光学反射素子
    11.
    发明专利
    光学反射素子 审中-公开
    光学反射元件

    公开(公告)号:JP2014202801A

    公开(公告)日:2014-10-27

    申请号:JP2013076558

    申请日:2013-04-02

    Abstract: 【課題】反射部の動的撓みを低減し、小型化した光学反射素子を提供する。【解決手段】固定部22と、固定部22の他端と接続された第1の振動部材24aと、第1の振動部材24aと対向する方向に接続された第2の振動部材24bと、第1、第2の振動部材24a、24bに回動可能に接続された反射部26を有し、第1の振動部材24aは固定部22と接続された第1の振動部23aと、反射部26と第1の振動部23aとの間に位置し第1の振動部23aとは異なる方向に延在した第2の振動部23bにより構成され、第2の振動部材24bは固定部22と接続された第3の振動部23cと、反射部26と第3の振動部23cとの間に位置し第3の振動部23cとは異なる方向に延在した第4の振動部23dにより構成され、第2の振動部23bのばね定数が第1の振動部23aのばね定数よりも低く第4の振動部23dのばね定数が第3の振動部23cよりも低い構成とした。【選択図】図1

    Abstract translation: 要解决的问题:提供能够减少反射部分的动态偏转的小尺寸光学反射元件。解决方案:光学反射元件包括:固定部分22; 与固定部22的另一端连接的第一振动部件24a; 第二振动构件24b,其在与第一振动构件24a相反的方向上连接; 以及连接到第一和第二振动件24a和24b以便旋转的反射部分26。 第一振动部件24a包括:与固定部22连接的第一振动部23a; 位于反射部26和第一振动部23a之间并沿与第一振动部23a的方向不同的方向延伸的第二振动部23b。 第二振动部件24b包括:与固定部22连接的第三振动部23c; 以及位于反射部26和第三振动部23c之间并沿与第三振动部23c的方向不同的方向延伸的第四振动部23d。 第二振动部23b的弹簧常数被设定为小于第一振动部23a的弹簧常数,第四振动部23d的弹簧常数被设定为小于第三振动部23c的弹簧常数 。

    Scanning type infrared sensor
    12.
    发明专利
    Scanning type infrared sensor 审中-公开
    扫描型红外传感器

    公开(公告)号:JP2014006078A

    公开(公告)日:2014-01-16

    申请号:JP2012140075

    申请日:2012-06-21

    Abstract: PROBLEM TO BE SOLVED: To provide a compact infrared sensor capable of highly accurately detecting the spatial distribution of a human body and other thermal objects.SOLUTION: A scanning type infrared sensor includes a fixed part 2, a first vibration part 3a having one end connected to the fixed part 2, and a movable part having a sensor part 4a connected to the other end of the first vibration part 3a. The first vibration part 3a includes a first lower electrode layer 7, a piezoelectric layer 8 formed on the first lower electrode layer 7, and a driving part 5a including a first upper electrode layer 9 formed on the piezoelectric layer 8. The driving part 5a performs scanning so as to rotate the sensor part 4a around the rotary shaft 10 of the driving part 5a, and accordingly the spatial distribution of thermal objects is measured.

    Abstract translation: 要解决的问题:提供能够高精度地检测人体和其他热物体的空间分布的小型红外传感器。解决方案:扫描型红外传感器包括固定部分2,第一振动部分3a,其一端连接 固定部分2和可移动部分,其具有连接到第一振动部分3a的另一端的传感器部分4a。 第一振动部分3a包括第一下电极层7,形成在第一下电极层7上的压电层8和包括形成在压电层8上的第一上电极层9的驱动部分5a。驱动部分5a执行 扫描以使传感器部分4a围绕驱动部分5a的旋转轴10旋转,并且因此测量热物体的空间分布。

    Optical reflection element
    13.
    发明专利
    Optical reflection element 审中-公开
    光学反射元件

    公开(公告)号:JP2013186224A

    公开(公告)日:2013-09-19

    申请号:JP2012050043

    申请日:2012-03-07

    Abstract: PROBLEM TO BE SOLVED: To provide an optical reflection element capable of improving a resonance frequency of an operation mode which vibrates to a normal line direction of a movable plate without causing a reduction in amplitude in the rotation operation of the movable plate.SOLUTION: There is provided an optical reflection element which comprises: a first side 11a parallel to a first axis 18; a square external frame having a second side 11b parallel to a second axis 19 which is almost orthogonal to the first axis 18; a first drive part having a meander shape which extends from the inside of one first side 11a of the external frame and is provided with at least one or more piezoelectric actuators; a strip-shaped support beam extending from an approximately middle point of the inside of one first side 11a of the external frame to a direction of the second axis 19; and a movable plate 15 which is connected to the support beam 12 and the drive part and has a reflection surface at the central part.

