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公开(公告)号:EP3108033B1
公开(公告)日:2019-10-16
申请号:EP15740739.6
申请日:2015-01-27
Applicant: BYD Company Limited
Inventor: GONG, Qing , ZHOU, Wei , SUN, Yongliang
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公开(公告)号:EP2935644A1
公开(公告)日:2015-10-28
申请号:EP13866340.6
申请日:2013-12-11
Applicant: BYD Company Limited
Inventor: ZHOU, Wei , SUN, Yongliang
CPC classification number: C23C14/35 , C03C17/009 , C03C23/0075 , C03C2217/43 , C03C2217/76 , C03C2218/156 , C03C2218/31 , C23C14/0057 , C23C14/022 , C23C14/06 , C23C14/0694 , C23C14/12 , C23C14/3414 , G02B1/111 , G02B1/14 , G02B1/18
Abstract: A film and a method for preparing the film are provided. A substrate is provided, and a film is formed on at least a part of a surface of the substrate by magnetron sputtering a target under a protective gas and a reactive gas. The target includes polytetrafluoroethylene and magnesium fluoride, and the reactive gas includes at least one selected from a group consisting of CF
4 and SiF
4 .
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