Abstract:
PROBLEM TO BE SOLVED: To provide a UML design method by which architectural design seeking after an optimum design parameter can be performed while seeing through an entire system. SOLUTION: The UML design method uses a profile stored with design parameters to convert an object system into a UML model, and designs. The UML design method stores a stereotype and a value with a tag as the design parameters in the profile, annotates the stored stereotype and value with the tag for a UML model of the object system, associates the annotated stereotype and value with the tag to each class constituting the UML model, and displays the associated stereotype, value with the tag and UML model on a GUI (graphical user interface) screen. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a method for computing manufacturability of a lithographic mask to be used for fabricating a semiconductor device. SOLUTION: A set of a plurality of target edges is selected from mask layout data of a lithographic mask (402). Then, target edge pairs are selected from the selected set of target edges (404). The manufacturability of the lithographic mask, including the manufacturing penalty in making the lithographic mask, is computed based on the target edge pairs selected (406). The manufacturability of the lithographic mask is output (408). The manufacturability of the lithographic mask is dependent on the manufacturing penalty in making the lithographic mask. COPYRIGHT: (C)2010,JPO&INPIT