公开(公告)号：EP1994433A1

公开(公告)日：2008-11-26

申请号：EP07718159.2

申请日：2007-01-22

Applicant: CSEM Centre Suisse d'Electronique et de Microtechnique SA

Inventor： STANLEY, Ross ,  TORMEN, Maurizio ,  KUNZ, Rino ,  NIEDERMANN, Philippe

IPC: G02B5/18 ,  G02B26/08 ,  H01S5/14 ,  H01S5/065

CPC classification number: G01J3/1804 ,  G02B5/1828 ,  G02B26/0808 ,  H01S5/141

Abstract: A blazed grating, in particular of the microfabricated type, is disclosed as well as mode hop-free tunable lasers in which this grating is employed, and a process for fabricating gratings of this type. The grating lies in a general plane and comprises a plurality of elongate beams carrying mutually parallel respective reflection surfaces spaced apart from one another with a predefined pitch, each of these reflection surfaces having a normal direction inclined at a grating angle α to the normal direction of the general plane. Furthermore, the grating comprises a plurality of resilient suspension arms connected to the beams and intended to be fastened to a grating support. The suspension arms, the beams and their respective reflection surfaces define an assembly formed from a single part. A first pair of comb electrodes is provided for applying a mechanical force to this assembly, these being placed on a first side of the grating, along an axis transverse to the beams, and designed so as to allow the pitch of the grating to be modified in response to the application of the mechanical force. A second pair of electrodes placed on the opposite side from the first allows, in combination with the first pair, application of a displacement of the assembly, possibly without deforming it. It is thus possible to modulate the wavelength and/or the phase of a light beam with a device that is simple and inexpensive to fabricate and has a small footprint.

公开(公告)号：EP3596434A2

公开(公告)日：2020-01-22

申请号：EP17828909.6

申请日：2017-12-21

Applicant: CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement

Inventor： STANLEY, Ross ,  CHEBIRA, Amina ,  DUNBAR, Liza Andrea ,  PAD, Pedram

IPC: G01J3/26 ,  G01J3/28

公开(公告)号：EP1994433B1

公开(公告)日：2009-07-08

申请号：EP07718159.2

申请日：2007-01-22

Applicant: CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement

Inventor： STANLEY, Ross ,  TORMEN, Maurizio ,  KUNZ, Rino ,  NIEDERMANN, Philippe

IPC: G02B5/18 ,  G02B26/08 ,  H01S5/14 ,  H01S5/065

CPC classification number: G01J3/1804 ,  G02B5/1828 ,  G02B26/0808 ,  H01S5/141

Abstract: A blazed grating, in particular of the microfabricated type, is disclosed as well as mode hop-free tunable lasers in which this grating is employed, and a process for fabricating gratings of this type. The grating lies in a general plane and comprises a plurality of elongate beams carrying mutually parallel respective reflection surfaces spaced apart from one another with a predefined pitch, each of these reflection surfaces having a normal direction inclined at a grating angle a to the normal direction of the general plane. Furthermore, the grating comprises a plurality of resilient suspension arms connected to the beams and intended to be fastened to a grating support. The suspension arms, the beams and their respective reflection surfaces define an assembly formed from a single part. A first pair of comb electrodes is provided for applying a mechanical force to this assembly, these being placed on a first side of the grating, along an axis transverse to the beams, and designed so as to allow the pitch of the grating to be modified in response to the application of the mechanical force. A second pair of electrodes placed on the opposite side from the first allows, in combination with the first pair, application of a displacement of the assembly, possibly without deforming it. It is thus possible to modulate the wavelength and/or the phase of a light beam with a device that is simple and inexpensive to fabricate and has a small footprint.