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    MEMS DEVICES AND FABRICATION THEREOF
    251.
    发明申请
    MEMS DEVICES AND FABRICATION THEREOF 有权
    MEMS器件及其制造方法

    公开(公告)号：US20110260267A1

    公开(公告)日：2011-10-27

    申请号：US12990123

    申请日：2009-05-06

    Applicant: Robertus T. F. Van Schaijk

    Inventor： Robertus T. F. Van Schaijk

    IPC: H01L29/84 ,  H01L21/00

    CPC classification number: B81B3/0086 ,  B81B3/0078 ,  B81B2201/016 ,  B81B2203/0118

    Abstract: A MEMS device and method, comprising: a substrate; a beam; and a cavity located therebetween; the beam comprising a first beam layer and a second beam layer, the first beam layer being directly adjacent to the cavity, the second beam layer being directly adjacent to the first beam layer; the first beam layer comprising a metal or a metal alloy containing silicon; and the second beam layer comprising a metal or a metal alloy substantially not containing silicon. Preferably the second beam layer is thicker than the first beam layer e.g. at least five times thicker, and the first beam layer comprises a metal or alloy containing between 1% and 2% of silicon. The second beam layer provides desired mechanical and/or optical properties whilst the first beam layer prevents spiking.

    Abstract translation: 一种MEMS器件和方法，包括：衬底; 一束 和位于其间的腔体; 所述光束包括第一光束层和第二光束层，所述第一光束层直接邻近所述空腔，所述第二光束层直接邻近所述第一光束层; 所述第一束层包含含有硅的金属或金属合金; 并且第二束层包含基本上不含硅的金属或金属合金。 优选地，第二光束层比第一光束层厚。 至少五倍厚，第一束层包含含有1％至2％硅的金属或合金。 第二光束层提供期望的机械和/或光学特性，同时第一光束层防止尖峰。

    Electromechanical element and electronic equipment using the same
    252.
    发明授权
    Electromechanical element and electronic equipment using the same 失效
    机电元件和使用其的电子设备

    公开(公告)号：US07978034B2

    公开(公告)日：2011-07-12

    申请号：US12304757

    申请日：2007-06-14

    Applicant: Yasuyuki Naito ,  Yoshito Nakanishi

    Inventor： Yasuyuki Naito ,  Yoshito Nakanishi

    IPC: H01H51/22

    CPC classification number: B81B3/0078 ,  B81B2201/016 ,  H01H59/0009 ,  H01H69/01

    Abstract: A quick response/low voltage driven electromechanical switch equipped with a mechanism for adjusting a spring constant of a movable electrode is provided. The electromechanical element includes a first electrode formed on a substrate, a second electrode formed at a predetermined interval to the first electrode so that the interval is changed, and supporting portions for supporting the second electrode, wherein the supporting portions of the second electrode are able to be displaced.

    Abstract translation: 提供一种具有用于调节可动电极的弹簧常数的机构的快速响应/低压驱动机电开关。 机电元件包括​​形成在基板上的第一电极，以第一电极以预定间隔形成的间隔改变的第二电极和用于支撑第二电极的支撑部分，其中第二电极的支撑部分能够 被流离失所

    ELECTRONIC ELEMENT, VARIABLE CAPACITOR, MICRO SWITCH, METHOD FOR DRIVING MICRO SWITCH, AND MEMS TYPE ELECTRONIC ELEMENT
    253.
    发明申请
    ELECTRONIC ELEMENT, VARIABLE CAPACITOR, MICRO SWITCH, METHOD FOR DRIVING MICRO SWITCH, AND MEMS TYPE ELECTRONIC ELEMENT 有权
    电子元件，可变电容器，微动开关，用于驱动微动开关的方法和MEMS型电子元件

    公开(公告)号：US20090190284A1

    公开(公告)日：2009-07-30

    申请号：US12412744

    申请日：2009-03-27

    Applicant: HIROSHI KONISHI ,  Junji Suzuki

    Inventor： HIROSHI KONISHI ,  Junji Suzuki

    IPC: H01G5/00 ,  H01H57/00

    CPC classification number: G02B26/08 ,  B81B3/0086 ,  B81B2201/016 ,  H01G5/16 ,  H01G5/18 ,  H01L23/5223 ,  H01L27/0808 ,  H01L2924/0002 ,  H01L2924/3011 ,  H01L2924/00

