公开(公告)号：KR1020040092243A

公开(公告)日：2004-11-03

申请号：KR1020030026485

申请日：2003-04-25

Applicant: 삼성전자주식회사

Inventor： 김정윤

IPC: H01L21/68

Abstract: PURPOSE: Semiconductor equipment with a dynamic wafer chuck is provided to prevent a rotary shaft of a motor from sliding by forming a hole with a flat portion at the center of a pulley corresponding to the shape of the shaft. CONSTITUTION: A wafer is loaded on a wafer chuck. A support part is connected to a side or a bottom of the wafer chuck. A pulley with a center hole(119) is spaced apart from the support part. The center hole has a flat portion. A driving motor with a rotary shaft(112) is connected with the pulley through the center hole. At this time, the cross-sectional shape of the rotary shaft is the same as that of the center hole. A belt is used for connecting the pulley with the support part.

Abstract translation: 目的：提供具有动态晶片卡盘的半导体设备，通过在与轴的形状对应的滑轮的中心处形成具有平坦部分的孔来防止电动机的旋转轴滑动。 构成：将晶片装载在晶片卡盘上。 支撑部分连接到晶片卡盘的一侧或底部。 具有中心孔（119）的滑轮与支撑部分间隔开。 中心孔具有平坦部分。 具有旋转轴（112）的驱动电机通过中心孔与滑轮连接。 此时，旋转轴的截面形状与中心孔的截面形状相同。 皮带用于将滑轮与支撑部分连接。