公开(公告)号：US20210317582A1

公开(公告)日：2021-10-14

申请号：US17329459

申请日：2021-05-25

Applicant: BASF SE

Inventor： Cornelia Röger-Göpfert ,  Roman Benedikt Raether ,  Charlotte Emnet ,  Alexandra Haag ,  Dieter Mayer

IPC: C23C18/31 ,  C23C18/32 ,  C25D3/38 ,  C25D3/58 ,  H01L21/768 ,  H01L21/288 ,  C25D7/12

Abstract: Described herein is a composition for filling submicrometer sized features having an aperture size of 30 nanometers or less including a source of copper ions, and at least one suppressing agent selected from compounds of formula I where the R1 radicals are each independently selected from a copolymer of ethylene oxide and at least one further C3 to C4 alkylene oxide, said copolymer being a random copolymer, the R2 radicals are each independently selected from R1 or alkyl, X and Y are spacer groups independently, and X for each repeating unit independently, selected from C1 to C6 alkylene and Z—(O—Z)m where the Z radicals are each independently selected from C2 to C6 alkylene, n is an integer equal to or greater than 0, and m is an integer equal to or greater than 1.

公开(公告)号：US09758885B2

公开(公告)日：2017-09-12

申请号：US14438688

申请日：2013-10-30

Applicant: BASF SE

Inventor： Marcel Patrik Kienle ,  Dieter Mayer ,  Cornelia Roeger-Goepfert ,  Alexandra Haag ,  Charlotte Emnet ,  Alexander Fluegel ,  Marco Arnold

IPC: C25D3/56 ,  C25D3/58 ,  C25D3/00 ,  C25D3/38 ,  C25D3/32 ,  C23C18/38

CPC classification number: C25D3/38 ,  C23C18/38 ,  C25D3/32

Abstract: A composition comprising a source of metal ions and at least one additive comprising at least one polyaminoamide, said polyaminoamide comprising the structural unit represented by formula I or derivatives of the polyaminoamide of formula I obtainable by complete or partial protonation, N-functionalization or N-quaternization with a non-aromatic reactant, wherein D6 is, for each repeating unit 1 to s independently, a divalent group selected from a saturated or unsaturated C1-C20 organic radical, D7 is, for each repeating unit 1 to s independently, a divalent group selected from straight chain or branched C2-C20 alkanediyl, which may optionally be interrupted by heteroatoms or divalent groups selected from O, S and NR10, R1 is, for each repeating unit 1 to s independently, selected from H, C1-C20 alkyl, and C1-C20 alkenyl, which may optionally be substituted by hydroxyl, alkoxy or alkoxycarbonyl, or, together with R2, may form a divalent group D8, and R2 is, for each repeating unit 1 to s independently, selected from H, C1-C20 alkyl, and C1-C20 alkenyl, which may optionally be substituted by hydroxyl, alkoxy or alkoxycarbonyl, or, together with R1, may form a divalent group D8, and D8 is selected from straight chain or branched C1-C18 alkanediyl, which may optionally be interrupted by heteroatoms or divalent groups selected from O, S and NR10, s is an integer from 1 to 250, R10 is selected from H, C1-C20 alkyl, and C1-C20 alkenyl, which may optionally be substituted by hydroxyl, alkoxy or alkoxycarbonyl.