Method and system for template assisted wafer bonding using pedestals
    192.
    发明授权
    Method and system for template assisted wafer bonding using pedestals 有权
    使用基座进行模板辅助晶片接合的方法和系统

    公开(公告)号:US09159631B2

    公开(公告)日:2015-10-13

    申请号:US14261276

    申请日:2014-04-24

    Inventor: Elton Marchena

    Abstract: A method of fabricating a composite semiconductor structure includes providing a first substrate comprising a first material and having a first surface and forming a plurality of pedestals extending to a predetermined height in a direction normal to the first surface. The method also includes attaching a plurality of elements comprising a second material to each of the plurality of pedestals, providing a second substrate having one or more structures disposed thereon, and aligning the first substrate and the second substrate. The method further includes joining the first substrate and the second substrate to form the composite substrate structure and removing at least a portion of the first substrate from the composite substrate structure.

    Abstract translation: 制造复合半导体结构的方法包括提供包括第一材料并具有第一表面的第一基板,并且形成沿垂直于第一表面的方向延伸到预定高度的多个基座。 该方法还包括将包括第二材料的多个元件附接到多个基座中的每一个,从而提供其上设置有一个或多个结构的第二基板,以及对准第一基板和第二基板。 该方法还包括接合第一基板和第二基板以形成复合基板结构,并从复合基板结构去除第一基板的至少一部分。

    INTEGRATED MULTISTAGE TAPER COUPLER FOR WAVEGUIDE TO FIBER COUPLING
    195.
    发明申请
    INTEGRATED MULTISTAGE TAPER COUPLER FOR WAVEGUIDE TO FIBER COUPLING 有权
    用于波导到光纤耦合的集成多级光接头耦合器

    公开(公告)号:US20150219853A1

    公开(公告)日:2015-08-06

    申请号:US14615942

    申请日:2015-02-06

    CPC classification number: G02B6/305

    Abstract: A waveguide coupler has a compression region and an expansion region for coupling light between a silicon waveguide and an optical fiber. The compression region receives light from the silicon waveguide and compresses an optical mode of the light. Light is transmitted from the compression region to an expansion region. The expansion region expands the light to have a larger cross section. Light is then transmitted to the optical fiber.

    Abstract translation: 波导耦合器具有用于在硅波导和光纤之间耦合光的压缩区域和扩展区域。 压缩区域接收来自硅波导的光并压缩光的光学模式。 光从压缩区域传输到扩展区域。 膨胀区域使光线扩展成具有较大的横截面。 光然后传输到光纤。

    INTEGRATION OF AN UNPROCESSED, DIRECT-BANDGAP CHIP INTO A SILICON PHOTONIC DEVICE
    196.
    发明申请
    INTEGRATION OF AN UNPROCESSED, DIRECT-BANDGAP CHIP INTO A SILICON PHOTONIC DEVICE 有权
    将不受约束的直接带状芯片集成到硅光电器件

    公开(公告)号:US20150098676A1

    公开(公告)日:2015-04-09

    申请号:US14509914

    申请日:2014-10-08

    Abstract: A composite device for splitting photonic functionality across two or more materials comprises a platform, a chip, and a bond securing the chip to the platform. The platform comprises a base layer and a device layer. The device layer comprises silicon and has an opening exposing a portion of the base layer. The chip, a III-V material, comprises an active region (e.g., gain medium for a laser). The chip is bonded to the portion of the base layer exposed by the opening such that the active region of the chip is aligned with the device layer of the platform. A coating hermitically seals the chip in the platform.

