公开(公告)号：US20140362382A1

公开(公告)日：2014-12-11

申请号：US14373928

申请日：2013-01-24

Applicant: TOMRA SORTING AS

Inventor： Dirk Balthasar ,  Ole Onsrud

IPC: G01N21/55 ,  G02B26/10

CPC classification number: G01N21/55 ,  G01N21/84 ,  G01N2021/845 ,  G01N2201/105 ,  G02B26/105

Abstract: An apparatus for detecting matter, the apparatus including: a first light source adapted to emit a first light beam; a second light source adapted to emit a second light beam, wherein the apparatus is arranged such that the first and second light beams converge towards a scanning element; the scanning element adapted to redirect the converging first and second light beams towards the matter to be detected; and a detector adapted to receive light reflected by the matter via the scanning element. Also, a system and method of detecting matter.

Abstract translation: 一种用于检测物质的装置，所述装置包括：适于发射第一光束的第一光源; 适于发射第二光束的第二光源，其中所述设备被布置成使得所述第一和第二光束朝向扫描元件会聚; 所述扫描元件适于将所述会聚的第一和第二光束朝向待检测的物体重定向; 以及检测器，适于接收经由扫描元件反射的光。 另外，检测物质的系统和方法。

公开(公告)号：US08848199B2

公开(公告)日：2014-09-30

申请号：US12218029

申请日：2008-07-10

Applicant: Wonshik Choi ,  Ramachandra Rao Dasari ,  Christopher M. Fang-Yen ,  Michael S. Feld

Inventor： Wonshik Choi ,  Ramachandra Rao Dasari ,  Christopher M. Fang-Yen ,  Michael S. Feld

IPC: G01B9/02 ,  G01N21/45 ,  G01N21/51 ,  G01N21/64

CPC classification number: G01N21/45 ,  G01N21/51 ,  G01N21/6458 ,  G01N21/6486 ,  G01N2021/458 ,  G01N2201/061 ,  G01N2201/105 ,  G01N2201/12

Abstract: The present invention relates to systems and methods for quantitative three-dimensional mapping of refractive index in living or non-living cells, tissues, or organisms using a phase-shifting laser interferometric microscope with variable illumination angle. A preferred embodiment provides tomographic imaging of cells and multicellular organisms, and time-dependent changes in cell structure and the quantitative characterization of specimen-induced aberrations in high-resolution microscopy with multiple applications in tissue light scattering.

Abstract translation: 本发明涉及使用具有可变照明角度的移相激光干涉显微镜在生活或非活细胞，组织或生物体中定量三维映射折射率的系统和方法。 优选的实施方案提供细胞和多细胞生物的层析成像，以及在组织光散射中具有多种应用的高分辨率显微镜中细胞结构的时间依赖性变化和样品诱导的像差的定量表征。

公开(公告)号：US20130335733A1

公开(公告)日：2013-12-19

申请号：US13953644

申请日：2013-07-29

Applicant: KLA-Tencor Corporation

Inventor： Richard E. Bills ,  Neil Judell ,  Timothy R. Tiemeyer ,  James P. McNiven

IPC: G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A method for inspecting a surface of a workpiece for asymmetric defects, by scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light extending along a light channel axis in a front quartersphere and scattered light, the incident beam and the light channel axis defining an incident plane, collecting the scattered light at a plurality of collectors disposed above the surface at defined locations such that scatter from asymmetric defects is collectable by at least one collector, detecting collector output and generating signals in response, and processing the signals associated with each collector individually to obtain information about asymmetric defects.

Abstract translation: 一种用于通过扫描工件表面上的入射光束以撞击在其上以产生沿着前四分之一圆周和散射光中的光通道轴延伸的反射光来检查工件的表面的非对称缺陷的方法，入射光束和 光通道轴限定入射平面，在设置在表面上的多个收集器处收集散射光，所述收集器在限定的位置处，使得来自不对称缺陷的散射可由至少一个收集器收集，检测收集器输出并响应于产生信号，并且处理 分别与每个收集器相关联的信号以获得关于非对称缺陷的信息。

公开(公告)号：US20130229661A1

公开(公告)日：2013-09-05

申请号：US13865104

申请日：2013-04-17

Applicant: KLA-TENCOR CORPORATION

Inventor： Daniel Kandel ,  Vladimir Levinski ,  Alexander Svizher ,  Joel Seligson ,  Andrew Hill ,  Ohad Bachar ,  Amnon Manassen ,  Yung-Ho Alex Chuang ,  Ilan Sela ,  Moshe Markowitz ,  Daria Negri ,  Efraim Rotem

IPC: G01N21/47

CPC classification number: G01N21/47 ,  G01B11/02 ,  G01B11/0641 ,  G01B2210/56 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/4792 ,  G01N2201/06113 ,  G01N2201/105 ,  G03F7/70625 ,  G03F7/70633

Abstract: Various metrology systems and methods are provided. One metrology system includes a light source configured to produce a diffraction-limited light beam, an apodizer configured to shape the light beam in the entrance pupil of illumination optics, and optical elements configured to direct the diffraction-limited light beam from the apodizer to an illumination spot on a grating target on a wafer and to collect scattered light from the grating target. The metrology system further includes a field stop and a detector configured to detect the scattered light that passes through the field stop. In addition, the metrology system includes a computer system configured to determine a characteristic of the grating target using output of the detector.