    Abstract: Driving is made possible in a moving range equivalent to or wider than the conventional range, with a driving voltage having a range smaller than a pull-in voltage. An electronic element includes a fixed portion, and a movable portion which is movable with respect to the fixed portion and which is provided to generate a spring force to make restoration to a predetermined position. The fixed portion is provided with a first driving electrode and a first signal electrode. The movable portion is provided with a second driving electrode and a second signal electrode. An electrostatic force is generated between the first driving electrode and the second driving electrode by a voltage applied therebetween so that the electrostatic force resists against the spring force; and the first and second driving electrodes and the first and second signal electrodes are arranged so that the electrostatic force is generated in a direction in which a spacing distance between the first and second signal electrodes is widened.

    Abstract translation: 在等于或大于常规范围的移动范围内驱动是可能的，其驱动电压具有小于引入电压的范围。 电子元件包括固定部分和可相对于固定部分移动并且被设置成产生弹簧力以使其恢复到预定位置的可动部分。 固定部设置有第一驱动电极和第一信号电极。 可动部设置有第二驱动电极和第二信号电极。 通过施加在第一驱动电极和第二驱动电极之间的电压产生静电力，使得静电力抵抗弹簧力; 并且第一和第二驱动电极以及第一和第二信号电极被布置成使得在第一和第二信号电极之间的间隔距离变宽的方向产生静电力。

    MEMS switch and method of fabricating the same
    255.
    发明申请
    MEMS switch and method of fabricating the same 审中-公开
    MEMS开关及其制造方法

    公开(公告)号：US20080001691A1

    公开(公告)日：2008-01-03

    申请号：US11585235

    申请日：2006-10-24

    Applicant: Young-tack Hong ,  Jong-seok Kim ,  In-sang Song ,  Sang-wook Kwon ,  Sang-hun Lee ,  Che-heung Kim

    Inventor： Young-tack Hong ,  Jong-seok Kim ,  In-sang Song ,  Sang-wook Kwon ,  Sang-hun Lee ,  Che-heung Kim

    IPC: H01F7/08

    CPC classification number: H01H59/0009 ,  B81B3/001 ,  B81B2201/014 ,  B81B2201/016

    Abstract: A MEMS switch includes a substrate, at least one signal line and at least one electrode formed on the substrate, and a moving beam disposed in a spaced-apart relation with respect to the substrate above the substrate so as to be connected with or disconnected from the signal line according to an operation of the electrode. The moving beam includes at least one body, and at least one support to support the body. The body has a modulus of elasticity larger than that of the support. The MEMS switch prevents the moving beam from being stuck and increases a contact force generating between the moving beam and the signal line, thereby enabling a signal to be stably transmitted.

    Abstract translation: MEMS开关包括衬底，至少一个信号线和形成在衬底上的至少一个电极以及相对于衬底在衬底上间隔开的关系设置的移动束，以便与衬底连接或断开 根据电极的操作的信号线。 移动梁包括至少一个主体和至少一个支撑体以支撑身体。 身体的弹性模量大于支撑体的弹性模量。 MEMS开关防止移动光束被卡住，并增加在移动光束和信号线之间产生的接触力，从而使信号能够稳定地传输。

    Shape memory device
    256.
    发明申请
    Shape memory device 有权
    形状记忆装置

    公开(公告)号：US20070086237A1

    公开(公告)日：2007-04-19

    申请号：US11528712

    申请日：2006-09-27

    Applicant: Sandip Tiwari ,  Chung Kim

    Inventor： Sandip Tiwari ,  Chung Kim

    IPC: G11C11/34

    CPC classification number: H01L27/115 ,  B81B3/0072 ,  B81B2201/016 ,  B82Y10/00 ,  G11C13/0014 ,  G11C13/0016 ,  G11C13/025 ,  G11C23/00 ,  G11C2213/14 ,  G11C2213/17 ,  G11C2213/77 ,  H01H9/547 ,  H01H59/0009 ,  H01H61/0107 ,  H01L21/28273 ,  H01L27/112 ,  H01L29/66825 ,  H01L29/785

    Abstract: Mechanical devices having bistable positions are utilized to form switches and memory devices. The devices are actuatable to different positions and may be coupled to a transistor device in various configurations to provide memory devices. Actuation mechanisms include electrostatic methods and heat. In one form, the mechanical device forms a gate for a field effect transistor. In a further form, the device may be a switch that may be coupled to the transistor in various manners to affect its electrical characteristics when on and off. The memory switch in one embodiment comprises side walls formed with tensile or compressive films. A cross point switch is formed from a plurality of intersecting conductive rows and columns of conductors. Actuatable switches are positioned between each intersection of the rows and columns such that each intersection is independently addressable.

