Solid-state image sensor, method of manufacturing solid-state image sensor, and electronic device
    11.
    发明专利
    Solid-state image sensor, method of manufacturing solid-state image sensor, and electronic device 有权
    固态图像传感器,制造固态图像传感器的方法和电子设备

    公开(公告)号:JP2014168098A

    公开(公告)日:2014-09-11

    申请号:JP2014103003

    申请日:2014-05-19

    Abstract: PROBLEM TO BE SOLVED: To provide a solid-state image sensor which is capable of suppressing surface defects caused by a film stress difference at an interface of each layer and is excellent in condensing characteristics.SOLUTION: The solid-state image sensor comprises: a photoelectric conversion part 12 formed in a semiconductor substrate 11; light transmission insulating layers 17 and 18; a first flattening layer 19; a color filter 20 having a step on its surface; a second flattening layer 21 made of an organic material; a stress relaxation layer 22; a microlens layer 23 made of an inorganic material; and a transparent resin layer 24. The film stresses of the microlens layer 23, the stress relaxation layer 22, and the second flattening layer 21 satisfy a relation of (the film stress of the microlens layer 23)>(the film stress of the stress relaxation layer 22)>(the film stress of the second flattening layer 21). The refractive index of the transparent resin layer 24 is smaller than that of the microlens layer 23.

    Abstract translation: 要解决的问题:提供一种固态图像传感器,其能够抑制由各层的界面处的膜应力差引起的表面缺陷,并且具有优异的冷凝特性。解决方案:固态图像传感器包括: 形成在半导体基板11中的光电转换部12; 光透射绝缘层17和18; 第一平坦化层19; 在其表面上具有台阶的滤色器20; 由有机材料制成的第二扁平层21; 应力松弛层22; 由无机材料制成的微透镜层23; 和透明树脂层24.微透镜层23,应力松弛层22和第二平坦化层21的膜应力满足(微透镜层23的膜应力)>(应力的膜应力 松弛层22)>(第二平坦化层21的膜应力)。 透明树脂层24的折射率小于微透镜层23的折射率。

    Imaging apparatus and camera module
    12.
    发明专利
    Imaging apparatus and camera module 有权
    成像设备和摄像机模块

    公开(公告)号:JP2012175461A

    公开(公告)日:2012-09-10

    申请号:JP2011036337

    申请日:2011-02-22

    Abstract: PROBLEM TO BE SOLVED: To provide an imaging apparatus and a camera module capable of obtaining a high-quality image in which flare light is not conspicuous even when a bright light source enters a field of view, by suppressing occurrence of the flare light.SOLUTION: The imaging apparatus and the camera module are each provided with: an optical sensor 110 which comprises a light-receiving part 112 capable of forming a subject image; a sealant 120 for protecting the light-receiving part 112-side of the optical sensor; an intermediate layer 130 transmitting light, which is formed at least between the light-receiving part 112 and the light-receiving part 112-side surface 121 of the sealant 120; and a control film 140 which is disposed between the intermediate layer 130 and the surface 121 of the sealant 120. The control film 140 functions to shift a cutoff wavelength toward a shortwave side according to the incident angle of light entering the film obliquely.

    Abstract translation: 要解决的问题:提供一种能够获得即使在明亮的光源进入视场时也不显眼的高质量图像的成像装置和照相机模块,通过抑制耀斑的发生 光。 成像装置和相机模块各自设置有:光学传感器110,其包括能够形成被摄体图像的光接收部112; 用于保护光学传感器的光接收部分112侧的密封剂120; 形成在密封剂120的光接收部112和受光部112侧面121之间的至少中间层的中间层130; 以及设置在中间层130和密封剂120的表面121之间的控制膜140.控制膜140用于根据入射到膜的光的入射角倾斜地将截止波长朝向短波侧移动。 版权所有(C)2012,JPO&INPIT

    Solid-state image pickup device and its manufacturing method, and image pickup device
    15.
    发明专利
    Solid-state image pickup device and its manufacturing method, and image pickup device 审中-公开
    固态图像拾取装置及其制造方法和图像拾取装置

