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公开(公告)号：EP2063239A4
公开(公告)日：2013-12-25
申请号：EP08765191
申请日：2008-06-05
Applicant: HAMAMATSU PHOTONICS KK
Inventor： SUZUKI TOMOFUMI , SHIBAYAMA KATSUMI , YOKINO TAKAFUMI , ITO MASASHI , TEICHMANN HELMUT , HILLER DIETMAR , STARKER ULRICH
CPC classification number: G01J3/02 , G01J3/0208 , G01J3/0243 , G01J3/0259 , G01J3/04
Abstract: The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a light detecting element 4 having a light detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of the light detecting element 4 to transmit the light L1, L2. The light detecting element 4 is provided with a light-passing hole 42 through which the light L1 advancing into the spectroscopic portion 3 passes, and a reservoir portion 43 is formed on a rear plane 4a of the body portion 2 side in the light detecting element 4 so as to enclose a light outgoing opening 42b of the light-passing hole 42.
Abstract translation: 分光模块1具备使光L1，L2透过的主体部2，将从主体部2的前面2a入射的光L1分散到主体部2内，使前面的光反射的分光部3 具有光检测部分41的光检测元件4，光检测元件4用于检测由分光部分3分散和反射的光L2，并通过倒装键合与形成在主体部分2的前表面2a上的布线9电连接 以及填充在光检测元件4的主体部分2侧以透射光L1，L2的底部填充材料12。 在光检测元件4上设置有进入分光部3的光L1通过的通光孔42，在光检测元件4的主体部2侧的背面4a上形成有积存部43 以封闭通光孔42的出光口42b。
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公开(公告)号：JP2006030031A
公开(公告)日：2006-02-02
申请号：JP2004210687
申请日：2004-07-16
Applicant: Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
Inventor： TEICHMANN HELMUT , HILLER DIETMAR , STARKER ULRICH
CPC classification number: G01J3/2803 , G01J3/02 , G01J3/0205 , G01J3/0259 , G01J3/0262 , G01J3/18
Abstract: PROBLEM TO BE SOLVED: To provide a spectroscope with a simple structure realizing a sufficient accuracy of optical element arrangements and reduced in cost.
SOLUTION: The spectroscope 1A is composed of: an optical body 10 wherein a spectral light path is established, through which spectral object light is propagated; a light entrance slit 16 the object light enters; a diffraction grating 17 which spectrally processes the entrance object light; and a photodiode array 18 which detects the object light spectrally processed by the diffraction grating 17. Furthermore, an optical connection member 20 is disposed therein, which is used as an optical member optically connecting the optical body 10 to the photodiode array 18, and in which a light entrance plane 21 corresponding to the spectrally processed object light is in contact with the upper surface 11 of the optical body 10, and a light emission plane 22 is in contact with the photodiode array 18, and which is made up in such a form that the light emission plane 22 is tilted relatively to the light entrance plane 21 at a prescribed angle.
COPYRIGHT: (C)2006,JPO&NCIPIAbstract translation: 要解决的问题：为了提供具有简单结构的分光器，实现了光学元件布置的足够的精度并降低了成本。 解决方案：分光器1A由以下部分组成：其中建立光谱对象光通过其传播的分光光路的光学体10; 物体光进入的光入口狭缝16; 衍射光栅17，其对入射物体光进行光谱处理; 以及光电二极管阵列18，其检测由衍射光栅17进行光谱处理的物体光。此外，光连接部件20设置在其中，该光连接部件用作将光学体10光学连接到光电二极管阵列18的光学部件， 与光谱处理对象光对应的光入射面21与光学体10的上表面11接触，发光面22与光电二极管阵列18接触，并且由此构成 形成发光平面22相对于光入射面21以规定角度倾斜的形状。 版权所有（C）2006，JPO＆NCIPI
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公开(公告)号：JP2004354176A
公开(公告)日：2004-12-16
申请号：JP2003151415
申请日：2003-05-28
Applicant: Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
Inventor： TEICHMANN HELMUT , HILLER DIETMAR , STARKER ULRICH
CPC classification number: G01J3/2803 , G01J3/0256 , G01J3/0262 , G01J3/0291
Abstract: PROBLEM TO BE SOLVED: To provide a photodetector capable of precisely positioning of a constitutional element when applied to a spectrometer, and to provide the spectrometer using it.
