A MICROELECTROMECHANICAL MAGNETOMETER
    12.
    发明申请
    A MICROELECTROMECHANICAL MAGNETOMETER 审中-公开
    微电子电磁力计

    公开(公告)号:WO2007047267A3

    公开(公告)日:2007-09-20

    申请号:PCT/US2006039551

    申请日:2006-10-10

    CPC classification number: G01R33/038 G01R33/0286

    Abstract: An apparatus comprising a substrate (125) and a MEM device (105) . The MEM includes a comb capacitor (110) and a magnetic element (117) physically connected to one electrode of the comb capacitor. The magnetic element is capable of moving the one electrode in a manner that alters a capacitance of the comb capacitor. The apparatus also includes at least one spring (130) physically connecting the magnetic element to the substrate.

    Abstract translation: 一种包括基板(125)和MEM装置(105)的装置。 MEM包括物理连接到梳状电容器的一个电极的梳状电容器(110)和磁性元件(117)。 磁性元件能够以改变梳状电容器的电容的方式移动一个电极。 该装置还包括将磁性元件物理连接到基底的至少一个弹簧(130)。

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