Terahertz wave apparatus
    25.
    发明专利
    Terahertz wave apparatus 有权
    TERAHERTZ WAVE APPARATUS

    公开(公告)号:JP2011164578A

    公开(公告)日:2011-08-25

    申请号:JP2010235414

    申请日:2010-10-20

    Abstract: PROBLEM TO BE SOLVED: To provide a terahertz wave apparatus capable of generating and detecting a continuously-varying terahertz wave. SOLUTION: A terahertz wave apparatus 300 includes: a wavelength-fixed laser 310 emitting first laser light having a fixed first wavelength; a wavelength-swept laser 320 emitting second laser light having a variable second wavelength; a coupler 330 coupling the first laser light with the second laser light; and a generator 340 converting mixed light emitted from the coupler into a terahertz wave where a frequency of the terahertz wave is continuously varied. Furthermore, the terahertz wave apparatus may include a detector detecting the continuously-varying terahertz wave, thus enabling high-speed terahertz wave spectroscopy. COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 解决的问题:提供能够产生和检测连续变化的太赫兹波的太赫兹波装置。 太赫波装置300包括:发射具有固定的第一波长的第一激光的波长固定激光器310; 波长扫描激光器320发射具有可变第二波长的第二激光; 将第一激光与第二激光耦合的耦合器330; 以及将从耦合器发射的混合光转换为太赫兹波的频率连续变化的太赫兹波的发生器340。 此外,太赫兹波装置可以包括检测连续变化的太赫兹波的检测器,从而实现高速太赫兹波谱。 版权所有(C)2011,JPO&INPIT

    Spectrum analyzer capable of performing real-time process diagnosis
    27.
    发明专利
    Spectrum analyzer capable of performing real-time process diagnosis 审中-公开
    能够进行实时过程诊断的谱分析仪

    公开(公告)号:JP2009042217A

    公开(公告)日:2009-02-26

    申请号:JP2008154783

    申请日:2008-06-13

    CPC classification number: G01N21/3504 G01N21/031 G01N2021/151

    Abstract: PROBLEM TO BE SOLVED: To provide a spectrum analyzer capable of performing the real-time process diagnosis, which performs the real-time process diagnosis such that a beam is made to enter a reaction substance or a reaction secondary product contained in a reaction vessel to measure an emission beam emitted therefrom, and to analyze the reaction substance or the reaction secondary product quantitatively and qualitatively. SOLUTION: The spectrum analyzer capable of performing the real-time process diagnosis comprises: the reaction vessel with an internal vacuum state which includes an incident window for making the beam incident, a containing part for temporarily containing the reaction substance or the reaction secondary product such that the incident beam of the incident window is made incident in order to perform the real-time process diagnosis for the reaction substance or the reaction secondary product, an emission window from which the incident beam coming from the containing part and being deflected/scattered by the reaction substance or the reaction secondary product is emitted, and a reflecting mirror contained in the containing part for reflecting the incident beam of the incident window at least one time or more in the containing part and emitting the beam through the emission window; a detector for detecting the emitted beam; and an analyzer for analyzing a sample quantitatively and qualitatively by using the intensity of the detected beam. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:为了提供能够执行实时过程诊断的频谱分析仪,其进行实时过程诊断,使得使光束进入反应物质或包含在反应物中的反应次级产物 反应容器,用于测量从其发射的发射光束,并定量和定性地分析反应物质或反应二次产物。 解决方案:能够执行实时过程诊断的频谱分析仪包括:具有内部真空状态的反应容器,其包括用于使光束入射的入射窗口,用于临时容纳反应物质的反应物或反应物 二次产品使得入射窗的入射光束入射,以便对反应物质或反应次生产物进行实时过程诊断,发射窗从入射光束从容纳部分从该发射窗被偏转 由反应物质或反应二次产物散射的反射镜和包含在容纳部分中的反射镜,用于在入射部分中反射入射窗的入射光束至少一次以上,并通过发射窗口发射光束 ; 用于检测发射光束的检测器; 以及通过使用所检测的光束的强度来定量和定性地分析样本的分析器。 版权所有(C)2009,JPO&INPIT

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