Abstract:
Es wird eine Beobachtungseinrichtung (10) für eine Vakuumvorrichtung (117), beispielsweise eine Beschichtungsvorrichtung, bereitgestellt, bei welchem ein Fensterelement (17) durch Bewegen eines beweglichen Elements (14) auf einfache Weise getauscht werden kann, ohne eine Vakuum in der Vakuumvorrichtung (117) wesentlich zu stören.
Abstract:
Für die Herstellung eines Sichtfensters (7) in Reaktionsgefässen, Autoklaven, Boilern, Nuklearreaktoren und dergleichen wird die Verwendung von kubisch stabilisiertem Zirkoniumoxid-Monokristall vorgeschlagen. Vorzugsweise wird Kalzium, Magnesium, Yttrium oder ein anderes transparentes Element der schweren Lanthanoiden zur Stabilisierung von Zirkoniumoxid verwendet. Aufgrund der hervorragenden Transparenz derartiger mittels kubisch stabilisiertem Zirkoniumoxid-Monokristall hergestellter Sichtfenster (7) sind diese insbesondere geeignet für die In-Situ-Prozessüberwachung in geschlossenen Gefässen, wie den oben erwähnten Reaktionsgefässen und dergleichen, wobei die Überwachung entweder optisch mittels fotografischen Geräten oder Videogeräten (1) oder mittels spektroskopischen Methoden erfolgen kann.
Abstract:
L'invention se rapporte à un système d'éclairage homogène, amovible et autoporté, pour éclairer une enceinte à travers un hublot (4). La présente invention vise à proposer un système d'éclairage d'une enceinte protégée par hublot (4) qui soit sécurisé, facilement amovible et bon marché tout en procurant un éclairage sensiblement homogène. À ce titre, l'invention concerne un dispositif de support d'un système d'éclairage à travers un hublot (4) doté d'une bordure périphérique (4a) définissant une zone d'observation (4b), caractérisé en ce qu'il comporte un élément de guidage (12a, 12d) apte à recevoir un ruban de diodes électroluminescentes (10) ainsi que des moyens de maintien (12, 14, 18, 20) aptes à maintenir de façon amovible ledit élément de guidage (12a, 12d) vis-à-vis du hublot (4) de sorte à positionner le ruban de diodes électroluminescentes (10) en pourtour de la zone d'observation (4b) du hublot (4).
Abstract:
A catalyst loading system comprising: a vessel comprising at least one gas distribution nozzle at or near the bottom of the vessel, a top fluid distributor located at or near the top of the vessel, a catalyst inlet through which catalyst is introduced into the vessel, a first contact point at which catalyst introduced into the vessel first contacts the contents of the vessel, and a discharge outlet whereby catalyst exits the vessel. Methods of preparing catalyst slurry for introduction into a downstream reactor or in-situ activation within the vessel utilizing the catalyst loading system are also disclosed.
Abstract:
An illuminating and viewing unit for illuminating the interior of a vessel with source radiation and observing the vessel interior comprises a housing including a front wall facing the vessel interior. The front wall is of a material that does not transmit the source radiation, and includes one or more illumination ports individually fused into the front wall that transmit the source radiation to the vessel interior. A detection port is also individually fused into the front wall for transmitting detectable radiation along a detection path from the vessel interior to a radiation detector mounted in the housing. The optical isolation of the illumination and detection ports in the front wall prevents unwanted internal reflection of source radiation into the detection path, and allows for independent selection of port materials and configurations, while maintaining a hermetic seal between the housing and the internal contents of the vessel.
Abstract:
A view port of chemical vapor deposition apparatus for manufacturing semiconductor devices prevents heat loss in a chamber during a plasma deposition process. The view port includes a bracket protruding at the circumference of an opening in an electrode serving as a wall of a chamber of the apparatus, a transparent window pressed by the bracket against the wall via an O-ring, a pivoting cap for capping an opening in the bracket aligned with the window, and heat-insulative material and/or a heating element integral with the cap so as to be positioned close to the window when the cap is closed. The heating element can be a resistive heating wire or a warm air duct formed by a hose or the like. During the deposition process, the temperature of the window is maintained, thereby minimizing the tendency of polymer to adhere to the window.
Abstract:
A tubular stroboscope is interposed in the line of sight between a viewing glass and a process to be viewed in a chamber. The stroboscope is rotated about a central axis transverse to the line of sight and has a pair of diametrically opposed slots parallel to said axis, one slot being substantially wider than the opposite slot. The stroboscope is preferably driven by a jet of inert gas acting on a drive wheel inside the chamber, aspiration means being provided for dust removal.
Abstract:
A light pipe unit for supplying illumination to the interior of a vessel that has an attachment means for connection to the vessel. The light pipe unit is constructed of a metallic housing having an elongated fiber optic rod contained therein. At the bottom portions of the rod and housing, that is the portions extending into the vessel, is a glass laminate. The glass laminate covering forms a substantially corrosion-proof seal across the entire distal or lower portion of the unit.