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    MEMS LIFETIME ENHANCEMENT
    11.
    发明申请
    MEMS LIFETIME ENHANCEMENT 审中-公开
    MEMS LIFETIME ENMANCEMENT

    公开(公告)号：WO2013188633A1

    公开(公告)日：2013-12-19

    申请号：PCT/US2013/045590

    申请日：2013-06-13

    Applicant: CAVENDISH KINETICS, INC

    Inventor： KHIEU, Cong Quoc ,  JOSHI, Vikram ,  KNIPE, Richard L.

    IPC: H01G5/18 ,  H01G5/38 ,  H01H59/00 ,  H01L27/085

    CPC classification number: H01G5/16 ,  B81B7/02 ,  H01G5/18 ,  H01G5/38 ,  H01H59/0009

    Abstract: The present invention generally relates to methods for increasing the lifetime of MEMS devices by reducing the number of movements of a switching element in the MEMS device. Rather than returning to a ground state between cycles, the switching element can remain in the same state if both cycles necessitate the same capacitance. For example, if in both a first and second cycle, the switching element of the MEMS device is in a state of high capacitance the switching element can remain in place between the first and second cycle rather than move to the ground state. Even if the polarity of the capacitance is different in successive cycles, the switching element can remain in place and the polarity can be switched. Because the switching element remains in place between cycles, the switching element, while having the same finite number of movements, should have a longer lifetime.

    Abstract translation: 本发明一般涉及通过减少MEMS器件中的开关元件的移动次数来增加MEMS器件寿命的方法。 不是在循环之间返回到基态，如果两个循环都需要相同的电容，则开关元件可以保持在相同的状态。 例如，如果在第一和第二周期中，MEMS器件的开关元件处于高电容的状态，则开关元件可以在第一和第二周期之间保持就位，而不是移动到基态。 即使电容的极性在连续的循环中不同，开关元件也可以保持在适当的位置，并且可以切换极性。 因为开关元件在周期之间保持原位，所以开关元件虽然具有相同的有限数量的运动，应该具有更长的寿命。

    MEMS RF-SWITCH WITH NEAR-ZERO IMPACT LANDING
    15.
    发明申请
    MEMS RF-SWITCH WITH NEAR-ZERO IMPACT LANDING 审中-公开
    具有接近零冲击着陆的MEMS射频开关

    公开(公告)号：WO2018063814A1

    公开(公告)日：2018-04-05

    申请号：PCT/US2017/051536

    申请日：2017-09-14

    Applicant: CAVENDISH KINETICS, INC

    Inventor： KNIPE, Richard L. ,  VAN KAMPEN, Robertus Petrus ,  HUFFMAN, James Douglas ,  BARRON, Lance

    IPC: H01H59/00 ,  H01H1/00

    CPC classification number: H01H59/0009 ,  H01H2001/0084 ,  H01H2059/0072

    Abstract: The present disclosure generally relates to the design of a MEMS ohmic switch which provides for a low-impact landing of the MEMS device movable plate on the RF contact and a high restoring force for breaking the contacts to improve the lifetime of the switch. The switch has at least one contact electrode disposed off-center of the switch device and also has a secondary landing post disposed near the center of the switch device. The secondary landing post extends to a greater height above the substrate as compared to the RF contact of the contact electrode so that the movable plate contacts the secondary landing post first and then gently lands on the RF contact. Upon release, the movable plate will disengage from the RF contact prior to disengaging from the secondary landing post and have a longer lifetime due to the high restoring force.

    Abstract translation:

    本公开一般涉及一种MEMS欧姆开关，它提供了一种用于MEMS装置可动板的低冲击着陆对RF触点和用于断开触点以改善高恢复力的设计 交换机的生命周期。 该开关具有至少一个接触电极，该接触电极偏离开关装置的中心，并且还具有设置在开关装置的中心附近的第二接合柱。 与接触电极的RF接触相比，次级接地柱延伸到衬底上方更高的高度，使得可移动板首先接触次级接地柱，然后轻轻落在RF接触上。 释放后，活动板将脱离第二层着陆柱之前从RF触点脱离，并由于较高的恢复力而具有较长的使用寿命。

    MEMS RF-SWITCH WITH CONTROLLED CONTACT LANDING
    16.
    发明申请
    MEMS RF-SWITCH WITH CONTROLLED CONTACT LANDING 审中-公开
    具有受控接触着陆的MEMS射频开关

    公开(公告)号：WO2017087342A1

    公开(公告)日：2017-05-26

    申请号：PCT/US2016/061938

    申请日：2016-11-15

    Applicant: CAVENDISH KINETICS, INC.

