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公开(公告)号:US12199131B2
公开(公告)日:2025-01-14
申请号:US17855521
申请日:2022-06-30
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Laurent Gay , Frederic Lalanne , Yann Henrion , Francois Guyader , Pascal Fonteneau , Aurelien Seignard
IPC: H01L27/146
Abstract: Image sensors and methods of manufacturing image sensors are provided. One such method includes forming a structure that includes a semiconductor layer extending from a front side to a back side, and a capacitive insulation wall extending through the semiconductor layer. The capacitive insulation wall includes first and second insulating walls separated by a region of a conductor or a semiconductor material. Portions of the semiconductor layer and the region of the conductor or semiconductor material are selectively etched, and the first and second insulating walls have portions protruding outwardly beyond a back side of the semiconductor layer and of the region of the conductor or semiconductor material. A dielectric passivation layer is deposited on the back side of the structure, and portions of the dielectric passivation layer are locally removed on a back side of the protruding portions of the first and second insulating walls.
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公开(公告)号:US11923465B2
公开(公告)日:2024-03-05
申请号:US17125654
申请日:2020-12-17
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Arnaud Tournier , Boris Rodrigues Goncalves , Frederic Lalanne
IPC: H01L31/02 , H01L27/146
CPC classification number: H01L31/02019 , H01L27/14603 , H01L27/14609 , H01L27/1463 , H01L31/02005 , H01L27/14643
Abstract: The present disclosure concerns a photodiode including at least one memory area, each memory area including at least two charge storage regions.
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