    公开(公告)号:JP2008177318A

    公开(公告)日:2008-07-31

    申请号:JP2007008793

    申请日:2007-01-18

    Inventor: MAEDA KENSAKU

    Abstract: PROBLEM TO BE SOLVED: To solve the problem of discoloration by dispersing a singlet oxygen quencher in a color filter without deteriorating lithography characteristics when the color filter is formed. SOLUTION: A solid-state image pickup device has a plurality of pixel parts respectively having a photoelectric conversion part 21 for converting an incident light amount into an electrical signal, a dye-based color filter 31 formed on the light incident side of each pixel part, and organic films 41, 42 that are formed in contact with the color filter 31 while including a singlet oxygen quencher. The singlet oxygen quencher is dispersed in the color filter 31. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 解决问题:通过在形成滤色器的同时将单线态氧淬灭剂分散在滤色器中而不劣化光刻特性来解决变色的问题。 解决方案:固态摄像装置具有多个像素部分,分别具有用于将入射光量转换成电信号的光电转换部分21,形成在光入射侧的染料基滤色器31 每个像素部分以及与滤色器31接触形成同时包含单线态氧猝灭剂的有机膜41,42。 单重氧化猝灭剂分散在滤色器31中。版权所有(C)2008,JPO&INPIT

    Solid-state image pickup device, process of manufacturing the same, and electronic apparatus
    16.
    发明专利
    Solid-state image pickup device, process of manufacturing the same, and electronic apparatus 审中-公开
    固态图像拾取装置,其制造方法和电子装置

    公开(公告)号:JP2013182906A

    公开(公告)日:2013-09-12

    申请号:JP2012043654

    申请日:2012-02-29

    Inventor: MAEDA KENSAKU

    Abstract: PROBLEM TO BE SOLVED: To provide a solid-state image pickup device capable of achieving both sensitivity characteristics and color mixture characteristics.SOLUTION: By exposing a portion that forms a light-shielding film of a base film 15 containing an optical oxide generating agent, acid is generated, and by reacting the acid with a film having a black dye thereon, a light-shielding film 16 Is formed at pixel corners of a pixel portion and a boundary of adjacent pixels.

    Abstract translation: 要解决的问题:提供能够实现灵敏度特性和混色特性的固态摄像装置。解决方案:通过暴露形成含有光氧化物发生剂的基膜15的遮光膜的部分, 产生酸,并且通过使酸与其上具有黑色染料的膜反应,在像素部分的像素角和相邻像素的边界处形成遮光膜16 Is。

    Solid-state imaging device, manufacturing method of solid-state imaging device, and electronic apparatus
    17.
    发明专利
    Solid-state imaging device, manufacturing method of solid-state imaging device, and electronic apparatus 审中-公开
    固态成像装置,固态成像装置的制造方法和电子装置

    公开(公告)号:JP2013021168A

    公开(公告)日:2013-01-31

    申请号:JP2011153913

    申请日:2011-07-12

    Abstract: PROBLEM TO BE SOLVED: To provide a solid-state imaging device in which microlenses having different refractive indexes are formed in respective pixels accurately, and also provide an electronic apparatus using the solid-state imaging device.SOLUTION: Formation of microlenses begins with forming an inorganic microlens 21 made of an inorganic material. Then, after an organic microlens layer 22a made of an organic material is formed, thermal reflow is performed to deform the organic microlens layer 22a to form a hemispherical organic microlens 22. Thereby, since the microlens formed in the beginning is made of an inorganic material, the organic microlens 22 is formed while lens characteristics are maintained. Accordingly, microlenses having different refractive indexes are formed accurately.

    Abstract translation: 解决问题的方案:提供一种在各像素中准确地形成具有不同折射率的微透镜的固体摄像装置,并且还提供使用该固体摄像装置的电子装置。 解决方案:微晶玻璃的形成开始于形成由无机材料制成的无机微透镜21。 然后,在形成由有机材料制成的有机微透镜层22a之后,进行热回流以使有机微透镜层22a变形以形成半球形有机微透镜22.因此,由于开始形成的微透镜由无机材料 形成有机微透镜22,同时保持透镜特性。 因此,精确地形成具有不同折射率的微透镜。 版权所有(C)2013,JPO&INPIT

    Solid-state imaging device, method for manufacturing the solid-state imaging device, and electronic apparatus
    18.
    发明专利
    Solid-state imaging device, method for manufacturing the solid-state imaging device, and electronic apparatus 审中-公开
    固态成像装置,制造固态成像装置的方法和电子装置

