公开(公告)号：WO2007013992A1

公开(公告)日：2007-02-01

申请号：PCT/US2006/028276

申请日：2006-07-19

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  SASAGAWA, Teruo ,  CHUI, Clarence ,  KOTHARI, Manish ,  GANTI, Surya, Prakash ,  SAMPSELL, Jeffrey, B.

Inventor： SASAGAWA, Teruo ,  CHUI, Clarence ,  KOTHARI, Manish ,  GANTI, Surya, Prakash ,  SAMPSELL, Jeffrey, B.

IPC: B81B3/00

CPC classification number: G02B26/0841 ,  B81B2201/042 ,  B81B2203/0307 ,  B81C1/00595 ,  B81C2201/014 ,  G02B26/001

Abstract: A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.

Abstract translation: 具有由保护材料包围的牺牲材料形成的支撑结构的微机电系统装置。 微机电系统装置包括其上形成有电极的基板。 另一电极通过空腔与第一电极分离，并形成可移动层，该可移动层由牺牲材料形成的支撑结构支撑。

公开(公告)号：WO2006036435A1

公开(公告)日：2006-04-06

申请号：PCT/US2005/030902

申请日：2005-08-30

Applicant: IDC, LLC ,  MILES, Mark, W. ,  BATEY, John ,  CHUI, Clarence ,  KOTHARI, Manish ,  TUNG, Ming-Hau

Inventor： MILES, Mark, W. ,  BATEY, John ,  CHUI, Clarence ,  KOTHARI, Manish ,  TUNG, Ming-Hau

IPC: G02B26/00

CPC classification number: B81B3/0086 ,  B81C2201/0109 ,  B81C2201/014 ,  B81C2201/053 ,  G02B26/001

Abstract: In one embodiment, the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating a first layer comprising a film having a characteristic electromechanical response, and a characteristic optical response, wherein the characteristic optical response is desirable and the characteristic electromechanical response is undesirable; and modifying the characteristic electromechanical response of the first layer by at least reducing charge build up thereon during activation of the microelectromechanical systems device.

Abstract translation: 在一个实施例中，本发明提供一种用于制造微机电系统装置的方法。 该方法包括制造包括具有特征机电响应的薄膜和特征光学响应的​​第一层，其中特征光学响应是期望的，并且特征机电响应是不希望的; 以及通过在所述微机电系统装置的启动期间至少减少其上积累的电荷，来修改所述第一层的特征机电响应。

公开(公告)号：WO2006036386A1

公开(公告)日：2006-04-06

申请号：PCT/US2005/029822

申请日：2005-08-22

Applicant: IDC, LLC ,  CHUI, Clarence

Inventor： CHUI, Clarence

IPC: G02B26/00

CPC classification number: G02B26/001

Abstract: An interferometric light modulating device having two viewing surfaces is provided. In some embodiments, the device can generate two distinct images, one on each side of the device, simultaneously.

Abstract translation: 提供具有两个观察表面的干涉光调制装置。 在一些实施例中，设备可同时生成两个不同的图像，一个在设备的每一侧。

公开(公告)号：WO2006036385A1

公开(公告)日：2006-04-06

申请号：PCT/US2005/029821

申请日：2005-08-22

Applicant: IDC, LLC ,  CHUI, Clarence

Inventor： CHUI, Clarence

IPC: G02B26/00

CPC classification number: G02B26/001

Abstract: A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated by an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate reflected light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.

Abstract translation: 一种微机电系统装置，其制造在其上形成有凹槽的预图案化衬底上。 下电极沉积在衬底上并由正交的上电极通过空腔分开。 上电极被配置为可移动以调制反射光。 在可动上电极上形成半反射层和透明材料。

公开(公告)号：WO2012106720A1

公开(公告)日：2012-08-09

申请号：PCT/US2012/023999

申请日：2012-02-06

Applicant: QUALCOMM INCORPORATED ,  LAN, Je-Hsiung ,  NOWAK, Matthew, Michael ,  GOUSEV, Evgeni, P. ,  KIM, Jonghae ,  CHUI, Clarence

Inventor： LAN, Je-Hsiung ,  NOWAK, Matthew, Michael ,  GOUSEV, Evgeni, P. ,  KIM, Jonghae ,  CHUI, Clarence