    Abstract translation: 用于在两种或多种材料上分离光子功能的复合器件包括平台,芯片和将芯片固定到平台的接合。 平台包括基层和器件层。 器件层包括硅并且具有露出基底层的一部分的开口。 芯片III-V材料包括有源区(例如,用于激光的增益介质)。 芯片被接合到由开口暴露的基层的部分,使得芯片的有源区域与平台的器件层对准。 涂层在平台上密封芯片。

    METHOD AND SYSTEM FOR TEMPLATE ASSISTED WAFER BONDING
    198.
    发明申请
    METHOD AND SYSTEM FOR TEMPLATE ASSISTED WAFER BONDING 有权
    用于模板辅助波形粘结的方法和系统

    公开(公告)号:US20140342500A1

    公开(公告)日:2014-11-20

    申请号:US14245191

    申请日:2014-04-04

    Abstract: A method of fabricating a composite semiconductor structure includes providing a substrate including a plurality of devices and providing a compound semiconductor substrate including a plurality of photonic devices. The method also includes dicing the compound semiconductor substrate to provide a plurality of photonic dies. Each die includes one or more of the plurality of photonics devices. The method further includes providing an assembly substrate, mounting the plurality of photonic dies on predetermined portions of the assembly substrate, aligning the substrate and the assembly substrate, joining the substrate and the assembly substrate to form a composite substrate structure, and removing at least a portion of the assembly substrate from the composite substrate structure.

    Abstract translation: 制造复合半导体结构的方法包括提供包括多个器件的衬底并提供包括多个光子器件的化合物半导体衬底。 该方法还包括切割化合物半导体衬底以提供多个光子管芯。 每个管芯包括多个光子器件中的一个或多个。 该方法还包括提供组装衬底,将多个光子模具安装在组装衬底的预定部分上,对准衬底和组装衬底,将衬底和组件衬底接合以形成复合衬底结构,并且移除至少一个 从组合衬底结构的组装衬底的一部分。

    Method and system for template assisted wafer bonding using pedestals
    199.
    发明授权
    Method and system for template assisted wafer bonding using pedestals 有权
    使用基座进行模板辅助晶片接合的方法和系统

    公开(公告)号:US08735191B2

    公开(公告)日:2014-05-27

    申请号:US13733337

    申请日:2013-01-03

    Inventor: Elton Marchena

    Abstract: A method of fabricating a composite semiconductor structure includes providing a first substrate comprising a first material and having a first surface and forming a plurality of pedestals extending to a predetermined height in a direction normal to the first surface. The method also includes attaching a plurality of elements comprising a second material to each of the plurality of pedestals, providing a second substrate having one or more structures disposed thereon, and aligning the first substrate and the second substrate. The method further includes joining the first substrate and the second substrate to form the composite substrate structure and removing at least a portion of the first substrate from the composite substrate structure.

    Abstract translation: 制造复合半导体结构的方法包括提供包括第一材料并具有第一表面的第一基板,并且形成沿垂直于第一表面的方向延伸到预定高度的多个基座。 该方法还包括将包括第二材料的多个元件附接到多个基座中的每一个,从而提供其上设置有一个或多个结构的第二基板,以及对准第一基板和第二基板。 该方法还包括接合第一基板和第二基板以形成复合基板结构,并从复合基板结构去除第一基板的至少一部分。

    Method and system for template assisted wafer bonding
    200.
    发明授权
    Method and system for template assisted wafer bonding 有权
    模板辅助晶片粘合的方法和系统

    公开(公告)号:US08722464B2

    公开(公告)日:2014-05-13

    申请号:US13869408

    申请日:2013-04-24

    Abstract: A method of fabricating a composite semiconductor structure includes providing a substrate including a plurality of devices and providing a compound semiconductor substrate including a plurality of photonic devices. The method also includes dicing the compound semiconductor substrate to provide a plurality of photonic dies. Each die includes one or more of the plurality of photonics devices. The method further includes providing an assembly substrate, mounting the plurality of photonic dies on predetermined portions of the assembly substrate, aligning the substrate and the assembly substrate, joining the substrate and the assembly substrate to form a composite substrate structure, and removing at least a portion of the assembly substrate from the composite substrate structure.

    Abstract translation: 制造复合半导体结构的方法包括提供包括多个器件的衬底并提供包括多个光子器件的化合物半导体衬底。 该方法还包括切割化合物半导体衬底以提供多个光子管芯。 每个管芯包括多个光子器件中的一个或多个。 该方法还包括提供组装衬底,将多个光子模具安装在组装衬底的预定部分上,对准衬底和组装衬底,将衬底和组件衬底接合以形成复合衬底结构,并且移除至少一个 从组合衬底结构的组装衬底的一部分。

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