公开(公告)号：KR101288047B1

公开(公告)日：2013-07-23

申请号：KR1020120056200

申请日：2012-05-25

Applicant: 주식회사 나노텍

Inventor： 차동호 ,  남윤석

IPC: H01L21/66

Abstract: PURPOSE: A gas analysis apparatus using a multi-frequency is provided to simultaneously radiate frequencies having mutually different bands, thereby uniformly discharging plasma. CONSTITUTION: A gas analysis apparatus using a multi-frequency includes an auxiliary chamber, a first frequency generating part (120), a second frequency generating part (130), and a spectrum analyzer (140). A gas inside a chamber flows into the auxiliary chamber through an exhaust pipe. The auxiliary chamber converts the gas into plasma. The first frequency generating part applies a first frequency to the auxiliary chamber. The second frequency generating part applies a second frequency to the auxiliary chamber. The spectrum analyzer analyzes a ray from the auxiliary chamber.

Abstract translation: 目的：提供使用多频的气体分析装置，以同时辐射具有相互不同的频带的频率，从而均匀地排放等离子体。 构成：使用多频率的气体分析装置包括辅助室，第一频率发生部（120），第二频率生成部（130）和频谱分析器（140）。 室内的气体通过排气管流入辅助室。 辅助室将气体转换成等离子体。 第一频率产生部分向辅助室施加第一频率。 第二频率产生部分向辅助室施加第二频率。 频谱分析仪分析来自辅助室的射线。

公开(公告)号：KR1020120133734A

公开(公告)日：2012-12-11

申请号：KR1020110052545

申请日：2011-06-01

Applicant: 주식회사 나노텍

Inventor： 차동호

IPC: G01N21/958 ,  G01B11/16

Abstract: PURPOSE: A device for detecting the existence of a defect on an edge portion of a glass substrate is provided to accurately detect defects by using lasers regardless of the generation of vertical shake caused by high speed transfer of the glass substrate, thereby minimizing a failure rate and enhancing process efficiency. CONSTITUTION: A device for detecting the existence of a defect on an edge portion of a glass substrate comprises an LCD glass substrate(100), an optical unit(200), a first collimator(201), a cylindrical lens(202), a second collimator(301), a beam splitter(302), a first optical sensor(303), a first amplifier(305), a first A/D converter(307), a second optical sensor(304), a second amplifier(306), a second A/D converter(308), and a controller(313). The light optical unit is made to form an angle with the top surface of the edge portion of the glass substrate and projects lasers on the edge unit. The first collimator is comprised in between the glass substrate and optical unit to widen the lasers. The cylindrical lens is comprised in between the first collimator and the glass substrate to emit the lasers projected from the optical unit. The beam splitter is comprised in the lower part of the second collimator and positioned on a same axis with the lasers projected from the optical unit, and divides the lasers which penetrate through the glass substrate and the second collimator from the first collimator. [Reference numerals] (303) First optical sensor; (304) Second optical sensor; (305) First amplifier; (306) Second amplifier; (307) First A/D converter; (308) Second A/D converter; (310) Third optical sensor; (311) Third amplifier; (312) Third A/D converter; (313) Controller

Abstract translation: 目的：提供一种用于检测玻璃基板边缘部分存在缺陷的装置，以便通过使用激光器来精确地检测缺陷，而不管由玻璃基板的高速传送引起的垂直抖动的产生，从而使故障率最小化 并提高流程效率。 构成：用于检测玻璃基板的边缘部分存在缺陷的装置包括LCD玻璃基板（100），光学单元（200），第一准直仪（201），柱面透镜（202）， 第二准直器（301），分束器（302），第一光学传感器（303），第一放大器（305），第一A / D转换器（307），第二光学传感器（304） 306），第二A / D转换器（308）和控制器（313）。 光学单元被制成与玻璃基板的边缘部分的顶表面形成一角度并且在边缘单元上投射激光。 第一准直器包括在玻璃基板和光学单元之间以加宽激光器。 柱面透镜包括在第一准直器和玻璃基板之间，以发射从光学单元投射的激光器。 分束器包括在第二准直仪的下部，并且与从光学单元投射的激光器定位在相同的轴上，并且将穿过玻璃基板和第二准直器的激光器与第一准直仪分开。 （附图标记）（303）第一光学传感器; （304）第二光学传感器; （305）第一放大器; （306）第二放大器; （307）第一A / D转换器; （308）第二A / D转换器; （310）第三光学传感器; （311）第三放大器; （312）第三A / D转换器; （313）控制器