    Abstract translation: 要解决的问题:提供一种能够改善振动到可移动板的法线方向的操作模式的共振频率而不会导致可移动板的旋转操作中的振幅减小的光反射元件。解决方案:有 提供了一种光反射元件,其包括:平行于第一轴线18的第一侧11a; 一个正方形的外部框架,具有平行于与第一轴线18几乎正交的第二轴线19的第二侧面11b; 第一驱动部分,具有从外框架的一个第一侧面11a的内侧延伸的弯曲形状,并设置有至少一个或多个压电致动器; 从所述外框架的一个第一侧面11a的内侧的大致中点到所述第二轴线19的方向延伸的带状支撑梁; 以及连接到支撑梁12和驱动部分并且在中心部分具有反射表面的可动板15。

    Optical reflection element
    14.
    发明专利
    Optical reflection element 有权
    光学反射元件

    公开(公告)号:JP2011209583A

    公开(公告)日:2011-10-20

    申请号:JP2010078443

    申请日:2010-03-30

    CPC classification number: G02B26/0858 G02B26/08 G02B26/0841 G02B26/085

    Abstract: PROBLEM TO BE SOLVED: To enlarge swing angle of a mirror part in an optical reflection element using a meandering oscillation part.SOLUTION: The optical reflection element 1 comprises a fixed frame 2, a pair of low-speed meandering oscillation parts 3 with their outer ends supported by portions facing with each other on the inside of the fixed frame 2, a movable frame 4 supported by each inner end of the low-speed meandering oscillation parts 3, a pair of high-speed meandering oscillation parts 5 with their inner ends supported by portions of the movable frame 4 on the inside orthogonal to the oscillation shaft of the low-speed meandering oscillation parts 3, and a mirror part 6 supporting inner ends of the high-speed meandering oscillation parts 5 so that the curvature of a curved part 7 of the high-speed meandering oscillation parts 5 is made smaller from the inner end side toward the outer end side.

    Abstract translation: 要解决的问题:使用蜿蜒的振荡部分来增大光学反射元件中的镜部的摆动角度。解决方案:光学反射元件1包括固定框架2,一对低速蜿蜒的摆动部分3,其外部 由固定框架2的内侧彼此面对的端部支撑的端部,由低速曲折振动部3的每个内端支撑的可动框架4,一对高速曲折摆动部5,其内端 由可动框架4的与低速蜿蜒振荡部件3的振动轴正交的内侧的支撑部分支撑,以及支撑高速曲折振荡部分5的内端的反射镜部分6, 使高速蜿蜒摆动部5的第7部分从内侧端部朝向外侧端部较小。

    Optical reflection element
    15.
    发明专利
    Optical reflection element 审中-公开
    光学反射元件

    公开(公告)号:JP2010122413A

    公开(公告)日:2010-06-03

    申请号:JP2008295216

    申请日:2008-11-19

    Abstract: PROBLEM TO BE SOLVED: To provide a highly accurate self-excited drive of an optical reflection element.
    SOLUTION: A first oscillator 10 and a second oscillator 12 are of meander types in which a plurality of oscillation plates 10A, 12A are connected so as to be turned back at turning parts 13, 14, respectively, the distance between adjacent oscillation plates 12A of the second oscillator 12 is broadened from the near part of the turned part 14 toward the turned part 14 of the oscillation plate 12A. In this present embodiment, the mutual interference of the driving oscillation of the first oscillator 10 and the noise oscillation θY of the second oscillator 12 is suppressed, the detection accuracy of a monitor element 22 of the first oscillator 10 is improved and highly accurate self-excited drive is enabled.
    COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题:提供光学反射元件的高精度自激驱动。 解决方案:第一振荡器10和第二振荡器12是曲折类型,其中多个振荡板10A,12A分别连接成在转向部分13,14处回转,相邻振荡之间的距离 第二振荡器12的板12A从转动部件14的近部朝向振动板12A的转动部分14变宽。 在本实施例中,抑制了第一振荡器10的驱动振荡和第二振荡器12的噪声振荡θY的相互干扰,提高了第一振荡器10的监视元件22的检测精度, 激励驱动器启用。 版权所有(C)2010,JPO&INPIT

    Device for cell electrophysiologic sensor and cell electrophysiologic sensor using it
    16.
    发明专利
    Device for cell electrophysiologic sensor and cell electrophysiologic sensor using it 有权
    细胞电生理传感器和细胞电生理学传感器的设备

