Film thickness measuring method and film thickness measuring apparatus
    16.
    发明专利
    Film thickness measuring method and film thickness measuring apparatus 审中-公开
    薄膜厚度测量方法和薄膜厚度测量装置

    公开(公告)号:JP2011237355A

    公开(公告)日:2011-11-24

    申请号:JP2010110750

    申请日:2010-05-13

    Inventor: SHIOKAWA AKIRA

    Abstract: PROBLEM TO BE SOLVED: To accurately measure a film thickness of a film to be measured which is formed on a substrate having a small difference in refraction factor with respect to the film to be measured.SOLUTION: A film thickness measuring apparatus includes a light source 42 for irradiating a surface of a protection film 16, which is a film to be measured, with pulse light 41 at an incident angle of 45 degrees or greater, a spectrometer 44 for dispersing interference light generated by surface reflection light reflected at a surface and interface reflection light reflected at an interface between a dielectric layer 15 and the protection layer 16, a separator 47 for separating signals from the light source 42 from noise due to disturbance light based on information on phase and cycles of pulse light 41, and a light detector 46 for detecting light dispersed by the spectrometer 44.

    Abstract translation: 要解决的问题:为了精确测量形成在相对于待测膜的折射系数差的基板上的被测定膜的膜厚。 < P>解决方案:一种膜厚测量装置,包括用于以45度或更大入射角度的脉冲光41照射作为被测量膜的保护膜16的表面的光源42,光谱仪44 为了分散由在表面反射的表面反射光产生的干涉光和在电介质层15和保护层16之间的界面处反射的界面反射光,用于将来自光源42的信号与由于基于干扰光的噪声分离的分离器47 关于脉冲光41的相位和周期的信息,以及用于检测由光谱仪44分散的光的光检测器46.(C)2012年,JPO和INPIT

    Method of manufacturing plasma display panel
    17.
    发明专利
    Method of manufacturing plasma display panel 审中-公开
    制造等离子显示面板的方法

    公开(公告)号:JP2009218131A

    公开(公告)日:2009-09-24

    申请号:JP2008062160

    申请日:2008-03-12

    CPC classification number: H01J9/02 H01J11/12 H01J11/40

    Abstract: PROBLEM TO BE SOLVED: To achieve a plasma display panel having display performance of high definition and high luminance, and low power consumption.
    SOLUTION: The plasma display panel has a front plate in which a dielectric layer is formed to cover display electrodes formed on a substrate and a protective layer is formed on the dielectric layer. After depositing a base film on the dielectric layer, crystal grain paste film is formed by applying crystal grain paste obtained by dissipating a plurality of crystal grains made of metal oxide onto the base film, the base film and the crystal grain paste are then sintered, and a plurality of the crystal grains are made to adhere to the base film over its whole surface to form the protective layer. The crystal grain paste is one having viscosity within a range of 1-30 Pa s at a shear rate of 1.0 s
    -1 .
    COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:实现具有高清晰度和高亮度以及低功耗的显示性能的等离子体显示面板。 解决方案:等离子体显示面板具有前板,其中形成介电层以覆盖形成在基板上的显示电极,并且在电介质层上形成保护层。 在电介质层上沉积基膜之后,通过将通过将由金属氧化物制成的多个晶粒散发而获得的晶粒糊施加到基膜上,然后烧结基底膜和晶粒糊,形成晶粒糊状膜, 并且使多个晶粒在其整个表面上附着到基膜上以形成保护层。 晶粒糊是在1.0s -1的剪切速率下具有在1-30Pa s范围内的粘度的。 版权所有(C)2009,JPO&INPIT