SOLUTION: The spectrometer is constituted of a photodetector 1B which is provided with a photodiode array 11 of a plurality of photodiodes 12 disposed on the upper surface 10a of the semiconductor substrate 10, and a light incident part 13 formed as an opening keeping a prescribed positional relation to the photodiode array 11, a main part 2 composed of the tabular part 20, and supports 21 and 22 placed on the substrate 10. A lens 23 provided on the under face 20b of the tabular part 20, and a planar aberration-reduced blazed reflection diffraction grating 24 separate the light incident from the light incident part 13 and passed through the lens 23 into the spectral components. The separated light spectral components are detected by the photodiode array 11.
COPYRIGHT: (C)2005,JPO&NCIPI-
公开(公告)号：JP2009069017A
公开(公告)日：2009-04-02
申请号：JP2007238317
申请日：2007-09-13
Applicant: Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
Inventor： SHIBAYAMA KATSUMI , SUZUKI TOMOHITO , TEICHMANN HELMUT , HILLER DIETMAR , STARKER ULRICH
Abstract: PROBLEM TO BE SOLVED: To provide a highly reliable spectroscopic module.
SOLUTION: The spectroscopic module 1 is provided with a main body part 2 for transmitting lights L1 and L2; a spectroscopic part 3 for dispersing the light L1 incident onto the main body part 2 from the front surface 2a of the main body part 2 and reflecting it to the side of the front surface 2a; a photo-detection element 4 having a photo-detection part 41 for detecting the light L2 dispersed and reflected by the spectroscopic part 3 and electrically connected by face-down bonding to a wiring 9 formed in the front surface 2a of the main body part 2; and an underfill material 12 filled in the photo-detection element 4 on the side of the main body part 2 for transmitting the lights L1 and L2. The photo-detection element 4 has a light-passage hole 42 for passing the light L1 traveling to the spectroscopic part 3. A rectangular ring-like protrusion part 43 is formed in the rear surface 4a of the photo-detection element 4 on the side of the main body part 2 in such a way as to surround an light-emergent opening 42b of the light-passage hole 42.
COPYRIGHT: (C)2009,JPO&INPITAbstract translation: 要解决的问题：提供高度可靠的分光模块。 解决方案：分光模块1设置有用于透射灯L1和L2的主体部分2; 用于将入射到主体部分2上的光L1从主体部分2的前表面2a分散并将其反射到前表面2a侧的分光部分3; 光检测元件4，其具有光检测部41，用于检测由分光部3分散和反射的光L2，并通过面向下接合电连接到形成在主体部2的前表面2a中的布线9 ; 以及填充在主体部分2侧的光检测元件4中用于透射灯L1和L2的底部填充材料12。 光检测元件4具有用于使行进到分光部3的光L1通过的光通过孔42.在光检测元件4的侧面的背面4a上形成矩形的环状突起部43 主体部分2以包围光通孔42的出光开口42b的方式。（C）2009，JPO＆INPIT
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Patent Agency Ranking
公开(公告)号：JP2009069016A
公开(公告)日：2009-04-02
申请号：JP2007238291
申请日：2007-09-13
Applicant: Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
Inventor： SHIBAYAMA KATSUMI , SUZUKI TOMOHITO , TEICHMANN HELMUT , HILLER DIETMAR , STARKER ULRICH
IPC: G01J3/18
Abstract: PROBLEM TO BE SOLVED: To provide a highly reliable spectroscopic module.
SOLUTION: The spectroscopic module 1 is provided with a main body part 2 for transmitting lights L1 and L2; a spectroscopic part 3 for dispersing the light L1 incident onto the main body part 2 from the front surface 2a of the main body part 2 and reflecting it to the side of the front surface 2a; a photo-detection element 4 having a photo-detection part 41 for detecting the light L2 dispersed and reflected by the spectroscopic part 3 and electrically connected by face-down bonding to a wiring 9 formed in the front surface 2a of the main body part 2; and an underfill material 12 filled in the photo-detection element 4 on the side of the main body part 2 for transmitting the lights L1 and L2. The photo-detection element 4 has a light-passage hole 42 for passing the light L1 traveling to the spectroscopic part 3. A retaining part 43 is formed in the rear surface 4a of the photo-detection element 4 on the side of the main body part 2 in such a way as to surround an light-emergent opening 42b of the light-passage hole 42.
