H01L21/67259 ,  H01L21/67721

Abstract: An apparatus for die placement comprising a first stage comprising a plurality of recesses, the plurality of recesses configured to accept a plurality of donor dies; a second stage comprising a support for one or more targets; and a measurement system, functionally coupled to the first stage, and configured to: obtain locations of the plurality of donor dies in the plurality of recesses of the first stage, and based at least on the obtained locations, provide output signals to adjust the locations of the plurality of donor dies supported by the first stage to correspond to locations of the one or more targets, and based at least in part on the adjusted locations, provide output signals to place the plurality of donor dies on the one or more targets supported by the second stage by relative movement between the first stage and the second stage.