    公开(公告)号:JP2011040454A

    公开(公告)日:2011-02-24

    申请号:JP2009184206

    申请日:2009-08-07

    Inventor: MAEDA KENSAKU

    Abstract: PROBLEM TO BE SOLVED: To constitute an optical waveguide which can increase a refractive index of a core part drastically, and further has more excellent waveguide effects in a solid-state imaging device having the optical waveguide. SOLUTION: This solid-state imaging device 1 includes: a plurality of photodiodes PD formed for each pixel 10; a first structure 101 which is provided on the light incident side of the photodiode PD, and has the translucency with a first refractive index; an etching trench provided correspondingly to a boundary position of the plurality of photodiodes PD in the first structure 101; and a second structure 102 which is embedded in the etching trench, and has a second refractive index smaller than the first refractive index. COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题:构成能够大幅度提高芯部的折射率的光波导,并且在具有光波导的固态成像装置中还具有更优异的波导效应。 解决方案:该固态成像装置1包括:为每个像素10形成的多个光电二极管PD; 第一结构101,其设置在光电二极管PD的光入射侧,并且具有第一折射率的半透明度; 对应于第一结构101中的多个光电二极管PD的边界位置设置的蚀刻沟槽; 以及第二结构102,其嵌入在蚀刻沟槽中,并且具有小于第一折射率的第二折射率。 版权所有(C)2011,JPO&INPIT

    Method of fabricating anti-reflection structure, and method of fabricating solid-state imaging device
    19.
    发明专利
    Method of fabricating anti-reflection structure, and method of fabricating solid-state imaging device 有权
    制造抗反射结构的方法,以及制造固态成像装置的方法

    公开(公告)号:JP2010239003A

    公开(公告)日:2010-10-21

    申请号:JP2009086671

    申请日:2009-03-31

    Abstract: PROBLEM TO BE SOLVED: To stably form a micro-protrusion pattern suitable for an anti-reflection structure. SOLUTION: A method of fabricating the anti-reflection structure includes: a first step of forming a resin film 12 having micro-particles dispersed therein on the surface of a workpiece 11; a second step of forming a micro-protrusion dummy pattern 14 on the resin film 12 by etching the resin film 12 using the micro-particles in the resin film 12 as a mask while gradually etching the micro-particles also; and a third step of forming a micro-protrusion pattern 15 on the surface of the workpiece 11 by etching back the surface of the workpiece 11 together with the resin film 12 having the micro-protrusion dummy pattern 14 formed thereon, and transferring the surface shape of the micro-protrusion dummy pattern 14 formed on the surface of the resin film 12 to the surface of the workpiece 11. COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题:稳定地形成适合于防反射结构的微突起图案。 解决方案:制造抗反射结构的方法包括:在工件11的表面上形成分散有微粒的树脂膜12的第一步骤; 通过在树脂膜12中的微粒子作为掩模蚀刻树脂膜12同时逐渐蚀刻微粒子,在树脂膜12上形成微突起假图案14的第二步骤; 以及第三步骤,通过与形成有微突起虚拟图案14的树脂膜12一起蚀刻工件11的表面,在工件11的表面上形成微突起图案15,并且将表面形状 形成在树脂膜12的表面上的微突起假图案14到工件11的表面。版权所有(C)2011,JPO&INPIT

    Colored photosensitive composition, and color filter array and solid-state image pickup device using the same
    20.
    发明专利
    Colored photosensitive composition, and color filter array and solid-state image pickup device using the same 审中-公开
    彩色感光性组合物,和彩色滤光片阵列和使用其的固态图像拾取装置

    公开(公告)号:JP2009175451A

    公开(公告)日:2009-08-06

    申请号:JP2008014213

    申请日:2008-01-24

    Abstract: PROBLEM TO BE SOLVED: To provide a colored photosensitive composition which can form a color filter array having improved spectral characteristics. SOLUTION: The colored photosensitive composition comprises a compound represented by formula (I) or a salt thereof, wherein R 1 -R 4 represent a hydrogen atom, a 1-10C saturated aliphatic hydrocarbon group or a carboxyl group; R 5 -R 12 represent a hydrogen atom, a halogen atom, a (halogenated) 1-10C saturated aliphatic hydrocarbon group, a 1-8C alkoxyl group, a carboxyl group, a sulfo group or a (N-substituted) sulfamoyl group, at least one of R 5 -R 12 is an N-substituted sulfamoyl group; and R 13 and R 14 represent a hydrogen atom, a cyano group or a (N-substituted) carbamoyl group. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供可以形成具有改进的光谱特性的滤色器阵列的着色光敏组合物。 < P>解决方案:着色光敏组合物包含由式(I)表示的化合物或其盐,其中R 1表示氢原子,1 -10℃饱和脂族烃基或羧基; R 16是表示氢原子,卤素原子,(卤代)1-10C饱和脂肪族烃基,1-8C烷氧基,羧基 ,磺基或(N-取代的)氨磺酰基中的至少一个是N-取代的氨磺酰基; R 14和R 14共表示氢原子,氰基或(N-取代的)氨基甲酰基。 版权所有(C)2009,JPO&INPIT

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