COPYRIGHT: (C)2009,JPO&INPITAbstract translation: 要解决的问题：提供高度可靠的分光模块。 解决方案：分光模块1设置有用于透射灯L1和L2的主体部分2; 用于将入射到主体部分2上的光L1从主体部分2的前表面2a分散并将其反射到前表面2a侧的分光部分3; 光检测元件4，其具有光检测部41，用于检测由分光部3分散和反射的光L2，并通过面向下接合电连接到形成在主体部2的前表面2a中的布线9 ; 以及填充在主体部分2侧的光检测元件4中用于透射灯L1和L2的底部填充材料12。 光检测元件4具有用于使行进到分光部3的光L1通过的光通过孔42.保持部43形成在光检测元件4的主体侧的后表面4a中 部分2以围绕光通路孔42的光出射开口42b的方式。（C）2009年，JPO和INPIT
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公开(公告)号：JP2008304385A
公开(公告)日：2008-12-18
申请号：JP2007153014
申请日：2007-06-08
Applicant: Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
Inventor： SHIBAYAMA KATSUMI , YOSHINO TAKAFUMI , SUZUKI TOMOHITO , TEICHMANN HELMUT , HILLER DIETMAR , STARKER ULRICH
CPC classification number: G01J3/04 , G01J3/02 , G01J3/0202 , G01J3/0243 , G01J3/0259 , G01J3/0262 , G01J3/0291 , G01J3/18 , G01J3/2803
Abstract: PROBLEM TO BE SOLVED: To provide a spectroscopic module with high reliability.
SOLUTION: In the spectroscopic module 1, a light absorption layer 6 having a light passage hole 6a for making light L2 advancing to a spectroscopic part 3 pass therethrough, and a light passage hole 6b for making light L2 advancing to a light detection part 4a of a light detection element 4 pass therethrough is formed integrally therewith by patterning. Thereby, the relative positional relationship between the light passage hole 6a and the light passage hole 6b is prevented from being displaced. In addition, since generation of stray light is prevented by the light absorption layer 6, and the stray light is absorbed thereby, the stray light can be prevented from entering the light detection part 4a of the light detection part 4. Accordingly, reliability can be improved by the spectroscopic module 1.
COPYRIGHT: (C)2009,JPO&INPITAbstract translation: 要解决的问题：提供高可靠性的光谱模块。 解决方案：在分光模块1中，具有使通向分光部3的光L2通过的光通过孔6a的光吸收层6和通过光L2的光通过孔6b进入光检测 光检测元件4的通过部分4a通过图案化与其一体地形成。 由此，防止了光通过孔6a与光通过孔6b之间的相对位置关系。 此外，由于通过光吸收层6防止杂散光的产生，并且杂散光被吸收，所以可以防止杂散光进入光检测部4的光检测部4a。因此，可靠性可以是 由光谱模块1改进。版权所有（C）2009，JPO＆INPIT
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公开(公告)号：JP2008304387A
公开(公告)日：2008-12-18
申请号：JP2007153019
申请日：2007-06-08
Applicant: Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
Inventor： SHIBAYAMA KATSUMI , TEICHMANN HELMUT , SUZUKI TOMOHITO , HILLER DIETMAR , STARKER ULRICH
CPC classification number: G01J3/02 , G01J3/0202 , G01J3/0243 , G01J3/0259 , G01J3/0262 , G01J3/0291 , G01J3/04 , G01J3/2803
Abstract: PROBLEM TO BE SOLVED: To provide a spectroscopic module with high reliability.
SOLUTION: In the spectroscopic module 1, a light detection element 4 has a light passage opening 4b for making light entering a body part 2 pass therethrough. Thereby, the relative positional relationship between the light passage opening 4b and a light detection part 4a of the light detection element 4 is prevented from being deviated. In addition, an optical element 7 guiding light entering into the body part 2 is arranged on the light passage opening 4b. Thereby, light to be entered into the body part 2 can be surely guided without blocking a part of the light to be entered into the body part 2 by a light entering side edge part of the light passage opening 4b. Accordingly, reliability can be improved by the spectroscopic module 1.