    公开(公告)号:JP2009020033A

    公开(公告)日:2009-01-29

    申请号:JP2007183973

    申请日:2007-07-13

    Abstract: PROBLEM TO BE SOLVED: To enhance the measuring precision of a cell electrophysiologic sensor. SOLUTION: The cell electrophysiologic sensor is equipped with a cylindrical part 8, the sensor chip 10 inserted in the cavity 9 of the cylindrical part 8 and the structure 11 arranged in the cavity 9 of the cylindrical part 8 so as to leave a predetermined interval apart from the sensor chip 10 and jointed to or integrated with the inner wall of the cylindrical part 8. The sensor chip 10 has the continuity hole 15 piercing the cylindrical part 8 in an axial direction. The structure 11 has a through-hole 16 axially piercing the cylindrical part 8 and having the opening part on the side of the sensor chip 10 as the outlet 16A and the outlet 16A of the through-hole 16 is opposed to the continuity hole 15 of the sensor chip 10 while the space formed between the structure 11 and the inner wall of the cylindrical part 8 is provided to the outer periphery of the outlet 16A of the through-hole 16. By this constitution, air bubbles in the vicinity of the continuity hole 14 are reduced and, as a result, the measuring precision of the cell electrophysiologic sensor is enhanced. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提高细胞电生理传感器的测量精度。 解决方案:细胞电生理传感器配备有圆柱形部分8,传感器芯片10插入圆柱形部分8的空腔9中,结构11布置在圆柱形部分8的空腔9中,以便留下一个 与传感器芯片10隔开预定间隔并与圆筒形部分8的内壁连接或整合在一起。传感器芯片10具有沿轴向方向刺穿圆柱形部分8的连续孔15。 结构11具有贯通孔16,该通孔16轴向穿透圆筒部8,并且在传感器芯片10的一侧具有作为出口16A的开口部,并且通孔16的出口16A与导通孔15的连续孔15相对 传感器芯片10在形成在结构体11与圆筒部8的内壁之间的空间的同时,设置在贯通孔16的出口16A的外周。通过这种结构,气泡在连续性附近 孔14被减少,结果提高了细胞电生理传感器的测量精度。 版权所有(C)2009,JPO&INPIT

    Sensor chip and sensor device using the same
    17.
    发明专利
    Sensor chip and sensor device using the same 审中-公开
    传感器芯片和使用该传感器的传感器设备

    公开(公告)号:JP2011112594A

    公开(公告)日:2011-06-09

    申请号:JP2009271379

    申请日:2009-11-30

    Abstract: PROBLEM TO BE SOLVED: To provide a sensor chip for securely adsorbing or trapping a spherical substance, such as a particle or a cell, and also to provide a sensor device using the same. SOLUTION: The sensor chip is equipped with a sheet and a frame body to support the periphery of the sheet, in which the sheet has at least a through-hole to penetrate a first surface and a second surface facing the first surface and a recess continuously provided from the through-hole has a diameter greater than the bore diameter of the through-hole and a narrow-down portion on the first surface side. The structure provides a sensor chip improving the adhesiveness between the spherical substance, such as an particle and a cell, and the recess. COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题:提供用于可靠地吸附或捕获诸如颗粒或电池的球形物质的传感器芯片,并且还提供使用该传感器芯片的传感器装置。 解决方案:传感器芯片配备有片材和框架体,以支撑片材的周边,其中片材具有至少一个通孔以穿透第一表面和面向第一表面的第二表面, 从通孔连续设置的凹部的直径大于通孔的孔径和第一表面侧的缩小部分。 该结构提供了改善诸如颗粒和电池的球形物质与凹部之间的粘合性的传感器芯片。 版权所有(C)2011,JPO&INPIT

    Optical reflection element
    18.
    发明专利
    Optical reflection element 审中-公开
    光学反射元件