    Abstract translation: 利用具有双稳态位置的机械装置来形成开关和存储装置。 这些器件可被驱动到不同的位置，并且可以以各种配置耦合到晶体管器件以提供存储器件。 致动机制包括静电法和热量。 在一种形式中，机械装置形成用于场效应晶体管的栅极。 在另一种形式中，器件可以是开关，其可以以各种方式耦合到晶体管，以便在接通和断开时影响其电特性。 在一个实施例中的存储器开关包括由拉伸或压缩膜形成的侧壁。 交叉点开关由多个交叉的导电行和导体列形成。 可执行开关位于行和列的每个交叉点之间，使得每个交叉点可独立寻址。

    Switchable capacitor and method of making the same
    257.
    发明授权
    Switchable capacitor and method of making the same 有权
    可切换电容器及其制作方法

    公开(公告)号：US07002439B2

    公开(公告)日：2006-02-21

    申请号：US10663340

    申请日：2003-09-15

    Applicant: Xavier Rottenberg ,  Henri Jansen ,  Hendrikus Tilmans ,  Walter De Raedt

    Inventor： Xavier Rottenberg ,  Henri Jansen ,  Hendrikus Tilmans ,  Walter De Raedt

    IPC: H01G23/00

    CPC classification number: H01H59/0009 ,  B81B3/001 ,  B81B2201/016 ,  B81C2201/115 ,  H01G5/16 ,  H01G5/18

    Abstract: A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom electrode, a dielectric layer deposited on at least part of said bottom electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actuation area in order to stabilize the down state position of the armature. The device may furthermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area or with relay actuation.

    Abstract translation: 公开了一种微机电可切换电容器，包括衬底，底电极，沉积在所述底电极的至少一部分上的电介质层，沉积在所述介电层的至少一部分上的导电浮动电极，位于浮动 电极和第一致动区域，以便稳定电枢的向下状态位置。 该装置还可以包括第二致动区域。 本发明提供了分流开关和串联开关，其在附接到浮动电极区域的区域中具有致动，或者具有继电器致动。

    Micromachine switch and its production method
    258.
    发明授权
    Micromachine switch and its production method 失效
    微机械开关及其制作方法

    公开(公告)号：US06875936B1

    公开(公告)日：2005-04-05

    申请号：US09869107

    申请日：1999-12-20

    Applicant: Kenichiro Suzuki ,  Tsunehisa Marumoto

    Inventor： Kenichiro Suzuki ,  Tsunehisa Marumoto

    IPC: H01H11/00 ,  B81B3/00 ,  B81C1/00 ,  B81C3/00 ,  H01H1/20 ,  H01H11/06 ,  H01H59/00 ,  H01H57/00

    CPC classification number: H01H59/0009 ,  B81B2201/014 ,  B81B2201/016 ,  B81C1/0015 ,  B81C2201/0133 ,  H01H1/20

    Abstract: A micro-machine switch in accordance with the present invention includes a supporter having a predetermined height relative to a surface of a substrate, a flexible cantilever projecting from the supporter in parallel with a surface of the substrate, and having a distal end facing a gap formed between two signal lines, a contact electrode formed on the cantilever, facing the gap, a lower electrode formed on the substrate in facing relation with a part of the cantilever, and an intermediate electrode formed on the cantilever in facing relation with the lower electrode. The micro-machine switch can operate at a lower drive voltage than a voltage at which a conventional micro-machine switch operates, and can enhance a resistance of an insulating film against a voltage.

    Abstract translation: 根据本发明的微型机器开关包括：相对于基板的表面具有预定高度的支撑件，从支撑件平行于基板的表面突出的柔性悬臂，并且具有面向间隙的远端 形成在两个信号线之间，形成在悬臂上的接触电极，面向间隙，形成在基板上的与电极的一部分相对的底电极，以及形成在悬臂上的中间电极，与下电极 。 微机开关可以在比常规微机开关操作的电压低的驱动电压下工作，并且可以增强绝缘膜对电压的电阻。

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