公开(公告)号：KR1020110077083A

公开(公告)日：2011-07-07

申请号：KR1020090133543

申请日：2009-12-30

Applicant: 한국기초과학지원연구원

Inventor： 정종만 ,  김윤중 ,  권희석

IPC: H01J37/26

CPC classification number: H01J2237/2614

Abstract: PURPOSE: A phase plate with an improved heating mechanism for TEM is provided to eliminate contaminants from a carbon film without generating an electric field. CONSTITUTION: A body unit is coupled with a TEM barrel. A carbon film is mounted on one end of an aperture plate. A heating unit(30) heats the aperture plate. A heat insulating connecting unit couples the body unit with the aperture plate. The heating unit is embedded in the body unit. The other end of the aperture plate is expanded into the body unit and contacts the heating unit.

Abstract translation: 目的：提供一种具有改进的TEM加热机构的相板，以消除碳膜中的污染物而不产生电场。 构成：身体单元与TEM筒结合。 碳膜安装在孔板的一端。 加热单元（30）加热孔板。 绝热连接单元将主体单元与孔板连接。 加热单元嵌入在主体单元中。 孔板的另一端扩展到主体单元中并与加热单元接触。