公开(公告)号：WO2009038838A3

公开(公告)日：2009-11-12

申请号：PCT/US2008066328

申请日：2008-06-09

Applicant: KLA TENCOR CORP ,  KULKARNI ASHOK ,  DUFFY BRIAN ,  MAAYAH KAIS ,  ROUSE GORDON ,  SHIFRIN EUGENE

Inventor： KULKARNI ASHOK ,  DUFFY BRIAN ,  MAAYAH KAIS ,  ROUSE GORDON ,  SHIFRIN EUGENE

IPC: G06T7/00

CPC classification number: G06F17/5045 ,  G06T7/0006 ,  G06T7/33 ,  G06T2207/30148 ,  H01L21/67005

Abstract: Various methods and systems for determining a position of inspection data in design data space are provided. One computer-implemented method includes determining a centroid of an alignment target formed on a wafer using an image of the alignment target acquired by imaging the wafer. The method also includes aligning the centroid to a centroid of a geometrical shape describing the alignment target. In addition, the method includes assigning a design data space position of the centroid of the alignment target as a position of the centroid of the geometrical shape in the design data space. The method further includes determining a position of inspection data acquired for the wafer in the design data space based on the design data space position of the centroid of the alignment target.

Abstract translation: 提供了用于确定设计数据空间中的检查数据的位置的各种方法和系统。 一种计算机实现的方法包括使用通过对晶片进行成像而获取的对准目标的图像来确定形成在晶片上的对准目标的质心。 该方法还包括将质心对准描述对准目标的几何形状的质心。 此外，该方法包括将对准目标的质心的设计数据空间位置指定为设计数据空间中几何形状的质心的位置。 该方法还包括基于对准目标的质心的设计数据空间位置确定在设计数据空间中为晶片获取的检查数据的位置。