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公开(公告)号:US11535946B2
公开(公告)日:2022-12-27
申请号:US16618222
申请日:2018-05-28
Applicant: BASF SE
Inventor: Alexander Fluegel , Jean-Pierre Berkan Lindner , Marco Arnold
Abstract: The present invention relates to the use of an aqueous composition comprising tin ions optionally further alloy metal ions selected from silver, copper, indium, and bismuth ions and at least one additive comprising a linear or branched polyimidazolium compound comprising the structural unit of formula (L1) for depositing tin or tin alloy containing layers and a process for depositing tin alloy layer onto a substrate.
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公开(公告)号:US09758885B2
公开(公告)日:2017-09-12
申请号:US14438688
申请日:2013-10-30
Applicant: BASF SE
Inventor: Marcel Patrik Kienle , Dieter Mayer , Cornelia Roeger-Goepfert , Alexandra Haag , Charlotte Emnet , Alexander Fluegel , Marco Arnold
Abstract: A composition comprising a source of metal ions and at least one additive comprising at least one polyaminoamide, said polyaminoamide comprising the structural unit represented by formula I or derivatives of the polyaminoamide of formula I obtainable by complete or partial protonation, N-functionalization or N-quaternization with a non-aromatic reactant, wherein D6 is, for each repeating unit 1 to s independently, a divalent group selected from a saturated or unsaturated C1-C20 organic radical, D7 is, for each repeating unit 1 to s independently, a divalent group selected from straight chain or branched C2-C20 alkanediyl, which may optionally be interrupted by heteroatoms or divalent groups selected from O, S and NR10, R1 is, for each repeating unit 1 to s independently, selected from H, C1-C20 alkyl, and C1-C20 alkenyl, which may optionally be substituted by hydroxyl, alkoxy or alkoxycarbonyl, or, together with R2, may form a divalent group D8, and R2 is, for each repeating unit 1 to s independently, selected from H, C1-C20 alkyl, and C1-C20 alkenyl, which may optionally be substituted by hydroxyl, alkoxy or alkoxycarbonyl, or, together with R1, may form a divalent group D8, and D8 is selected from straight chain or branched C1-C18 alkanediyl, which may optionally be interrupted by heteroatoms or divalent groups selected from O, S and NR10, s is an integer from 1 to 250, R10 is selected from H, C1-C20 alkyl, and C1-C20 alkenyl, which may optionally be substituted by hydroxyl, alkoxy or alkoxycarbonyl.
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13.
公开(公告)号:US12134834B2
公开(公告)日:2024-11-05
申请号:US17995186
申请日:2021-03-24
Applicant: BASF SE
Inventor: Marco Arnold , Alexander Fluegel , Charlotte Emnet , Nadine Engelhardt
IPC: C25D3/38
Abstract: Described herein is a composition including copper ions, an acid, and at least one polyaminoamide including, a group of formula L1 [A-B-A′-Z]n[Y—Z]m (L1) where B is a diacid fragment of formula L2 A, A′ are amine fragments independently selected from the group consisting of formula L3a and formula L3b Y is a co-monomer fragment; Z is a coupling fragment of formula L4 n is an integer of from 1 to 400; and m is 0 or an integer of from 1 to 400.
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14.
公开(公告)号:US12098473B2
公开(公告)日:2024-09-24
申请号:US17312737
申请日:2019-12-10
Applicant: BASF SE
Inventor: Sathana Kitayaporn , Charlotte Emnet , Dieter Mayer , Nadine Engelhardt , Marco Arnold , Lucas Benjamin Henderson , Alexander Fluegel
Abstract: Described herein is a composition including metal ions consisting essentially of cobalt ions, and a specific monomeric and polymeric suppressing agent including a carboxylic, sulfonic, sulfinic, phosphonic, or phosphinic acid functional groups which show a suppressing effect that is required for void-free bottom-up filling of nanometer-sized recessed features.
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公开(公告)号:US11840771B2
公开(公告)日:2023-12-12
申请号:US17566426
申请日:2021-12-30
Applicant: BASF SE
Inventor: Alexander Fluegel , Marco Arnold , Nadine Engelhardt , Marcel Patrik Kienle
Abstract: Described herein is an aqueous composition including tin ions and at least one compound of formula I
wherein
X1 is selected from a linear or branched C1-C12 alkanediyl, which may optionally be interrupted by O or S or a C5 to C12 aromatic moiety,
R11 is a copolymer of ethylene oxide and a further C3 to C6 alkylene oxide, wherein the content of ethylene oxide is from 5 to 30% by weight,
R11 is selected from H, R11, R40,
R13, R14 are (a) independently selected from H, R11, R40, or (b) may together form a divalent group X13;
X13 is selected from a linear or branched C1-C12 alkanediyl, which may optionally be
interrupted by O, S or NR43;
R40 is H or a linear or branched C1-C20 alkyl,
R43 is selected from H, R11 and a linear or branched C1-C20 alkyl.
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