Abstract:
PROBLEM TO BE SOLVED: To provide a compact infrared sensor capable of highly accurately detecting the spatial distribution of a human body and other thermal objects.SOLUTION: A scanning type infrared sensor includes a fixed part 2, a first vibration part 3a having one end connected to the fixed part 2, and a movable part having a sensor part 4a connected to the other end of the first vibration part 3a. The first vibration part 3a includes a first lower electrode layer 7, a piezoelectric layer 8 formed on the first lower electrode layer 7, and a driving part 5a including a first upper electrode layer 9 formed on the piezoelectric layer 8. The driving part 5a performs scanning so as to rotate the sensor part 4a around the rotary shaft 10 of the driving part 5a, and accordingly the spatial distribution of thermal objects is measured.
Abstract:
PROBLEM TO BE SOLVED: To provide an optical reflection element capable of improving a resonance frequency of an operation mode which vibrates to a normal line direction of a movable plate without causing a reduction in amplitude in the rotation operation of the movable plate.SOLUTION: There is provided an optical reflection element which comprises: a first side 11a parallel to a first axis 18; a square external frame having a second side 11b parallel to a second axis 19 which is almost orthogonal to the first axis 18; a first drive part having a meander shape which extends from the inside of one first side 11a of the external frame and is provided with at least one or more piezoelectric actuators; a strip-shaped support beam extending from an approximately middle point of the inside of one first side 11a of the external frame to a direction of the second axis 19; and a movable plate 15 which is connected to the support beam 12 and the drive part and has a reflection surface at the central part.
Abstract:
PROBLEM TO BE SOLVED: To enlarge swing angle of a mirror part in an optical reflection element using a meandering oscillation part.SOLUTION: The optical reflection element 1 comprises a fixed frame 2, a pair of low-speed meandering oscillation parts 3 with their outer ends supported by portions facing with each other on the inside of the fixed frame 2, a movable frame 4 supported by each inner end of the low-speed meandering oscillation parts 3, a pair of high-speed meandering oscillation parts 5 with their inner ends supported by portions of the movable frame 4 on the inside orthogonal to the oscillation shaft of the low-speed meandering oscillation parts 3, and a mirror part 6 supporting inner ends of the high-speed meandering oscillation parts 5 so that the curvature of a curved part 7 of the high-speed meandering oscillation parts 5 is made smaller from the inner end side toward the outer end side.
Abstract:
PROBLEM TO BE SOLVED: To provide a highly accurate self-excited drive of an optical reflection element. SOLUTION: A first oscillator 10 and a second oscillator 12 are of meander types in which a plurality of oscillation plates 10A, 12A are connected so as to be turned back at turning parts 13, 14, respectively, the distance between adjacent oscillation plates 12A of the second oscillator 12 is broadened from the near part of the turned part 14 toward the turned part 14 of the oscillation plate 12A. In this present embodiment, the mutual interference of the driving oscillation of the first oscillator 10 and the noise oscillation θY of the second oscillator 12 is suppressed, the detection accuracy of a monitor element 22 of the first oscillator 10 is improved and highly accurate self-excited drive is enabled. COPYRIGHT: (C)2010,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To enhance the measuring precision of a cell electrophysiologic sensor. SOLUTION: The cell electrophysiologic sensor is equipped with a cylindrical part 8, the sensor chip 10 inserted in the cavity 9 of the cylindrical part 8 and the structure 11 arranged in the cavity 9 of the cylindrical part 8 so as to leave a predetermined interval apart from the sensor chip 10 and jointed to or integrated with the inner wall of the cylindrical part 8. The sensor chip 10 has the continuity hole 15 piercing the cylindrical part 8 in an axial direction. The structure 11 has a through-hole 16 axially piercing the cylindrical part 8 and having the opening part on the side of the sensor chip 10 as the outlet 16A and the outlet 16A of the through-hole 16 is opposed to the continuity hole 15 of the sensor chip 10 while the space formed between the structure 11 and the inner wall of the cylindrical part 8 is provided to the outer periphery of the outlet 16A of the through-hole 16. By this constitution, air bubbles in the vicinity of the continuity hole 14 are reduced and, as a result, the measuring precision of the cell electrophysiologic sensor is enhanced. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a sensor chip for securely adsorbing or trapping a spherical substance, such as a particle or a cell, and also to provide a sensor device using the same. SOLUTION: The sensor chip is equipped with a sheet and a frame body to support the periphery of the sheet, in which the sheet has at least a through-hole to penetrate a first surface and a second surface facing the first surface and a recess continuously provided from the through-hole has a diameter greater than the bore diameter of the through-hole and a narrow-down portion on the first surface side. The structure provides a sensor chip improving the adhesiveness between the spherical substance, such as an particle and a cell, and the recess. COPYRIGHT: (C)2011,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To suppress damage of an optical reflection element. SOLUTION: The optical reflection element includes: a mirror part 1, a movable frame 3 that is connected to a mirror part 1 via a first beam 2 and surrounds the outer periphery of the first beam 2 and the mirror part 1; a support body 5 connected to the movable frame 3 via a second beam 4; a driving means for repetitively rotating and vibrating the mirror part 1 around each of the center axes of the first beam 2 and the second beam 4; and a suppressing means for suppressing vibration of at least one of the X-axis direction and Y-axis direction of the movable frame 3. Thus, excessive amplitude of the movable frame 3 can be suppressed, and the damage of the optical reflection element can be suppressed. COPYRIGHT: (C)2010,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To achieve a highly accurate self-excited driving of an optical reflection element. SOLUTION: The optical reflection element includes an oscillator 10 connected to a mirror part 9, wherein the oscillator 10 has drive elements 16 and monitor elements 17 which separated by the separation grooves 30A and disposed on an insulation layer 20 formed on a base material 19, the lower electrode layers 21 of the drive elements 16 and monitor elements 17 are connected to a common external electrode, the shortest conductive path between the lower electrode layers 21 of the monitor elements 17 and the lower electrode layers 21 of the drive elements 16 is made longer than the distance between the lower electrode layers 21 of the monitor elements 17 and the common external electrode by the separation grooves 30A at an arbitrary point at which the monitor elements 17 and the drive elements 16 are adjacently disposed. Thus the detection accuracy of the monitor elements 17 is improved and the optical reflecting element 8 is highly accurately self-excited driven. COPYRIGHT: (C)2010,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide an actuator which has an improved operation accuracy. SOLUTION: The actuator is provided with a frame body 17 having a hole 16 on a surface, a transmission electrode portion 18 arranged on an upper side of the hole 16, and a driving portion 20 of which the one end is connected with both ends of the transmission electrode portion 18 and the other end is supported by the frame body 17. The driving portion 20 is composed of a lower metallic layer 21, a piezo-electric film 22 formed on the metallic layer 21, an upper metallic layer formed on the piezo-electric film 22, and an elastic resin layer laminated on the upper metallic layer 23. Since the transmission electrode portion is prevented from being inclined and an effect on a displacement degree of an entire driving portion 20 can be made small even if a surface layer is corroded in an etching process, the operation accuracy of the actuator can be improved. COPYRIGHT: (C)2009,JPO&INPIT