公开(公告)号：US20240269769A1

公开(公告)日：2024-08-15

申请号：US18599445

申请日：2024-03-08

Applicant: Gigaphoton Inc.

Inventor： Takashi ONOSE

IPC: B23K26/073 ,  B23K26/06 ,  B23K103/00

CPC classification number: B23K26/073 ,  B23K26/0648 ,  B23K2103/52

Abstract: A laser processing method includes a first process to concentrate laser light on a front surface of a workpiece to form a recessed portion, and a second process to concentrate the laser light on a bottom surface of the recessed portion. In the second process, a fluence Fin satisfies an expression of Ffth

公开(公告)号：US20210226411A1

公开(公告)日：2021-07-22

申请号：US17220993

申请日：2021-04-02

Applicant: Gigaphoton Inc.

Inventor： Taisuke MIURA ,  Takashi ONOSE ,  Osamu WAKABAYASHI

IPC: H01S5/00 ,  H01S5/50 ,  H01S5/042

Abstract: A laser system according to one aspect of the present disclosure includes a wavelength-variable first solid-state laser device configured to output a first pulse laser beam; a wavelength conversion system including a first nonlinear crystal configured to wavelength-convert the first pulse laser beam and a first rotation stage configured to change a first incident angle of the first pulse laser beam on the first nonlinear crystal; an excimer amplifier configured to amplify a pulse laser beam wavelength-converted by the wavelength conversion system; and a control unit configured to receive, from an external device, data of a target center wavelength of an excimer laser beam output from the excimer amplifier, control a wavelength of the first pulse laser beam in accordance with the instructed target center wavelength, and control the first incident angle on the first nonlinear crystal in accordance with an average value of the target center wavelength.

公开(公告)号：US20190006817A1

公开(公告)日：2019-01-03

申请号：US16124434

申请日：2018-09-07

Applicant: GIGAPHOTON INC.

Inventor： Takashi ONOSE ,  Osamu WAKABAYASHI

IPC: H01S3/23 ,  H01S3/16 ,  H01S3/067 ,  G02F1/35 ,  G02F1/355 ,  H01S3/109 ,  H01S3/115 ,  H01S3/11 ,  H01S3/108

CPC classification number: H01S3/2308 ,  G02F1/353 ,  G02F1/3532 ,  G02F1/3551 ,  G02F2001/354 ,  H01S3/0092 ,  H01S3/06716 ,  H01S3/06754 ,  H01S3/09415 ,  H01S3/0971 ,  H01S3/10007 ,  H01S3/10015 ,  H01S3/1003 ,  H01S3/108 ,  H01S3/109 ,  H01S3/11 ,  H01S3/115 ,  H01S3/1618 ,  H01S3/2325 ,  H01S3/2366 ,  H01S3/2375 ,  H01S3/2391

Abstract: A solid state laser device includes a seed laser that outputs continuous wave laser seed light, a light intensity changeable unit that changes a light intensity thereof and outputs seed pulse light, a CW excitation laser that outputs continuous wave excitation light, an amplifier that amplifies the seed pulse light and outputs amplified light based on an amplification gain increased by the excitation light, a wavelength conversion unit that converts a wavelength of the amplified light and outputs harmonic light, and a light intensity control unit that allows the light intensity changeable unit to output the seed pulse light after a certain time elapsed from an input of an external trigger signal each time the signal is input and output suppression light that suppresses an increase of the amplification gain in a period after an output of the seed pulse light until an input of a next external trigger signal.

公开(公告)号：US20160344158A1

公开(公告)日：2016-11-24

申请号：US15227028

申请日：2016-08-03

Applicant: GIGAPHOTON INC.

Inventor： Takashi ONOSE ,  Kouji KAKIZAKI ,  Osamu WAKABAYASHI

IPC: H01S3/23 ,  H01S3/225 ,  H05G2/00 ,  H01S3/13 ,  H01S3/00 ,  H01S3/30 ,  H01S3/10

CPC classification number: H01S3/2391 ,  H01S3/0092 ,  H01S3/10015 ,  H01S3/1301 ,  H01S3/2251 ,  H01S3/30 ,  H01S3/305 ,  H05G2/00

Abstract: There is provided a laser system that may include a Raman cell, a pumping light generator, and a Raman cell laser unit. The pumping light generator may include one or more optical parametric amplifiers (OPAs), and may be configured to output first Raman-cell pumping light and second Raman-cell pumping light to the Raman cell. The Raman cell laser unit may be configured to output probing light as a target of wavelength conversion to the Raman cell.

Abstract translation: 提供了可以包括拉曼单元，泵浦光发生器和拉曼单元激光器单元的激光系统。 泵浦光发生器可以包括一个或多个光学参量放大器（OPA），并且可以被配置为将第一拉曼单元泵浦光和第二拉曼单元泵浦光输出到拉曼单元。 拉曼单元激光单元可以被配置为将作为波长转换的目标的探测光输出到拉曼单元。