公开(公告)号：US12030772B2

公开(公告)日：2024-07-09

申请号：US16841044

申请日：2020-04-06

Applicant: ASML Netherlands B.V.

Inventor： Yongxin Wang ,  Rui-Ling Lai ,  Qian Zhang

IPC: B81B7/00 ,  B81B3/00

CPC classification number: B81B3/004 ,  B81B3/0083 ,  B81B7/008 ,  B81B2201/047

Abstract: The present disclosure describes an image forming element having a semiconductor chip with micro-electro-mechanical-system (MEMS) devices and voltage generators, each voltage generator being configured to generate a voltage used by one or more of the MEMS devices. A floating ground may be used to add a voltage to the voltage generated by the voltage generators. The semiconductor chip may include electrical connections, where each voltage generator is configured to provide the voltage to the one or more MEMS devices through the electrical connections. The MEMS devices may define a boundary in the semiconductor chip within which the MEMS devices, the voltage generators, and the electrical connections are located. Each MEMS device may generate an electrostatic field to manipulate an electron beamlet of a multi-beam charged particle microscope. The MEMS devices may be organized into groups based on a distance to a reference location (e.g., optical axis) in the semiconductor chip.

公开(公告)号：US11862427B2

公开(公告)日：2024-01-02

申请号：US17944121

申请日：2022-09-13

Applicant: ASML Netherlands B.V.

Inventor： Yongxin Wang ,  Zhonghua Dong ,  Rui-Ling Lai

IPC: H01J37/244 ,  H01L27/146

CPC classification number: H01J37/244 ,  H01L27/14609

Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.

公开(公告)号：US11430629B2

公开(公告)日：2022-08-30

申请号：US16648288

申请日：2018-09-14

Applicant: ASML Netherlands B.V.

Inventor： Yongxin Wang ,  Zhonghua Dong ,  Rui-Ling Lai

IPC: H01J37/244 ,  H01L27/146

Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.

公开(公告)号：US11222766B2

公开(公告)日：2022-01-11

申请号：US16652398

申请日：2018-09-28

Applicant: ASML Netherlands B.V.

Inventor： Joe Wang ,  Yongxin Wang ,  Zhong-Wei Chen ,  Xuerang Hu

IPC: H01J37/244 ,  H01J37/28

Abstract: A multi-cell detector may include a first layer having a region of a first conductivity type and a second layer including a plurality of regions of a second conductivity type. The second layer may also include one or more regions of the first conductivity type. The plurality of regions of the second conductivity type may be partitioned from one another by the one or more regions of the first conductivity type of the second layer. The plurality of regions of the second conductivity type may be spaced apart from one or more regions of the first conductivity type in the second layer. The detector may further include an intrinsic layer between the first and second layers.