    Plasma display panel
    18.
    发明专利
    Plasma display panel 审中-公开
    等离子显示面板

    公开(公告)号:JP2009211864A

    公开(公告)日:2009-09-17

    申请号:JP2008051778

    申请日:2008-03-03

    CPC classification number: H01J11/38 H01J11/12 H01J11/40

    Abstract: PROBLEM TO BE SOLVED: To realize a plasma display panel equipped with display performance of high definition and high luminance, as well as, with low power consumption.
    SOLUTION: The plasma display panel is provided with a front plate 2, with a dielectric layer 8 formed so as to cover display electrodes 6 formed on a front glass substrate 3, as well as, a protective layer 9 formed on the dielectric layer 8; and a rear-face plate arranged in opposition to the front plate 2 so as to form a discharge space, with address electrodes formed in a direction crossing the display electrodes as well as barrier ribs formed for zoning the discharge space above. The dielectric layer 8 of the front plate contains bismuth oxide, as well as, calcium oxide but not lead; and further, the protective layer 9 on the dielectric layer 8 has a base-layer film 91, formed on the dielectric layer 8, and at the same time, the base-layer film 91 has agglomerated particles 92 with a plurality of pieces of crystal particles made of metal oxide agglomerated adhered to it to be distributed all over the surface.
    COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:实现具有高清晰度和高亮度的显示性能以及低功耗的等离子体显示面板。 解决方案:等离子体显示面板设置有前板2,其具有形成为覆盖形成在前玻璃基板3上的显示电极6的电介质层8以及形成在电介质上的保护层9 第8层; 以及与前板2相对布置的后面板,以形成放电空间,其中寻址电极形成在与显示电极交叉的方向上,以及为形成上述放电空间而形成的阻挡肋。 前板的电介质层8含有氧化铋以及氧化钙而不是铅; 此外,电介质层8上的保护层9具有形成在电介质层8上的基底膜91,同时基底膜91具有多个结晶的聚集粒子92 由金属氧化物制成的颗粒附着在其上以分布在整个表面上。 版权所有(C)2009,JPO&INPIT

    Plasma display panel
    19.
    发明专利
    Plasma display panel 审中-公开
    等离子显示面板

    公开(公告)号:JP2009129619A

    公开(公告)日:2009-06-11

    申请号:JP2007301495

    申请日:2007-11-21

    CPC classification number: H01J11/12 H01J11/40

    Abstract: PROBLEM TO BE SOLVED: To achieve a plasma display panel that has high-definition/high-brightness display performance and low power consumption. SOLUTION: The plasma display panel has a front plate 2, wherein a dielectric layer 8 is formed so as to cover each display electrode 6 formed on a front glass substrate 3 while a protective layer 9 is formed on the dielectric layer 8, and a back plate which is arranged oppositely to the front plate 2 so as to form a discharge space therebetween and on which each address electrode is formed in a direction intersecting with each display electrode while each partition wall is provided so as to partition the discharge space. The protective layer 9 is composed by forming a base film 91 on the dielectric layer 8 and adhering agglomerated particles 92, wherein a plurality of crystal particles composed of a metal oxide are agglomerated, to the base film 91 in such a manner that the agglomerated particles are distributed over the whole face of the base film. The crystal particle is a polyhedron having seven or more crystal faces. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:实现具有高清晰度/高亮度显示性能和低功耗的等离子体显示面板。 解决方案:等离子体显示面板具有前板2,其中形成电介质层8,以覆盖形成在前玻璃基板3上的每个显示电极6,同时在电介质层8上形成保护层9, 以及与前板2相对设置以在其间形成放电空间的背板,并且每个寻址电极在与每个显示电极相交的方向上形成,同时设置每个分隔壁以分隔放电空间 。 保护层9通过在电介质层8上形成基膜91,并且将由金属氧化物构成的多个结晶粒子聚集在一起的凝集粒子92附着在基膜91上,使得附聚粒子 分布在基膜的整个面上。 晶体颗粒是具有七个或更多个晶面的多面体。 版权所有(C)2009,JPO&INPIT

    Method for manufacturing plasma display panel
    20.
    发明专利
    Method for manufacturing plasma display panel 审中-公开
    制造等离子显示面板的方法

    公开(公告)号:JP2011165534A

    公开(公告)日:2011-08-25

    申请号:JP2010028463

    申请日:2010-02-12

    Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a plasma display panel, the method for stably manufacturing the high quality plasma display panel, because a protective film which has sputtering resistance and is excellent on secondary electron emission characteristics, is stably manufactured.
    SOLUTION: In a step of the method of depositing the protective film 14 on a glass substrate 11, vacuum evacuation for evacuating a film-deposition chamber 32 is carried out. In a step of preliminarily heating the glass substrate 11, while controlling a temperature of a cryo-panel at 50-80 K and performing vacuum evacuation by using the cryo-panel, a gas similar to a gas introduced into the film-deposition chamber 32 is introduced to a preliminary heating chamber 31 until the pressure of the gas becomes equal to that in the film-deposition chamber 32.
    COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题为了提供一种等离子体显示面板的制造方法,由于具有耐溅射性且对二次电子发射特性优异的保护膜,因此稳定地制造高质量的等离子体显示面板的方法是稳定的 制造。 解决方案:在将保护膜14沉积在玻璃基板11上的方法的步骤中,进行用于抽真空成膜室32的真空排气。 在预先加热玻璃基板11的步骤中,在将冷冻面板的温度控制在50〜80K的同时,使用冷冻面板进行真空排气的同时,将与导入成膜室32的气体类似的气体 直到气体的压力等于成膜室32中的压力。(C)2011年,JPO&INPIT

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