公开(公告)号：KR20120071241A

公开(公告)日：2012-07-02

申请号：KR20100132907

申请日：2010-12-22

Applicant: KOREA ELECTRONICS TELECOMM

Inventor： CHOI BYOUNG GUN ,  KIM JUNG BUM ,  LIM IN GI ,  HYOUNG CHANG HEE ,  PARK HYUNG IL ,  PARK KYUNG HWAN ,  KANG TAE YOUNG ,  KIM SUNG EUN ,  HWANG JUNG HWAN ,  KANG TAE WOOK ,  KIM KYUNG SOO ,  KANG SUNG WEON

IPC: H01M14/00

CPC classification number: G21H1/06 ,  H01M14/00

Abstract: PURPOSE: A manufacturing method of a beta battery is provided to improve the efficiency per unit area with respect to the number of laminated PN joint, and to have a simple process in comparison with a pore-forming process using DRIE(deep reactive ion etching). CONSTITUTION: A manufacturing method of a beta battery: a step of forming an oxide mask(22) in which a predetermined pattern is formed on one side of a substrate(21); a step of forming a plurality of grooves by etching the region in which the oxide mask is not spread; a step of removing the oxide mask, and forming a PN joint layer on the substrate; a step of forming a first electrode on the PN joint layer, and a step of forming a second electrode on the other side of the substrate; and a step of forming a unit module by laminating a radioisotope layer emitting beta rays on the radioisotope layer of the PN joint layer.

Abstract translation: 目的：提供一种β电池的制造方法，以提高相对于层叠PN接头数量的每单位面积的效率，并且与使用DRIE（深反应离子蚀刻）的成孔过程相比，具有简单的工艺， 。 构成：β电池的制造方法：在基板（21）的一侧形成有规定图案的氧化物掩模（22）的工序。 通过蚀刻不扩散氧化物掩模的区域形成多个沟槽的步骤; 去除所述氧化物掩模的步骤，以及在所述衬底上形成PN接合层; 在PN接合层上形成第一电极的步骤，以及在所述基板的另一侧上形成第二电极的步骤; 以及通过层叠在PN关节层的放射性同位素层上发射β射线的放射性同位素层来形成单位模块的步骤。