公开(公告)号：US08497984B2

公开(公告)日：2013-07-30

申请号：US11311943

申请日：2005-12-17

Applicant: Richard Earl Bills ,  Neil Judell ,  Timothy R. Tiemeyer ,  James Peter McNiven

Inventor： Richard Earl Bills ,  Neil Judell ,  Timothy R. Tiemeyer ,  James Peter McNiven

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. Certain of these components, most notably the beam source subsystem, the beam scanning subsystem and the optical collection and detection subsystem are modular for ready field replacement and/or maintenance. The optical collection and detection system features wing collectors in the front quartersphere and back collectors in the back quartersphere for collected light scattered from the surface of the workpiece. This can greatly improve the measurement capabilities of the system. Also included is a method for detecting asymmetric defects using the wing collectors and back collectors.

Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 这些部件中的一些，最明显的是光束源子系统，光束扫描子系统和光学收集和检测子系统是模块化的，用于现场更换和/或维护。 光学收集和检测系统在后四分之一的四分之一区域中具有翼收集器和后收集器，用于从工件表面散射的收集的光。 这可以大大提高系统的测量能力。 还包括使用翼收集器和后收集器检测不对称缺陷的方法。

公开(公告)号：US08330947B2

公开(公告)日：2012-12-11

申请号：US12570465

申请日：2009-09-30

Applicant: Richard Earl Bills ,  Neil Judell ,  Klaus Reinhard Freischlad ,  James Peter McNiven

Inventor： Richard Earl Bills ,  Neil Judell ,  Klaus Reinhard Freischlad ,  James Peter McNiven

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features back collectors disposed in the back quartersphere, outside the incident plane, for collecting light scattered from the surface of the workpiece. The back collectors are disposed at a relative minimum in the portion of scattered light attributable to haze relative to the portion of scattered light attributable to defect scatter portion, or, alternatively, at a relative minimum in the Rayleigh scatter.

Abstract translation: 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 光学收集和检测系统的特征在于后置收集器，其设置在入射平面外侧的后四分之一圈中，用于收集从工件表面散射的光。 后收集器相对于归因于缺陷散射部分的散射光部分的雾度部分的散射光部分相对最小设置，或者在瑞利散射中相对最小。

公开(公告)号：US20120013898A1

公开(公告)日：2012-01-19

申请号：US13242065

申请日：2011-09-23

Applicant: Neil Judell ,  Ian Thomas Kohl ,  Songping Gao ,  Richard Earl Bills

Inventor： Neil Judell ,  Ian Thomas Kohl ,  Songping Gao ,  Richard Earl Bills

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. The system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.

Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。 系统还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的变化而改变输出狭缝的宽度。

公开(公告)号：US07659974B2

公开(公告)日：2010-02-09

申请号：US12142850

申请日：2008-06-20

Applicant: Richard Earl Bills ,  James Peter McNiven

Inventor： Richard Earl Bills ,  James Peter McNiven

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: In one embodiment, a surface analyzer system comprises a radiation targeting assembly to target a radiation beam onto a surface; and a scattered radiation collecting assembly that collects radiation scattered from the surface. The radiation targeting assembly generates primary and secondary beams. Data collected from the reflections of the primary and secondary beams may be used in a dynamic range extension routine, alone or in combination with a power attenuation routine.

Abstract translation: 在一个实施例中，表面分析器系统包括将辐射束对准到表面上的辐射瞄准组件; 以及收集从表面散射的辐射的散射的辐射收集组件。 辐射瞄准组件产生主光束和次光束。 从主波束和次波束的反射中收集的数据可以单独使用或者与功率衰减程序组合在动态范围扩展程序中使用。

公开(公告)号：US07623227B2

公开(公告)日：2009-11-24

申请号：US11311907

申请日：2005-12-17

Applicant: Neil Judell ,  Ian Thomas Kohl ,  Songping Gao ,  Richard Earl Bills

Inventor： Neil Judell ,  Ian Thomas Kohl ,  Songping Gao ,  Richard Earl Bills

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. They system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.

Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变极化，偏振继电器组件被布置成选择性地允许具有选定的偏振取向的散射光沿着检测器光轴传递到检测子系统中的光检测单元。 它们还具有收集器输出宽度变化子系统，用于响应于在工件上扫描的位置的位置的变化来改变输出狭缝的宽度。

公开(公告)号：US20070051903A1

公开(公告)日：2007-03-08

申请号：US11209685

申请日：2005-08-24

Applicant: Chien-An Chen ,  Han-Wei Wang ,  Chi-Fu Hung

Inventor： Chien-An Chen ,  Han-Wei Wang ,  Chi-Fu Hung

IPC: G01J1/58

CPC classification number: G02B21/0048 ,  G01N21/6428 ,  G01N21/6452 ,  G01N21/6456 ,  G01N2201/105 ,  G02B21/0036 ,  G02B21/0064 ,  G02B21/0076

Abstract: An optical detection apparatus and method thereof is provided, which is applicable for detecting the image signals of a labeled sample. First, a laser module provides excitation light, and the excitation light is continuously reflected by a scan module for providing linear scanning light by changing a reflection angle. The carrier moves the light module in a direction nonparallel to the linear direction so as to provide a two-dimensional testing zone. The labeled sample placed in the testing zone is excited by the linear scanning light and generates emission light to be received by the light receiver. Therefore, the light receiver forms the image signals of the labeled sample corresponding to the emission light.

Abstract translation: 提供了一种适用于检测标记样品的图像信号的光学检测装置及其方法。 首先，激光模块提供激发光，并且激发光被扫描模块连续反射，以通过改变反射角来提供线性扫描光。 载体将光模块沿与线性方向不平行的方向移动，以便提供二维测试区域。 放置在测试区域中的标记样品被线性扫描光激发，并产生要被光接收器接收的发射光。 因此，光接收器形成对应于发射光的标记样品的图像信号。