    Inventor： VAN KAMPEN, Robertus Petrus ,  KNIPE, Richard L. ,  RENAULT, Mickael ,  DASTIDER, Shibajyoti Ghosh ,  MUYANGO, Jaques Marcel

    IPC: H01H59/00 ,  B81B3/00

    CPC classification number: H01H59/0009 ,  B81B3/0008 ,  B81B3/001 ,  B81B3/0086 ,  B81B2201/016 ,  H01H2059/0018

    Abstract: A MEMS switch contains an RF electrode 102, pull-down electrodes 104 and anchor electrodes 108 located on a substrate 101. A plurality of islands 226 are provided in the pull-down electrode and electrically isolated therefrom. On top of the RF electrode is the RF contact 206 to which the MEMS-bridge 212, 214 forms an ohmic contact in the pulled-down state. The pull-down electrodes 104 are covered with a dielectric layer 202 to avoid a short-circuit between the bridge and the pull-down electrode. Contact stoppers 224 are disposed on the dielectric layer 202 at locations corresponding to the islands 226, and the resulting gap between the bridge and the dielectric layer in the pulled-down state reduces dielectric charging. In alternative embodiments, the contact stoppers are provide within the dielectric layer 202 or disposed on the islands themselves and under the dielectric layer. The switch provides good controllability of the contact resistance of MEMS switches over a wide voltage operating range.

    Abstract translation: MEMS开关包含位于衬底101上的RF电极102，下拉电极104和锚电极108.多个岛226设置在下拉电极中并与其电隔离。 在RF电极的顶部上是MEMS桥212,214在下拉状态下形成欧姆接触的RF接触206。 下拉电极104覆盖有介电层202以避免桥与下拉电极之间的短路。 接触止动件224设置在介电层202上对应于岛状物226的位置处，并且在下拉状态下桥和介电层之间的间隙减小了介电充电。 在替代实施例中，接触止动件设置在电介质层202内或设置在岛本身上和电介质层下。 该开关在宽电压工作范围内提供了MEMS开关接触电阻的良好可控性。

    ROUTING OF MEMS VARIABLE CAPACITORS FOR RF APPLICATIONS
    19.
    发明申请
    ROUTING OF MEMS VARIABLE CAPACITORS FOR RF APPLICATIONS 审中-公开
    用于射频应用的MEMS可变电容器的布线

    公开(公告)号：WO2013028546A1

    公开(公告)日：2013-02-28

    申请号：PCT/US2012/051427

    申请日：2012-08-17

    Applicant: CAVENDISH KINETICS, INC ,  GADDI, Roberto ,  VAN KAMPEN, Robertus Petrus ,  KNIPE, Richard L. ,  UNAMUNO, Anartz

    Inventor： GADDI, Roberto ,  VAN KAMPEN, Robertus Petrus ,  KNIPE, Richard L. ,  UNAMUNO, Anartz

    IPC: H01G5/16 ,  H01G5/38 ,  H01H59/00 ,  B81B3/00

    CPC classification number: H01G5/16 ,  H01G5/38 ,  H01G7/00 ,  H01H59/0009 ,  Y10T29/43

    Abstract: The present invention generally relates to a variable capacitor for RF and microwave applications. The variable capacitor includes a bond pad that has a plurality of cells electrically coupled thereto. Each of the plurality of cells has a plurality of MEMS devices therein. The MEMS devices share a common RF electrode, one or more ground electrodes and one or more control electrodes. The RF electrode, ground electrodes and control electrodes are all arranged parallel to each other within the cells. The RF electrode is electrically connected to the one or more bond pads using a different level of electrical routing metal.

    Abstract translation: 本发明一般涉及用于RF和微波应用的可变电容器。 可变电容器包括具有与其电耦合的多个单元的接合焊盘。 多个单元中的每一个在其中具有多个MEMS器件。 MEMS器件共享公共RF电极，一个或多个接地电极和一个或多个控制电极。 RF电极，接地电极和控制电极都在电池内彼此平行布置。 RF电极使用不同级别的电路由金属电连接到一个或多个接合焊盘。

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