    公开(公告)号:JP2010197662A

    公开(公告)日:2010-09-09

    申请号:JP2009041943

    申请日:2009-02-25

    Abstract: PROBLEM TO BE SOLVED: To suppress damage of an optical reflection element. SOLUTION: The optical reflection element includes: a mirror part 1, a movable frame 3 that is connected to a mirror part 1 via a first beam 2 and surrounds the outer periphery of the first beam 2 and the mirror part 1; a support body 5 connected to the movable frame 3 via a second beam 4; a driving means for repetitively rotating and vibrating the mirror part 1 around each of the center axes of the first beam 2 and the second beam 4; and a suppressing means for suppressing vibration of at least one of the X-axis direction and Y-axis direction of the movable frame 3. Thus, excessive amplitude of the movable frame 3 can be suppressed, and the damage of the optical reflection element can be suppressed. COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题:抑制光反射元件的损伤。 光反射元件包括:反射镜部分1,可移动框架3,其通过第一光束2连接到反射镜部分1并且围绕第一光束2和反射镜部分1的外周; 通过第二光束4连接到可动框架3的支撑体5; 围绕第一光束2和第二光束4的每个中心轴重复旋转和振动反射镜部分1的驱动装置; 以及用于抑制可动框架3的X轴方向和Y轴方向中的至少一个的振动的抑制装置。因此,可以抑制可动框架3的过大的振幅,并且光反射元件的损坏 被压制 版权所有(C)2010,JPO&INPIT

    Optical reflection element
    19.
    发明专利
    Optical reflection element 有权
    光学反射元件

    公开(公告)号:JP2010122480A

    公开(公告)日:2010-06-03

    申请号:JP2008296354

    申请日:2008-11-20

    CPC classification number: G02B26/0858 G02B26/101

    Abstract: PROBLEM TO BE SOLVED: To achieve a highly accurate self-excited driving of an optical reflection element.
    SOLUTION: The optical reflection element includes an oscillator 10 connected to a mirror part 9, wherein the oscillator 10 has drive elements 16 and monitor elements 17 which separated by the separation grooves 30A and disposed on an insulation layer 20 formed on a base material 19, the lower electrode layers 21 of the drive elements 16 and monitor elements 17 are connected to a common external electrode, the shortest conductive path between the lower electrode layers 21 of the monitor elements 17 and the lower electrode layers 21 of the drive elements 16 is made longer than the distance between the lower electrode layers 21 of the monitor elements 17 and the common external electrode by the separation grooves 30A at an arbitrary point at which the monitor elements 17 and the drive elements 16 are adjacently disposed. Thus the detection accuracy of the monitor elements 17 is improved and the optical reflecting element 8 is highly accurately self-excited driven.
    COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题:实现光反射元件的高精度自激驱动。 解决方案:光反射元件包括连接到反射镜部分9的振荡器10,其中振荡器10具有驱动元件16和监测元件17,该元件被隔离槽30A分隔并设置在形成在基座上的绝缘层20上 材料19中,驱动元件16的下电极层21和监视元件17连接到公共外部电极,监视元件17的下电极层21和驱动元件的下电极层21之间的最短导电路径 在监视器元件17和驱动元件16相邻设置的任意点,被制成长于监视元件17的下部电极层21与公共外部电极之间的距离。 因此,监视器元件17的检测精度得到改善,并且光学反射元件8被高度精确地自激驱动。 版权所有(C)2010,JPO&INPIT

    Actuator, and manufacturing method thereof
    20.
    发明专利
    Actuator, and manufacturing method thereof 审中-公开
    执行机构及其制造方法

    公开(公告)号:JP2009193804A

    公开(公告)日:2009-08-27

    申请号:JP2008032850

    申请日:2008-02-14

    Inventor: HIRAOKA SOICHIRO

    Abstract: PROBLEM TO BE SOLVED: To provide an actuator which has an improved operation accuracy. SOLUTION: The actuator is provided with a frame body 17 having a hole 16 on a surface, a transmission electrode portion 18 arranged on an upper side of the hole 16, and a driving portion 20 of which the one end is connected with both ends of the transmission electrode portion 18 and the other end is supported by the frame body 17. The driving portion 20 is composed of a lower metallic layer 21, a piezo-electric film 22 formed on the metallic layer 21, an upper metallic layer formed on the piezo-electric film 22, and an elastic resin layer laminated on the upper metallic layer 23. Since the transmission electrode portion is prevented from being inclined and an effect on a displacement degree of an entire driving portion 20 can be made small even if a surface layer is corroded in an etching process, the operation accuracy of the actuator can be improved. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供具有改进的操作精度的致动器。 解决方案:致动器设置有在表面上具有孔16的框架体17,布置在孔16的上侧的传输电极部分18和一端与其连接的驱动部分20 传输电极部分18的两端和另一端由框体17支撑。驱动部分20由下金属层21,形成在金属层21上的压电膜22,上金属层 形成在压电膜22上的弹性树脂层和层压在上金属层23上的弹性树脂层。由于防止透射电极部倾斜,并且能够使整个驱动部20的位移程度的影响甚至小 如果在蚀刻工艺中表面层被腐蚀,则可以提高致动器的操作精度。 版权所有(C)2009,JPO&INPIT

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