IPC: H01L21/02 ,  H01L29/94 ,  H01G4/012 ,  H01L23/522 ,  H01L23/64

CPC classification number: H01L28/82 ,  H01G4/012 ,  H01G4/10 ,  H01L23/5223 ,  H01L23/642 ,  H01L28/87 ,  H01L29/945 ,  H01L2224/16225 ,  H01L2924/15174 ,  H01L2924/15192 ,  H01L2924/15311

Abstract: Higher capacitance density is achieved by increasing a surface area of a capacitor. A larger surface area may be obtained by forming isotropic ball shapes (a concave surface) in the trenches on the semiconductor die. The concave surfaces are fabricated by depositing bilayers of amorphous-silicon and silicon oxide. Openings are patterned in the silicon oxide hard mask for trenches. The openings are transferred to the amorphous-silicon layers through isotropic etching to form concave surfaces. Conducting, insulating, and conducting layers are deposited on the concave surfaces of the trenches by atomic layer deposition.

Abstract translation: 通过增加电容器的表面积来实现更高的电容密度。 可以通过在半导体管芯上的沟槽中形成各向同性球形（凹面）来获得更大的表面积。 通过沉积非晶硅和氧化硅的双层来制造凹面。 在用于沟槽的氧化硅硬掩模中图案化开口。 通过各向同性蚀刻将开口转移到非晶硅层以形成凹面。 导电，绝缘和导电层通过原子层沉积沉积在沟槽的凹面上。

公开(公告)号：WO2010111431A3

公开(公告)日：2011-03-10

申请号：PCT/US2010028552

申请日：2010-03-24

Applicant: QUALCOMM MEMS TECHNOLOGIES INC ,  LEWIS ALAN G ,  MIGNARD MARC M ,  CHUI CLARENCE ,  VAN LIER WILHELMUS JOHANNES ROBERTUS ,  TODOROVICH MARK M ,  CUMMINGS WILLIAM

Inventor： LEWIS ALAN G ,  MIGNARD MARC M ,  CHUI CLARENCE ,  VAN LIER WILHELMUS JOHANNES ROBERTUS ,  TODOROVICH MARK M ,  CUMMINGS WILLIAM

IPC: G09G3/34

CPC classification number: G09G3/3466 ,  G09G3/2003 ,  G09G2300/0473 ,  G09G2300/06 ,  G09G2310/0251 ,  G09G2310/0254 ,  G09G2310/04 ,  G09G2310/06 ,  G09G2320/0252 ,  G09G2330/021

Abstract: A method of driving electromechanical devices such as interferometric modulators includes applying a voltage along a common line to release the electromechanical devices along the common line, followed by applying an address voltage along the common line to actuate selected electromechanical devices along the common line based on voltages applied along segment lines. Hold voltages may be applied along common lines between applications of release and address voltages, and the segment voltages may be selected to be sufficiently small that the segment voltages will not affect the state of the electromechanical devices along other common lines not being written to.

Abstract translation: 驱动诸如干涉式调制器的机电装置的方法包括沿公共线施加电压以沿着公共线释放机电装置，随后沿着公共线施加地址电压以基于电压来驱动沿着公共线的选定的机电装置 沿线段应用。 可以在释放和寻址电压的应用之间沿着公共线施加保持电压，并且段电压可以被选择为足够小，使得分段电压不会影响沿着不被写入的其它公共线的机电装置的状态。

公开(公告)号：WO2009137535A1

公开(公告)日：2009-11-12

申请号：PCT/US2009/042916

申请日：2009-05-05

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  CHUI, Clarence ,  MILES, Mark, W. ,  KOTHARI, Manish

Inventor： CHUI, Clarence ,  MILES, Mark, W. ,  KOTHARI, Manish

IPC: B41J2/01 ,  B41M3/00 ,  G02B5/20 ,  G02B26/00 ,  G02B5/28 ,  B81C1/00

CPC classification number: G02B26/001 ,  G02B5/201 ,  G02B5/223 ,  Y10T428/249921

Abstract: Disclosed are apparatus and methods for fabricating a static interferometric display device. A plurality of sputtering modules is used to form static interferometric elements on a substrate. These elements each have a plurality of interferometric sub-elements that each has an interferometric stack. A first sub-element of each element is formed so that an interferometric modulation of light due to the first element's stack transmits at a first color, and a second sub-element of each element is formed so that a second color is transmitted. The sub-elements of each element are arranged with respect to each other so that all of the elements appear as a third color to a user if all the sub-elements of each element are left unmasked. A printing system is then used to mask one or more sub-elements of one or more elements so as to form, with the elements, a static image having multiple colors.

