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    AUTOMATICALLY REPLACEABLE APPARATUS FOR COLLECTING BYPRODUCTS AND THE CONTROLLING METHOD THEREOF IN EQUIPMENT PRODUCING SEMICONDUCTOR
    21.
    发明申请
    AUTOMATICALLY REPLACEABLE APPARATUS FOR COLLECTING BYPRODUCTS AND THE CONTROLLING METHOD THEREOF IN EQUIPMENT PRODUCING SEMICONDUCTOR 有权
    用于收集副产品的自动更换装置及其生产半导体设备的控制方法

    公开(公告)号：US20090306808A1

    公开(公告)日：2009-12-10

    申请号：US12373482

    申请日：2006-09-08

    Applicant: Che-Hoo Cho ,  Seung-Il Lee ,  Young-Hun Yun

    Inventor： Che-Hoo Cho ,  Seung-Il Lee ,  Young-Hun Yun

    IPC: H01L21/67 ,  G06F17/00

    CPC classification number: C23C16/4412 ,  Y10T29/5313

    Abstract: Disclosed herein are an automatically replaceable apparatus for collecting byproducts in semiconductor producing equipment and a control method thereof. The apparatus includes several trap units mounted to a vertical shaft at regular angular intervals and rotating in response to a driving direction of a servo motor. Upper and lower plates support the vertical shaft, and connect byproduct inlet and outlet ports, cleaning-water supply and discharge ports, and dry-gas supply and exhaust ports to the respective trap units. Trap and plate coupling means are extended at normal times to air-tightly seal gaps between the upper and lower plates and the trap units, and contracted when the trap units are rotated in a predetermined direction for the replacement. The servo motor is mounted to a lower surface of the lower plate and rotates the trap units within a predetermined angular range. A control unit controls the operation of the components.

    Abstract translation: 这里公开了用于收集半导体制造设备中的副产物的自动替换装置及其控制方法。 该装置包括几个陷阱单元，其以规则的角度间隔安装到垂直轴并且响应于伺服电动机的驱动方向而旋转。 上板和下板支撑垂直轴，并将副产品入口和出口，清洁供水和排出口以及干气供应和排气口连接到各个收集单元。 捕集器和板联接装置在正常时间延伸以气密地密封上板和下板和捕集装置之间的间隙，并且当捕集装置沿预定方向旋转以便更换时收缩。 伺服电动机安装在下板的下表面，并将捕集单元旋转到预定的角度范围内。 控制单元控制组件的操作。

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