COPYRIGHT: (C)2009,JPO&INPITAbstract translation: 要解决的问题：提供高可靠性的光谱模块。 解决方案：在分光模块1中，光检测元件4具有用于使入射体2的光通过的光通道开口4b。 由此，能够防止光通过口4b与光检测元件4的光检测部4a之间的相对位置关系的偏离。 另外，引导进入体部2的光的光学元件7布置在光通道开口4b上。 由此，能够可靠地引导进入体部2的光，而不会通过进入光通路开口4b的侧边缘部分的光而不阻挡要进入体部2的一部分光。 因此，通过光谱模块1可以提高可靠性。版权所有：（C）2009，JPO＆INPIT
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公开(公告)号：JP2008304379A
公开(公告)日：2008-12-18
申请号：JP2007152966
申请日：2007-06-08
Applicant: Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
Inventor： SHIBAYAMA KATSUMI , TEICHMANN HELMUT , YOSHINO TAKAFUMI , SUZUKI TOMOHITO , HILLER DIETMAR , STARKER ULRICH
CPC classification number: G01J3/02 , G01J3/0202 , G01J3/0208 , G01J3/0256 , G01J3/0259 , G01J3/0262 , G01J3/18 , G01J3/2803
Abstract: PROBLEM TO BE SOLVED: To provide a spectroscopic module capable of being miniaturized and easily mass-produced by a wafer process. SOLUTION: The spectroscopic module 1 can be miniaturized by reducing the thickness of a body part 2 because the body part 2 has a plate-like shape. In addition, since the body part 2 has the plate-like shape, the spectroscopic module 1 can be manufactured by using, for instance, a wafer process. That is to say, lens parts 3, diffraction layers 4, reflective layers 6 and light detection elements 7 are formed in a matrix-like shape on a glass wafer used as multiple body parts 2, and the glass wafer is subjected to dicing, whereby the multiple spectroscopic modules 1 can be manufactured. Thus the spectroscopic modules 1 can be easily mass-produced. COPYRIGHT: (C)2009,JPO&INPIT
Abstract translation: 要解决的问题：提供能够通过晶片工艺小型化和容易批量生产的光谱模块。 解决方案：通过减小主体部分2的厚度，由于主体部分2具有板状形状，可以使分光模块1小型化。 此外，由于主体部2具有板状，因此可以通过使用例如晶片工序来制造分光模块1。 也就是说，透镜部件3，衍射层4，反射层6和光检测元件7在用作多个主体部件2的玻璃晶片上形成为矩阵状，并且对玻璃晶片进行切割，由此 可以制造多个分光模块1。 因此，可以容易地批量生产光谱模块1。 版权所有（C）2009，JPO＆INPIT
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公开(公告)号：JP2005308495A
公开(公告)日：2005-11-04
申请号：JP2004124599
申请日：2004-04-20
Applicant: Hamamatsu Photonics Kk , 浜松ホトニクス株式会社
Inventor： HILLER DIETMAR , TEICHMANN HELMUT , STARKER ULRICH
CPC classification number: G01J3/0259 , G01J3/0256
Abstract: PROBLEM TO BE SOLVED: To provide a spectroscope capable of realizing preferable optical coupling with light being an object to be spectroscopically processed, and to provide a measuring apparatus using the same. SOLUTION: The spectroscope 1A is composed of an optical body 10; a glass member 11 having a light entrance slit 12; and a connection flange 20. Furthermore, the connection flange 20 is equipped with an aperture section 21 into which the glass member 11 is inserted so as to be positioned, and positioning rods 25 which are disposed at straddling positions in front of and behind the aperture section 21 and positioned in relation to the aperture section 21. Employing the positioning rods 25 enables the spectroscope 1A to be easily and precisely connected to other components in the measuring apparatus by using a passive alignment method, when the spectroscope 1A is applied to the measuring apparatus. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：提供一种能够实现与作为光谱处理对象的光的优选光耦合的分光器，并提供使用该光谱的测量装置。 解决方案：分光镜1A由光学体10组成; 具有光入射狭缝12的玻璃构件11; 另外，连接凸缘20配备有孔部21，玻璃构件11插入其中以定位在其中，定位杆25设置在孔的前方和后方的跨接位置 部分21相对于开口部分21定位。通过使用定位杆25，可以通过使用无源对准方法将分光镜1A容易且精确地连接到测量装置中的其它部件，当分光器1A应用于测量 仪器。 版权所有（C）2006，JPO＆NCIPI
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