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公开(公告)号：ES2024468B3
公开(公告)日：1992-03-01
申请号：ES87114008
申请日：1987-09-25
Applicant: IBM , LEICA IND GMBH
Inventor： DURIG URS THEODOR , FISCHER ULRICH CHRISTIAN , POHL WOLFGANG DIETER
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公开(公告)号：AT66737T
公开(公告)日：1991-09-15
申请号：AT87114008
申请日：1987-09-25
Applicant: IBM , LEICA INDUSTRIEVERWALTUNG
Inventor： DUERIG URS THEODOR , FISCHER ULRICH CHRISTIAN , POHL WOLFGANG DIETER
IPC: G01B11/00 , G01B11/30 , G01Q10/00 , G01Q20/02 , G01Q60/18 , G01Q60/22 , G11B5/60 , G11B9/00 , G11B11/00 , G11B11/105 , G11B21/20 , G02B21/00 , G11B7/09
Abstract: A sensor body (1) is formed as a light waveguide for laser light (2). A light exit site (10) for light diffracted within the sensor body (1) is located at a surface (6) thereof which faces away from a measured body (M). A detection particle (15) is located at the surface (5) of the sensor body (1) facing the measured body (M). It has a substantially convex and rounded off form and a major dimension which is smaller than the wavelength of the light (2). The measured body (M) is located in the optical near field of the detection particle (15). The latter has a major dimension of 5 to 500 nm and preferably of 20 to 100 nm. A detector means (11) converts the optical energy of the diffracted light to an electrical detector signal. A continuous thin film (16) is provided as a coating for the sensor (S). It substantially covers the detection particle (15) and at least part of the surface (5) of the sensor body (1) in the vicinity of the detection particle (15) It has a thickness which is smaller than one half of said predetermined wavelength. Preferably it is formed of gold and has a thickness of less than 100 nm. The sensor is used to finally convert a distance to an electrical quantity.
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公开(公告)号：DE3477848D1
公开(公告)日：1989-05-24
申请号：DE3477848
申请日：1984-10-11
Applicant: IBM
Inventor： BEDNORZ JOHANNES GEORG , HOLLIS RALPH LEROY , LANZ MARTIN , POHL WOLFGANG DIETER , YEACK-SCRANTON CELIA ELIZABETH
Abstract: The positioner comprises a fixed frame (1) from which extends a first pair of parallel piezoelectric benders ("bimorphs") (2, 3) which carry an intermediate frame (4). Actuation of the bimorphs (2, 3) causes lateral translation of the intermediate frame (4) with respect to the fixed frame with the bimorphs (2, 3) forming the flexible sides of a parallelogram.Attached to the intermediate frame (4) is a second pair of bimorphs (12, 13) which extend in a direction orthogonal to the direction of the first pair of bimorphs (2, 3) thus permitting a support frame (14) to exercise a deflection in a direction orthogonal with respect to the movement of the intermediate frame (4).The bimorphs used consist of one or two piezoelectric elements carrying two or more electrodes on either side the proper actuation of which causes the benders to bend with parallel end surfaces at all times.
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公开(公告)号：BR8605250A
公开(公告)日：1987-07-28
申请号：BR8605250
申请日：1986-10-28
Applicant: IBM
Inventor： POHL WOLFGANG DIETER , GIMZEWSKI JAMES KAZIMIERZ , MURALT PAUL RENE
Abstract: The method involves the steps of lowering the magnetic head (8) to within aerodynamic distance from the surface (16) of a moving recording medium, enforced further lowering of the head (8) until a tunnel current occurs across the gap between head (8) and surface (16), and maintaining said tunnel current constant by using the deviations of the current from a predetermined value (which corresponds to a certain flying height).The apparatus comprises a tunnel electrode (9) forming an integral part of the head assembly which is attached to a distance control mechanism (5) permitting the positioning of the head assembly with a one-nanometer accuracy. The tunnel electrode (9) has a very slightly beveled shoulder (45, 47) ensuring early detection of asperities approaching the head while sitting on the surface (16) of the moving recording medium (3). Gradation of the potential between tunnel electrode (9) and surface (16) of the recording medium (3) is used to enhance the response to asperities.
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