Abstract translation: 公开了用于制造静态干涉式显示装置的装置和方法。 多个溅射模块用于在衬底上形成静态干涉测量元件。 这些元件各自具有多个具有干涉式叠层的干涉子元件。 每个元件的第一子元件被形成为使得由于第一元件的堆叠而导致的光的干涉调制以第一颜色发送，并且每个元件的第二子元件被形成为使得第二颜色被传输。 每个元素的子元素相对于彼此布置，使得如果将每个元素的所有子元素保持未屏蔽，则所有元素在用户身上显示为第三种颜色。 然后使用打印系统来掩蔽一个或多个元件的一个或多个子元件，以便与元件形成具有多种颜色的静态图像。

公开(公告)号：WO2009099791A1

公开(公告)日：2009-08-13

申请号：PCT/US2009/032045

申请日：2009-01-26

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  KOTHARI, Manish ,  CHUI, Clarence ,  GUDLAVALLETI, Sauri

Inventor： KOTHARI, Manish ,  CHUI, Clarence ,  GUDLAVALLETI, Sauri

IPC: B81C1/00 ,  G03G17/00 ,  H01L21/02 ,  H01L21/44 ,  H01L23/48 ,  B81B7/00

CPC classification number: B81C1/00626 ,  B81B2201/042 ,  B81B2203/0109

Abstract: Methods of fabricating an electromechanical systems device that minimize critical dimension (CD) loss in the device are described. The methods provide electromechanical systems devices with improved properties, including high reflectivity.

Abstract translation: 描述了使装置中的临界尺寸（CD）损耗最小化的机电系统装置的制造方法。 这些方法提供具有改进性能的机电系统装置，包括高反射率。

公开(公告)号：WO2009009502A1

公开(公告)日：2009-01-15

申请号：PCT/US2008/069362

申请日：2008-07-07

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  NACHMAN, Ramez ,  CHUI, Clarence ,  KOTHARI, Manish

Inventor： NACHMAN, Ramez ,  CHUI, Clarence ,  KOTHARI, Manish

IPC: G09G5/34

CPC classification number: G09G3/3466 ,  G02B26/001 ,  G09G3/2092 ,  G09G2320/041 ,  G09G2320/048

Abstract: The invention comprises systems and methods for adjusting a driving voltage based on relaxation information of a movable reflective layer of an interferometric modulator. In one example, a device for driving a MEMS device having a movable reflective layer comprises a sensing unit configured to generate information related to one or more of time, environmental exposure, and frame rate of a movable reflective layer of at least one MEMS device, and a driver circuit configured to apply voltages to drive said at least one MEMS device, said voltages being based at least in part on said information.

Abstract translation: 本发明包括基于干涉式调制器的可移动反射层的松弛信息来调节驱动电压的系统和方法。 在一个示例中，用于驱动具有可移动反射层的MEMS器件的装置包括感测单元，其被配置为产生与至少一个MEMS器件的可移动反射层的时间，环境曝光和帧速率中的一个或多个相关的信息， 以及被配置为施加电压以驱动所述至少一个MEMS器件的驱动器电路，所述电压至少部分地基于所述信息。

公开(公告)号：WO2008005108A3

公开(公告)日：2008-01-10

申请号：PCT/US2007/011811

申请日：2007-05-16

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  CHUI, Clarence ,  LEWIS, Alan ,  MIGNARD, Marc, M.

Inventor： CHUI, Clarence ,  LEWIS, Alan ,  MIGNARD, Marc, M.

IPC: G09G3/34

Abstract: A display array which can reduce the row connections between the display and the driver circuit and methods of manufacturing and operating the same are disclosed. In one embodiment, a display device comprises an array of MEMS display elements and a plurality of voltage dividers coupled to the array and configured to provide row output voltages to drive the array, wherein each row is connected to at least two inputs joined by a voltage divider.