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公开(公告)号:DE102008030419A1
公开(公告)日:2009-04-02
申请号:DE102008030419
申请日:2008-06-26
Applicant: IBM , MACRONIX INT CO LTD , QIMONDA AG
Inventor: BREITWISCH MATTHEW J , HAPP THOMAS , JOSEPH ERIC , LUNG HSIANG-LAN , PHILIPP JAN BORIS
IPC: H01L27/24
Abstract: An embodiment of the present invention includes a phase change memory (PCM) structure configurable for use as a nonvolatile storage element. The element includes at least one bottom electrode; at least one phase change material layer on at least a portion of an upper surface of the bottom electrode; and at least one heater layer on at least a portion of an upper surface of the phase change material layer, wherein the heater layer has a tapered shape such that an upper surface of the heater layer has a cross-sectional width that is longer than a cross-sectional width of a bottom surface of the heater layer contacting the phase change material layer.
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公开(公告)号:DE102008008679A1
公开(公告)日:2008-09-18
申请号:DE102008008679
申请日:2008-02-12
Applicant: IBM , MACRONIX INT CO LTD , QIMONDA AG
Inventor: BREITWISCH MATTHEW J , BURR GEOFFREY , CHEN CHIEH-FANG , CHEN SHIHHUNG , CHEN YI-CHOU , HAPP THOMAS , JOSEPH ERIC , LAM CHUNG HON , LUNG HSIANG-LAN , PHILIPP JAN BORIS , SCHROTT ALEJANDRO G
IPC: H01L27/24
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