公开(公告)号：US20140328364A1

公开(公告)日：2014-11-06

申请号：US14336023

申请日：2014-07-21

Applicant: GIGAPHOTON INC. ,  KOMATSU LTD. ,  USHIO DENKI KABUSHIKI KAISHA

Inventor： Junichi FUJIMOTO ,  Hakaru MIZOGUCHI ,  Tatsuo ENAMI

IPC: H01S3/23

CPC classification number: H01S3/2308 ,  H01S3/0014 ,  H01S3/03 ,  H01S3/10092 ,  H01S3/225 ,  Y10T29/49718 ,  Y10T29/49721 ,  Y10T29/4973 ,  Y10T29/49826

Abstract: When a chamber of an oscillator and one or more amplifiers is to be replaced at the timing when a predetermined period elapses, one of the chambers of the oscillator and the amplifiers having a low allowable deterioration limit is detached and this chamber is attached in place of one of the chambers of the oscillator and the amplifiers other than the one having the low allowable deterioration limit. Thus, the chamber which has been used in one of the oscillator and amplifiers having a low allowable deterioration limit and has not reached the limit of deterioration is reused in one of the oscillator and the amplifiers other than the one having the low allowable deterioration limit. This enables efficient use of oscillator and amplifier chambers in a multistage amplification laser apparatus, minimizing the labor and parts consumed for replacement thereof.

Abstract translation: 当在预定时间段的时间内要更换振荡器和一个或多个放大器的腔室时，分离振荡器的腔室和具有低容许劣化极限的放大器之一，并且该腔室被附接以代替 振荡器的一个腔室以及具有低容许劣化极限的放大器之外的放大器。 因此，在具有低容许劣化极限且尚未达到劣化极限的振荡器和放大器之一中使用的腔室在具有低容许劣化极限的振荡器和放大器之外的其中之一中被重新使用。 这使得能够在多级放大激光装置中有效地使用振荡器和放大器腔室，从而最小化用于更换它们的人工和消耗的部件。

公开(公告)号：US20240405496A1

公开(公告)日：2024-12-05

申请号：US18799414

申请日：2024-08-09

Applicant: Gigaphoton Inc.

Inventor： Yoichi SASAKI ,  Junichi FUJIMOTO ,  Jeffrey P. SERCEL ,  Michael von DADELSZEN

IPC: H01S3/038 ,  G03F7/20

Abstract: A chamber for a gas laser device includes a first main electrode and a second main electrode arranged along a predetermined direction as being apart from and facing each other in the internal space, a window arranged at a wall surface of the chamber and transmitting light from the internal space, and a first preionization electrode arranged beside one side of the first main electrode. Here, the first preionization electrode includes a first dielectric pipe, a first preionization inner electrode arranged in the first dielectric pipe and extending along the first dielectric pipe, and a first preionization outer electrode extending along the first dielectric pipe and including a first end portion facing the first dielectric pipe with a first gap with respect to the first dielectric pipe. At least a part of the first gap is larger than 0 mm and equal to or smaller than 0.9 mm.

公开(公告)号：US20240396282A1

公开(公告)日：2024-11-28

申请号：US18796337

申请日：2024-08-07

Applicant: Gigaphoton Inc.

Inventor： Yoichi SASAKI ,  Junichi FUJIMOTO

IPC: H01S3/038 ,  G03F7/20

Abstract: A discharge electrode according to an aspect of the present disclosure is for use in a gas laser apparatus that excites a laser gas containing fluorine by discharge, and includes a cathode electrode that extends in one direction, and an anode electrode that extends in the one direction and that is disposed facing the cathode electrode in a discharge direction orthogonal to the one direction. At least one of the cathode electrode and the anode electrode includes an electrode substrate containing a metal, and a dielectric including a first layer having voids provided on a pair of side faces of the electrode substrate. A porosity of the first layer is in a range of 0.5% to 25%.

公开(公告)号：US20230387641A1

公开(公告)日：2023-11-30

申请号：US18447514

申请日：2023-08-10

Applicant: Gigaphoton Inc.

Inventor： Junichi FUJIMOTO ,  Takahiro TATSUMI ,  Kazuki NAGAI ,  Jeffrey P. SERCEL

IPC: H01S3/03 ,  H01S3/041 ,  H01S3/04 ,  G03F7/00

CPC classification number: H01S3/03 ,  H01S3/041 ,  H01S3/0405 ,  H01S3/0407 ,  G03F7/70025 ,  G03F7/70891

Abstract: A chamber device includes an inner housing including a passage port through which light generated by excitation of laser gas at an internal space thereof passes, an outer housing surrounding at least a part of the inner housing from a lateral side of a travel direction of the light, and a partition wall arranged between the inner housing and the outer housing and fixed to the inner housing and the outer housing.

公开(公告)号：US20140105238A1

公开(公告)日：2014-04-17

申请号：US14049383

申请日：2013-10-09

Applicant: Gigaphoton Inc.

Inventor： Akihiko KUROSU ,  Junichi FUJIMOTO ,  Yosuke ISHIZUKA ,  Takashi MATSUNAGA ,  Osamu WAKABAYASHI

IPC: H01S3/036 ,  H01S3/041

CPC classification number: H01S3/036 ,  F16C32/047 ,  H01S3/02 ,  H01S3/041 ,  H01S3/223 ,  H01S3/2232 ,  H01S3/2258

Abstract: A discharge-pumped gas laser device may include a laser chamber, a pair of discharge electrodes provided in the laser chamber, a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber, a housing configured to contain the laser chamber, and a magnetic bearing controller connected to the magnetic bearing electrically, being capable of controlling the magnetic bearing, and provided in the housing separately from the laser chamber.

Abstract translation: 放电泵浦气体激光装置可以包括激光室，设置在激光室中的一对放电电极，具有磁性轴承的风扇设置在激光室中并且能够使激光室中的气体循环， 被配置为容纳激光室的壳体，以及与磁性轴承电连接的磁性轴承控制器，其能够控制磁性轴承，并且与激光室分开设置在壳体中。