公开(公告)号：KR1020110032908A

公开(公告)日：2011-03-30

申请号：KR1020090090652

申请日：2009-09-24

Applicant: 주식회사 나노텍

Inventor： 차동호

IPC: G01D21/00 ,  B25J5/00 ,  B25J19/02

Abstract: PURPOSE: An environmental monitoring system is provided to enable remote environmental monitoring using a mobile robot which is embedded with an environmental sensor. CONSTITUTION: An environmental monitoring system comprises a mobile robot, an environmental monitoring device, a wireless communication unit(110), an environmental information collecting unit(130), and a control unit(140). The mobile robot collects environmental information while moving according to remote control commands. The environmental monitoring device remote-controls the movement of the mobile robot, receives and analyzes the environmental information detected by the mobile robot, and outputs the analysis results on a screen. The wireless communication unit wirelessly communicates with the environmental monitoring device. The environmental information collecting unit collects one or more environmental information. The control unit controls the movement of the mobile robot according to the remote control commands from the environmental monitoring device and transmits the environmental information collected by the environmental information collecting unit to the environmental monitoring device through the wireless communication unit.

Abstract translation: 目的：提供环境监测系统，使用嵌入环境传感器的移动机器人进行远程环境监测。 构成：环境监测系统包括移动机器人，环境监测装置，无线通信单元（110），环境信息收集单元（130）和控制单元（140）。 移动机器人根据遥控命令移动时收集环境信息。 环境监控装置遥控移动机器人的移动，接收并分析移动机器人检测到的环境信息，并将分析结果输出到屏幕上。 无线通信单元与环境监测装置无线通信。 环境信息收集单元收集一个或多个环境信息。 控制单元根据来自环境监视装置的遥控命令来控制移动机器人的移动，并且通过无线通信单元将环境信息收集单元收集的环境信息发送到环境监视装置。

公开(公告)号：KR100905128B1

公开(公告)日：2009-06-30

申请号：KR1020080074212

申请日：2008-07-29

Applicant: 주식회사 나노텍

Inventor： 차동호

IPC: H01L21/02

Abstract: An apparatus and a method for preventing contamination of a self plasma chamber are provided to block the deposition of a contamination material in an inner wall and a window of the self plasma chamber by using a blocking wall. An apparatus for preventing contamination of a self plasma chamber include an electromagnetic filed part, and one or more blocking walls(130a,130b). The electromagnetic filed pat generates the electric field and makes the contamination material get out of a linear path. The linear path faces the window of a self plasma chamber(40) from a process chamber. The blocking wall prevents the contamination material from reaching the window. An optical signal from the self plasma chamber passes through a penetration hole(140) through the linear path and reaches the window.

Abstract translation: 提供一种用于防止自身等离子体室的污染的装置和方法，以通过使用阻挡壁来阻止污染物质沉积在自身等离子体室的内壁和窗口中。 用于防止自等离子体室污染的装置包括电磁场部分和一个或多个阻挡壁（130a，130b）。 电磁场拍摄产生电场并使污染物质脱离线性路径。 线性路径面向来自处理室的自等离子体室（40）的窗口。 阻挡壁防止污染物质到达窗户。 来自自等离子体室的光信号穿过穿过孔（140）穿过线性路径并到达窗口。