公开(公告)号：EP4001903A1

公开(公告)日：2022-05-25

申请号：EP20208709.4

申请日：2020-11-19

Applicant: ASML Netherlands B.V.

Inventor： SCOTUZZI, Marijke ,  VEENSTRA, Roy, Ramon ,  KIERS, Antoine, Gaston, Marie

IPC: G01N21/956 ,  H01J37/244 ,  H01J37/28

Abstract: Disclosed herein is an inspection tool and a method for identifying defects in a sample. The method includes steps of scanning a first area of a sample with a first detector-beam and scanning a second area of the sample with a second detector-beam, then receiving first and second signals that are derived from the first and second detector-beams. The first and second signals are compared to determine whether a defect is present in the sample.