公开(公告)号：US12270990B2

公开(公告)日：2025-04-08

申请号：US17727117

申请日：2022-04-22

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' Boni ,  Roberto Carminati ,  Massimiliano Merli

IPC: G02B26/08 ,  G01L1/18

Abstract: A microelectromechanical mirror device includes a fixed structure defining a cavity, a tiltable structure elastically suspended above the cavity and carrying a reflecting surface, and having a main extension in a horizontal plane. A first pair of driving arms carry respective piezoelectric material regions that are biased to cause a rotation of the tiltable structure around a first rotation axis parallel to a first horizontal axis of the horizontal plane, and elastically coupled to the tiltable structure. Elastic suspension elements that couple the tiltable structure to the fixed structure at the first rotation axis are stiff with respect to movements out of the horizontal plane and yielding with respect to torsion around the first rotation axis, and further extend between the tiltable structure and the fixed structure. The elastic suspension elements have an asymmetrical arrangement on opposite sides of the tiltable structure along the first rotation axis.

公开(公告)号：US12117608B2

公开(公告)日：2024-10-15

申请号：US17369145

申请日：2021-07-07

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto Carminati ,  Nicolo' Boni ,  Massimiliano Merli ,  Enri Duqi

IPC: G02B26/08 ,  G02B1/00 ,  G02B26/10 ,  G02B27/42

CPC classification number: G02B26/101 ,  G02B1/002 ,  G02B26/0833 ,  G02B27/4233

Abstract: A MEMS micromirror device is formed in a package including a containment body and a lid transparent to a light radiation. The package forms a cavity housing a tiltable platform having a reflecting surface. A metastructure is formed on the lid and/or on the reflecting surface and includes a plurality of diffractive optical elements.

公开(公告)号：US12066621B2

公开(公告)日：2024-08-20

申请号：US17720506

申请日：2022-04-14

Applicant: STMicroelectronics S.r.l.

Inventor： Roberto Carminati ,  Nicolo' Boni ,  Andrea Barbieri ,  Marco Zamprogno ,  Luca Molinari

IPC: G02B26/08 ,  H02N2/02 ,  H02N2/06

CPC classification number: G02B26/0858 ,  H02N2/028 ,  H02N2/062

Abstract: A MEMS device includes a semiconductor body with a cavity and forming an anchor portion, a tiltable structure elastically suspended over the cavity, first and second support arms to support the tiltable structure, and first and second piezoelectric actuation structures biasable to deform mechanically, generating a rotation of the tiltable structure around a rotation axis. The piezoelectric actuation structures carry first and second piezoelectric displacement sensors. When the tiltable structure rotates around the rotation axis, the displacement sensors are subject to respective mechanical deformations and generate respective sensing signals in phase opposition to each other, indicative of the rotation of the tiltable structure. The sensing signals are configured to be acquired in a differential manner.

公开(公告)号：US11520138B2

公开(公告)日：2022-12-06

申请号：US16827282

申请日：2020-03-23

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' Boni ,  Roberto Carminati ,  Massimiliano Merli

IPC: H02N2/02 ,  G02B26/08 ,  G02B26/10 ,  G03B21/00

Abstract: A microelectromechanical structure includes a body of semiconductor material having a fixed frame internally defining a cavity, a mobile mass elastically suspended in the cavity and movable with a first resonant movement about a first rotation axis and with a second resonant movement about a second rotation axis, orthogonal to the first axis. First and second pairs of supporting elements, extending in cantilever fashion in the cavity, are rigidly coupled to the frame, and are piezoelectrically deformable to cause rotation of the mobile mass about the first and second rotation axes. First and second pairs of elastic-coupling elements are elastically coupled between the mobile mass and the first and the second pairs of supporting elements. The first and second movements of rotation of the mobile mass are decoupled from one another and do not interfere with one another due to the elastic-coupling elements of the first and second pairs.

公开(公告)号：US20220099960A1

公开(公告)日：2022-03-31

申请号：US17487166

申请日：2021-09-28

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' Boni ,  Roberto Carminati ,  Massimiliano Merli

IPC: G02B26/08 ,  B81B3/00

Abstract: A microelectromechanical device includes a fixed structure having a frame defining a cavity, a tiltable structure elastically suspended above the cavity with main extension in a horizontal plane, a piezoelectrically driven actuation structure which can be biased to cause a desired rotation of the tiltable structure about a first and second rotation axes, and a supporting structure integral with the fixed structure and extending in the cavity starting from the frame. Lever elements are elastically coupled to the tiltable structure at a first end by elastic suspension elements and to the supporting structure at a second end by elastic connecting elements which define a lever rotation axis. The lever elements are elastically coupled to the actuation structure so that their biasing causes the desired rotation of the tiltable structure about the first and second rotation axes.